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Express"],"published-print":{"date-parts":[[2026,4,20]]},"abstract":"<jats:p>Transmissive three-dimensional (3D) laser scanning systems are promising for precision micro- and nanofabrication, but their scanning range is limited by cumulative optical path difference (OPD) induced by large-field angular scanning and dynamic axial focusing. We propose a system-level integrated co-optimization (SLICO) strategy in which the dynamic focusing module, XY galvanometric scanner, and F-theta telecentric lens are jointly modeled and optimized for collaborative aberration compensation as a unified system. Simulations demonstrate that, over an 80\u2005mm diameter XY scanning field and with the Z-axis scanning range extended from \u00b110\u2005mm to \u00b120\u2005mm, the OPD is reduced from 1.0 to 0.25 waves and the Strehl ratio (STRH) rises from 0.3 to above 0.96. Experimental validation confirms the strategy\u2019s feasibility and performance. 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