{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T18:58:31Z","timestamp":1785437911477,"version":"3.56.0"},"reference-count":50,"publisher":"Optica Publishing Group","issue":"13","license":[{"start":{"date-parts":[[2026,6,15]],"date-time":"2026-06-15T00:00:00Z","timestamp":1781481600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR-OA"},{"start":{"date-parts":[[2026,6,15]],"date-time":"2026-06-15T00:00:00Z","timestamp":1781481600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["92473104"],"award-info":[{"award-number":["92473104"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["62474180"],"award-info":[{"award-number":["62474180"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["62405348"],"award-info":[{"award-number":["62405348"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Key Research and Development Program of China","award":["SQ2023YFE0201365"],"award-info":[{"award-number":["SQ2023YFE0201365"]}]},{"name":"the Autonomous deployment project of State Key Laboratory of Materials for Integrated Circuits","award":["SKLJC-Z2024-A05"],"award-info":[{"award-number":["SKLJC-Z2024-A05"]}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Express"],"published-print":{"date-parts":[[2026,6,29]]},"abstract":"<jats:p>\n                    Recent advances in ultrasonography and photoacoustic tomography call for ultrasound sensors with high sensitivity, broad bandwidth, miniaturized footprint, and scalability. A conventional piezoelectric transducer is fundamentally constrained by limited sensitivity, element density, and system integration complexity. In this work, we introduce a micro-ring based optomechanical ultrasound sensor using a SiN\/Si hybrid waveguide structure with a 30\u00a0nm air gap engineered within the sensing region. The micro-ring resonator exhibits a high-quality factor of 4.8\u2009\u00d7\u200910\n                    <jats:sup>4<\/jats:sup>\n                    and a free spectral range (FSR) of 18\u00a0nm at the wavelength of 1580\u00a0nm. With a compact diameter of 18\u00a0\u00b5m, the sensor achieves a low noise-equivalent pressure below 0.64\u00a0mPa\u2009Hz\n                    <jats:sup>\u22121\/2<\/jats:sup>\n                    over a frequency range of 2\u201330\u00a0MHz, which is two orders of magnitude better than piezoelectric devices of the same size. Furthermore, the device enables photoacoustic signal detection at a depth up to 10\u00a0cm and offers a wide acceptance angle of \u00b120\u00b0 for frequencies up to 20\u00a0MHz. High-resolution photoacoustic tomography of a graphite pencil lead is demonstrated, revealing sub-millimetric structural details. With its exceptional sensitivity, broad bandwidth, and inherent compatibility with chip-scale multiplexing, this platform offers a promising solution for minimally invasive photoacoustic endoscopy, high-resolution imaging systems, and highly dense ultrasound sensor networks.\n                  <\/jats:p>","DOI":"10.1364\/oe.599644","type":"journal-article","created":{"date-parts":[[2026,6,8]],"date-time":"2026-06-08T07:00:10Z","timestamp":1780902010000},"page":"23147","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Ultrasensitive and broadband micro-ring based optomechanical ultrasound sensor for photoacoustic imaging"],"prefix":"10.1364","volume":"34","author":[{"given":"Chao","family":"Xu","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zijie","family":"Zhao","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics of the Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xu","family":"Chen","sequence":"additional","affiliation":[{"name":"Shanghai