{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,22]],"date-time":"2026-08-22T00:34:32Z","timestamp":1787358872845,"version":"build-2736575974"},"reference-count":34,"publisher":"Optica Publishing Group","issue":"3","license":[{"start":{"date-parts":[[2026,2,2]],"date-time":"2026-02-02T00:00:00Z","timestamp":1769990400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR-OA"},{"start":{"date-parts":[[2026,2,2]],"date-time":"2026-02-02T00:00:00Z","timestamp":1769990400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["RS-2022-NR075780"],"award-info":[{"award-number":["RS-2022-NR075780"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003662","name":"Korea Evaluation Institute of Industrial Technology","doi-asserted-by":"publisher","award":["RS-2024-00431712"],"award-info":[{"award-number":["RS-2024-00431712"]}],"id":[{"id":"10.13039\/501100003662","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003662","name":"Korea Evaluation Institute of Industrial Technology","doi-asserted-by":"publisher","award":["RS-2024-00441515"],"award-info":[{"award-number":["RS-2024-00441515"]}],"id":[{"id":"10.13039\/501100003662","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Express"],"published-print":{"date-parts":[[2026,2,9]]},"abstract":"<jats:p>\n                    This paper describes dynamic spectro-ellipsometric interferometry (DSEI), which simultaneously measures ultra-thin film thickness and surface profile non-destructively. The proposed snapshot-scheme DSEI system can provide a cross-sectional image of a sub-100\u2005nm non-uniform thin film object deposited on a warped substrate. This unique measurement capability is enabled by combining spectral interferometry (SI) with dynamic spectroscopic imaging ellipsometry (DSIE) employing a monolithic spectral polarizing interferometric module. In this study, we present a method for obtaining a real cross-sectional thickness line profile by compensating for the nonlinear phase term introduced by the ultra-thin film. To evaluate the effectiveness of the proposed compensation method and measurement reliability, a SiO\n                    <jats:sub>2<\/jats:sub>\n                    \/Si step-shape sample is measured and analyzed. We demonstrate that the proposed DSEI system can provide non-uniform thin film thickness and substrate warpage profiles with nanometer-level vertical resolution and a large field of view of 10\u2005mm.\n                  <\/jats:p>","DOI":"10.1364\/oe.573156","type":"journal-article","created":{"date-parts":[[2026,1,26]],"date-time":"2026-01-26T07:00:08Z","timestamp":1769410808000},"page":"4694","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Snapshot thickness profile cross-sectioning for a warped substrate with non-uniform sub-100\u2005nm ultra-thin film"],"prefix":"10.1364","volume":"34","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5363-6131","authenticated-orcid":true,"given":"Saeid","family":"Kheiryzadehkhanghah","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2058-1116","authenticated-orcid":true,"given":"Gukhyeon","family":"Hwang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Inho","family":"Choi","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Cheongsong","family":"Kim","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jinhwan","family":"An","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yatana Adolphe","family":"Gbogbo","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0822-6699","authenticated-orcid":true,"given":"Chih-Jen","family":"Yu","sequence":"additional","affiliation":[{"name":"Graduate Institute of Electro-Optical Engineering, Chang Gung University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8584-0791","authenticated-orcid":true,"given":"Robert","family":"Magnusson","sequence":"additional","affiliation":[{"name":"University of Texas at Arlington"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Daesuk","family":"Kim","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/05q92br09","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,2,2]]},"reference":[{"key":"oe-34-3-4694-R1","author":"Gary","year":"2004"},{"key":"oe-34-3-4694-R3","doi-asserted-by":"publisher","first-page":"532","DOI":"10.1038\/s41928-018-0150-9","type":"journal-article","volume":"1","author":"Orji","year":"2018","journal-title":"Nat. Electron."