{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T10:31:39Z","timestamp":1785407499847,"version":"3.56.0"},"reference-count":26,"publisher":"Optica Publishing Group","issue":"12","license":[{"start":{"date-parts":[[2026,6,11]],"date-time":"2026-06-11T00:00:00Z","timestamp":1781136000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR-OA"},{"start":{"date-parts":[[2026,6,11]],"date-time":"2026-06-11T00:00:00Z","timestamp":1781136000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"name":"Strategic Priority Research Program of CAS","award":["XDC0280301"],"award-info":[{"award-number":["XDC0280301"]}]},{"DOI":"10.13039\/501100012166","name":"National Key R&D Program of China","doi-asserted-by":"crossref","award":["2022YFE0204800"],"award-info":[{"award-number":["2022YFE0204800"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"crossref"}]},{"name":"International Partnership Program of Chinese Academy of Sciences","award":["181231KYSB20200040"],"award-info":[{"award-number":["181231KYSB20200040"]}]},{"name":"Chinese Academy of Sciences President\u2019s International Fellowship Initiative","award":["2023VMB0008"],"award-info":[{"award-number":["2023VMB0008"]}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Express"],"published-print":{"date-parts":[[2026,6,15]]},"abstract":"<jats:p>\n                    The non-destructive and high-precision measurement of grating microstructure parameters at the nanoscale presents a significant challenge for conventional techniques in advanced optical manufacturing. This paper proposes a novel optical scatterometry system for non-destructive, high-precision measurement of grating microstructure parameters. The system integrates a custom-designed dual-beam scatterometer with a dedicated deep learning architecture, termed ASPCNN (Adaptive Self-calibrating Physics-constrained CNN), for the analysis engine. The instrument employs a reference-beam design for enhanced stability. At the same time, the ASPCNN model enables rapid parameter retrieval from diffraction spectra via an Adaptive Receptive Field Fusion (ARFF) module for multi-scale feature extraction and a Self-Calibrating Residual Attention (SCRA) module for noise-robust representation. A physics-constrained loss function ensures predictions adhere to physical feasibility. Experimental results demonstrate sub-nanometer accuracy, outperforming established models (e.g., ResNet, U-Net) with the coefficient of determination (R\n                    <jats:sup>2<\/jats:sup>\n                    )\u2009&gt;\u20090.99. The analysis engine achieves a remarkable single-sample inference time of 9.07\u2005ms, enabling real-time metrological capabilities. This work establishes a new paradigm for intelligent, high-speed, and non-destructive optical metrology, offering a robust solution for industrial metrology of grating microstructures.\n                  <\/jats:p>","DOI":"10.1364\/oe.596288","type":"journal-article","created":{"date-parts":[[2026,6,5]],"date-time":"2026-06-05T15:00:10Z","timestamp":1780671610000},"page":"22723","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Deep learning-enabled optical scatterometry technique for high-precision and non-destructive measurement of grating microstructure parameters"],"prefix":"10.1364","volume":"34","author":[{"given":"Shengquan","family":"Nian","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00xp9wg62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing University of Science and Technology"},{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andong","family":"Xie","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dapeng","family":"Chen","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuqing","family":"Zheng","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shijie","family":"Liu","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6061-5478","authenticated-orcid":true,"given":"Qi","family":"Lu","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7138-1048","authenticated-orcid":true,"given":"Yunxia","family":"Jin","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhigang","family":"Han","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00xp9wg62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing University of Science and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jianda","family":"Shao","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rihong","family":"Zhu","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00xp9wg62","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Nanjing University of Science and Technology"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,6,11]]},"reference":[{"key":"oe-34-12-22723-R1","doi-asserted-by":"publisher","first-page":"3632","DOI":"10.1038\/s41467-023-39164-3","type":"journal-article","volume":"14","author":"Han","year":"2023","journal-title":"Nat. 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