Industrial \u00b5Technology Research Institute"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuxiao","family":"Wang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Industrial \u00b5Technology Research Institute"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chenxi","family":"Wang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jian","family":"Shen","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhuoyun","family":"Li","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wencheng","family":"Yue","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hang","family":"Gao","sequence":"additional","affiliation":[{"name":"Institute of Microelectronics of the Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yan","family":"Cai","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04nytyj38","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Shanghai Industrial \u00b5Technology Research Institute"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,6,15]]},"reference":[{"key":"oe-34-13-23147-R1","doi-asserted-by":"publisher","first-page":"100144","DOI":"10.1016\/j.pacs.2019.100144","type":"journal-article","volume":"16","author":"Attia","year":"2019","journal-title":"Photoacoustics"},{"key":"oe-34-13-23147-R2","doi-asserted-by":"publisher","first-page":"602","DOI":"10.1098\/rsfs.2011.0028","type":"journal-article","volume":"1","author":"Beard","year":"2011","journal-title":"Interface Focus"},{"key":"oe-34-13-23147-R3","doi-asserted-by":"publisher","first-page":"2259","DOI":"10.1109\/TUFFC.2005.1563268","type":"journal-article","volume":"52","author":"Caliano","year":"2005","journal-title":"IEEE Trans. Ultrason., Ferroelect., Freq. Contr."},{"key":"oe-34-13-23147-R4","doi-asserted-by":"publisher","first-page":"365","DOI":"10.1038\/s41571-022-00615-3","type":"journal-article","volume":"19","author":"Lin","year":"2022","journal-title":"Nat. Rev. Clin. Oncol"},{"key":"oe-34-13-23147-R5","doi-asserted-by":"publisher","first-page":"041101","DOI":"10.1063\/1.2195024","type":"journal-article","volume":"77","author":"Xu","year":"2006","journal-title":"Rev. Sci. Instrum."},{"key":"oe-34-13-23147-R6","doi-asserted-by":"publisher","first-page":"511","DOI":"10.1186\/s13287-021-02576-3","type":"journal-article","volume":"12","author":"James","year":"2021","journal-title":"Stem Cell Res. Ther."},{"key":"oe-34-13-23147-R7","doi-asserted-by":"publisher","first-page":"3","DOI":"10.1186\/s12929-019-0594-x","type":"journal-article","volume":"27","author":"Liu","year":"2020","journal-title":"J. Biomed. Sci. (London, U. K.)"},{"key":"oe-34-13-23147-R8","doi-asserted-by":"publisher","first-page":"137","DOI":"10.1109\/JSTQE.2015.2497323","type":"journal-article","volume":"22","author":"Strohm","year":"2016","journal-title":"IEEE J. Select. Topics Quantum Electron."},{"key":"oe-34-13-23147-R9","doi-asserted-by":"publisher","first-page":"36","DOI":"10.1016\/j.pacs.2016.01.001","type":"journal-article","volume":"4","author":"Strohm","year":"2016","journal-title":"Photoacoustics"},{"key":"oe-34-13-23147-R10","doi-asserted-by":"publisher","first-page":"056004","DOI":"10.1117\/1.JBO.17.5.056004","type":"journal-article","volume":"17","author":"Yao","year":"2012","journal-title":"J. Biomed. Opt"},{"key":"oe-34-13-23147-R11","doi-asserted-by":"publisher","first-page":"1262","DOI":"10.3390\/app7121262","type":"journal-article","volume":"7","author":"Cao","year":"2017","journal-title":"Appl. Sci."