},{"key":"oe-34-3-4694-R4","doi-asserted-by":"publisher","first-page":"639","DOI":"10.1016\/j.cirp.2024.05.003","type":"journal-article","volume":"73","author":"Archenti","year":"2024","journal-title":"CIRP Ann."},{"key":"oe-34-3-4694-R5","doi-asserted-by":"publisher","first-page":"9","DOI":"10.37188\/lam.2021.001","type":"journal-article","volume":"2","author":"Kwak","year":"2021","journal-title":"Light: Adv. Manuf."},{"key":"oe-34-3-4694-R6","doi-asserted-by":"publisher","first-page":"944","DOI":"10.1109\/TCPMT.2012.2192732","type":"journal-article","volume":"2","author":"Che","year":"2012","journal-title":"IEEE Trans. Compon. Packag. Manuf. Technol."},{"key":"oe-34-3-4694-R8","doi-asserted-by":"publisher","first-page":"085101","DOI":"10.1063\/1.5037953","type":"journal-article","volume":"8","author":"Park","year":"2018","journal-title":"AIP Adv."},{"key":"oe-34-3-4694-R9","doi-asserted-by":"publisher","first-page":"020801","DOI":"10.1116\/1.5011790","type":"journal-article","volume":"36","author":"Abadias","year":"2018","journal-title":"J. Vac. Sci. Technol. A"},{"key":"oe-34-3-4694-R11","doi-asserted-by":"publisher","first-page":"57","DOI":"10.1117\/12.2605516","type":"journal-article","volume":"11854","author":"Trujillo-Sevilla","year":"2021","journal-title":"Proc. SPIE"},{"key":"oe-34-3-4694-R12","doi-asserted-by":"publisher","first-page":"B26","DOI":"10.1364\/AO.52.000B26","type":"journal-article","volume":"52","author":"Guo","year":"2013","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R13","doi-asserted-by":"publisher","first-page":"36731","DOI":"10.1364\/OE.27.036731","type":"journal-article","volume":"27","author":"Koch","year":"2019","journal-title":"Opt. Express"},{"key":"oe-34-3-4694-R14","doi-asserted-by":"publisher","first-page":"I8.5","DOI":"10.1557\/PROC-814-I8.5","type":"journal-article","volume":"814","author":"Lewis","year":"2004","journal-title":"Mat. Res. Soc. Symp. Proc."},{"key":"oe-34-3-4694-R15","doi-asserted-by":"publisher","first-page":"701","DOI":"10.1080\/09500349608232777","type":"journal-article","volume":"43","author":"Sandoz","year":"1996","journal-title":"J. Mod. Opt."},{"key":"oe-34-3-4694-R16","doi-asserted-by":"publisher","first-page":"31615","DOI":"10.1364\/OE.440507","type":"journal-article","volume":"29","author":"Bae","year":"2021","journal-title":"Opt. Express"},{"key":"oe-34-3-4694-R17","doi-asserted-by":"publisher","first-page":"1893","DOI":"10.1364\/OL.27.001893","type":"journal-article","volume":"27","author":"Kim","year":"2002","journal-title":"Opt. Lett."},{"key":"oe-34-3-4694-R18","doi-asserted-by":"publisher","first-page":"5968","DOI":"10.1364\/AO.38.005968","type":"journal-article","volume":"38","author":"Kim","year":"1999","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R19","doi-asserted-by":"publisher","first-page":"11843","DOI":"10.1038\/s41598-017-11825-6","type":"journal-article","volume":"7","author":"Ghim","year":"2017","journal-title":"Sci. Rep."},{"key":"oe-34-3-4694-R20","author":"Azzam","year":"1987"},{"key":"oe-34-3-4694-R21","author":"Fujiwara","year":"2007"},{"key":"oe-34-3-4694-R22","doi-asserted-by":"publisher","first-page":"6466","DOI":"10.1364\/AO.36.006466","type":"journal-article","volume":"36","author":"Williams","year":"1997","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R23","doi-asserted-by":"publisher","first-page":"1475","DOI":"10.1364\/OL.24.001475","type":"journal-article","volume":"24","author":"Oka","year":"1999","journal-title":"Opt. Lett."