},{"key":"oe-34-13-23147-R12","doi-asserted-by":"publisher","first-page":"085003","DOI":"10.1117\/1.JBO.25.8.085003","type":"journal-article","volume":"25","author":"Bench","year":"2020","journal-title":"J. Biomed. Opt."},{"key":"oe-34-13-23147-R13","doi-asserted-by":"publisher","first-page":"2484","DOI":"10.1364\/BOE.418397","type":"journal-article","volume":"12","author":"Merdasa","year":"2021","journal-title":"Biomed. Opt. Express"},{"key":"oe-34-13-23147-R14","doi-asserted-by":"publisher","first-page":"41970","DOI":"10.1038\/srep41970","type":"journal-article","volume":"7","author":"Toi","year":"2017","journal-title":"Sci. Rep."},{"key":"oe-34-13-23147-R15","doi-asserted-by":"publisher","first-page":"786","DOI":"10.1038\/s41598-018-19161-z","type":"journal-article","volume":"8","author":"Matsumoto","year":"2018","journal-title":"Sci. Rep."},{"key":"oe-34-13-23147-R16","doi-asserted-by":"publisher","first-page":"29","DOI":"10.1186\/s40580-023-00377-3","type":"journal-article","volume":"10","author":"Park","year":"2023","journal-title":"Nano Convergence"},{"key":"oe-34-13-23147-R17","doi-asserted-by":"publisher","first-page":"011101","DOI":"10.1117\/1.3281673","type":"journal-article","volume":"15","author":"Hu","year":"2010","journal-title":"J. Biomed. Opt."},{"key":"oe-34-13-23147-R18","doi-asserted-by":"publisher","first-page":"2442","DOI":"10.1364\/OL.43.002442","type":"journal-article","volume":"43","author":"Qiao","year":"2018","journal-title":"Opt. Lett."},{"key":"oe-34-13-23147-R19","doi-asserted-by":"publisher","first-page":"1495","DOI":"10.1364\/OPTICA.400517","type":"journal-article","volume":"7","author":"Vilov","year":"2020","journal-title":"Optica"},{"key":"oe-34-13-23147-R20","doi-asserted-by":"publisher","first-page":"076003","DOI":"10.1117\/1.3594786","type":"journal-article","volume":"16","author":"Yao","year":"2011","journal-title":"J. Biomed. Opt."},{"key":"oe-34-13-23147-R21","doi-asserted-by":"publisher","first-page":"77","DOI":"10.1016\/j.neuroimage.2017.01.049","type":"journal-article","volume":"150","author":"Cao","year":"2017","journal-title":"NeuroImage"},{"key":"oe-34-13-23147-R22","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1117\/1.JBO.23.1.016009","type":"journal-article","volume":"23","author":"Jiang","year":"2018","journal-title":"J. Biomed. Opt."},{"key":"oe-34-13-23147-R23","doi-asserted-by":"publisher","first-page":"8020","DOI":"10.3390\/s150408020","type":"journal-article","volume":"15","author":"Qiu","year":"2015","journal-title":"Sensors"},{"key":"oe-34-13-23147-R24","doi-asserted-by":"publisher","first-page":"1205","DOI":"10.3390\/s20041205","type":"journal-article","volume":"20","author":"Zamora","year":"2020","journal-title":"Sensors"},{"key":"oe-34-13-23147-R25","doi-asserted-by":"publisher","first-page":"097003","DOI":"10.1117\/1.JBO.18.9.097003","type":"journal-article","volume":"18","author":"Winkler","year":"2013","journal-title":"J. Biomed. Opt."},{"key":"oe-34-13-23147-R26","doi-asserted-by":"publisher","first-page":"25","DOI":"10.4236\/ojapps.2018.81003","type":"journal-article","volume":"08","author":"Gross","year":"2018","journal-title":"Open J. Appl. Sci."},{"key":"oe-34-13-23147-R27","doi-asserted-by":"publisher","first-page":"48","DOI":"10.1016\/j.pacs.2017.09.001","type":"journal-article","volume":"8","author":"Vallet","year":"2017","journal-title":"Photoacoustics"},{"key":"oe-34-13-23147-R28","doi-asserted-by":"publisher","first-page":"811","DOI":"10.1109\/TUFFC.2008.715","type":"journal-article","volume":"55","author":"Wong","year":"2008","journal-title":"IEEE Trans. Ultrason., Ferroelect., Freq. Contr."