},{"key":"oe-34-3-4694-R24","doi-asserted-by":"publisher","first-page":"2638","DOI":"10.1364\/AO.46.002638","type":"journal-article","volume":"46","author":"Giudicotti","year":"2007","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R25","doi-asserted-by":"publisher","first-page":"2661","DOI":"10.1364\/OL.34.002661","type":"journal-article","volume":"34","author":"Hlubina","year":"2009","journal-title":"Opt. Lett."},{"key":"oe-34-3-4694-R26","doi-asserted-by":"publisher","first-page":"108","DOI":"10.1016\/0039-6028(80)90297-6","type":"journal-article","volume":"96","author":"Hauge","year":"1980","journal-title":"Surf. Sci."},{"key":"oe-34-3-4694-R27","doi-asserted-by":"publisher","first-page":"38","DOI":"10.1016\/j.apsusc.2006.05.069","type":"journal-article","volume":"253","author":"Chen","year":"2006","journal-title":"Appl. Surf. Sci."},{"key":"oe-34-3-4694-R28","doi-asserted-by":"publisher","first-page":"14419","DOI":"10.1364\/OE.24.014419","type":"journal-article","volume":"24","author":"Dembele","year":"2016","journal-title":"Opt. Express"},{"key":"oe-34-3-4694-R29","doi-asserted-by":"publisher","first-page":"5978","DOI":"10.1038\/s41598-019-42397-2","type":"journal-article","volume":"9","author":"Kim","year":"2019","journal-title":"Sci. Rep."},{"key":"oe-34-3-4694-R30","doi-asserted-by":"publisher","first-page":"124426","DOI":"10.1016\/j.optcom.2019.124426","type":"journal-article","volume":"454","author":"Dembele","year":"2020","journal-title":"Opt. Commun."},{"key":"oe-34-3-4694-R31","doi-asserted-by":"publisher","first-page":"7653","DOI":"10.1364\/AO.467481","type":"journal-article","volume":"61","author":"Choi","year":"2022","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R32","doi-asserted-by":"publisher","first-page":"1129","DOI":"10.1364\/OL.451064","type":"journal-article","volume":"47","author":"Kim","year":"2022","journal-title":"Opt. Lett."},{"key":"oe-34-3-4694-R33","doi-asserted-by":"publisher","first-page":"19569","DOI":"10.1364\/OE.487111","type":"journal-article","volume":"31","author":"Hwang","year":"2023","journal-title":"Opt. Express"},{"key":"oe-34-3-4694-R34","doi-asserted-by":"publisher","first-page":"1943","DOI":"10.1364\/AO.482319","type":"journal-article","volume":"62","author":"Kheiryzadehkhanghah","year":"2023","journal-title":"Appl. Opt."},{"key":"oe-34-3-4694-R35","doi-asserted-by":"publisher","first-page":"34396","DOI":"10.1364\/OE.26.034396","type":"journal-article","volume":"26","author":"Yun","year":"2018","journal-title":"Opt. Express"},{"key":"oe-34-3-4694-R36","doi-asserted-by":"publisher","first-page":"156","DOI":"10.1364\/JOSA.72.000156","type":"journal-article","volume":"72","author":"Takeda","year":"1982","journal-title":"J. Opt. Soc. Am."},{"key":"oe-34-3-4694-R37","doi-asserted-by":"publisher","first-page":"345","DOI":"10.3807\/COPP.2020.4.4.345","type":"journal-article","volume":"4","author":"Dembele","year":"2020","journal-title":"Curr. Opt. Photonics"}],"container-title":["Optics Express"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=oe-34-3-4694&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T13:05:30Z","timestamp":1778677530000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=oe-34-3-4694"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,2,2]]},"references-count":34,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/oe.573156","relation":{},"ISSN":["1094-4087"],"issn-type":[{"value":"1094-4087","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,2,2]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OE.573156","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"research-article","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"9 July 2025","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"22 January 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2 February 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement","name":"copyright","label":"Copyright"}]}}