},{"key":"oe-34-13-23147-R29","doi-asserted-by":"publisher","first-page":"1558","DOI":"10.1364\/PRJ.394941","type":"journal-article","volume":"8","author":"Ma","year":"2020","journal-title":"Photonics Res."},{"key":"oe-34-13-23147-R30","doi-asserted-by":"publisher","first-page":"4171","DOI":"10.1364\/BOE.7.004171","type":"journal-article","volume":"7","author":"Preisser","year":"2016","journal-title":"Biomed. Opt. Express"},{"key":"oe-34-13-23147-R31","doi-asserted-by":"publisher","first-page":"372","DOI":"10.1038\/s41586-020-2685-y","type":"journal-article","volume":"585","author":"Shnaiderman","year":"2020","journal-title":"Nature"},{"key":"oe-34-13-23147-R32","doi-asserted-by":"publisher","first-page":"1180","DOI":"10.1364\/OPTICA.4.001180","type":"journal-article","volume":"4","author":"Shnaiderman","year":"2017","journal-title":"Optica"},{"key":"oe-34-13-23147-R33","doi-asserted-by":"publisher","first-page":"1833","DOI":"10.1364\/OL.36.001833","type":"journal-article","volume":"36","author":"Rosenthal","year":"2011","journal-title":"Opt. Lett."},{"key":"oe-34-13-23147-R34","doi-asserted-by":"publisher","first-page":"132","DOI":"10.1038\/s41467-018-08038-4","type":"journal-article","volume":"10","author":"Basiri-Esfahani","year":"2019","journal-title":"Nat. Commun."},{"key":"oe-34-13-23147-R35","doi-asserted-by":"publisher","first-page":"28169","DOI":"10.1364\/OE.22.028169","type":"journal-article","volume":"22","author":"Chistiakova","year":"2014","journal-title":"Opt. Express"},{"key":"oe-34-13-23147-R36","doi-asserted-by":"publisher","first-page":"303","DOI":"10.1364\/PRJ.376640","type":"journal-article","volume":"8","author":"Pan","year":"2020","journal-title":"Photonics Res."},{"key":"oe-34-13-23147-R37","doi-asserted-by":"publisher","first-page":"1093","DOI":"10.1021\/ph500159g","type":"journal-article","volume":"1","author":"Zhang","year":"2014","journal-title":"ACS Photonics"},{"key":"oe-34-13-23147-R38","doi-asserted-by":"publisher","first-page":"505","DOI":"10.1364\/BOE.381129","type":"journal-article","volume":"11","author":"Wang","year":"2020","journal-title":"Biomed. Opt. Express"},{"key":"oe-34-13-23147-R39","doi-asserted-by":"publisher","first-page":"3975","DOI":"10.1364\/OL.36.003975","type":"journal-article","volume":"36","author":"Wang","year":"2011","journal-title":"Opt. Lett."},{"key":"oe-34-13-23147-R40","doi-asserted-by":"publisher","first-page":"1488","DOI":"10.1038\/s41467-022-29179-7","type":"journal-article","volume":"13","author":"Hazan","year":"2022","journal-title":"Nat. Commun."},{"key":"oe-34-13-23147-R41","doi-asserted-by":"publisher","first-page":"25","DOI":"10.1038\/s42005-025-02456-9","type":"journal-article","volume":"9","author":"Erdogan","year":"2025","journal-title":"Commun. Phys."},{"key":"oe-34-13-23147-R42","doi-asserted-by":"publisher","first-page":"14328","DOI":"10.1038\/srep14328","type":"journal-article","volume":"5","author":"Leinders","year":"2015","journal-title":"Sci. Rep."},{"key":"oe-34-13-23147-R43","doi-asserted-by":"publisher","first-page":"1928","DOI":"10.1364\/OL.44.001928","type":"journal-article","volume":"44","author":"Ouyang","year":"2019","journal-title":"Opt. Lett."},{"key":"oe-34-13-23147-R44","doi-asserted-by":"publisher","first-page":"341","DOI":"10.1038\/s41566-021-00776-0","type":"journal-article","volume":"15","author":"Westerveld","year":"2021","journal-title":"Nat. Photonics"},{"key":"oe-34-13-23147-R45","doi-asserted-by":"publisher","first-page":"3250","DOI":"10.1038\/s41467-023-39075-3","type":"journal-article","volume":"14","author":"Pan","year":"2023","journal-title":"Nat. Commun."},{"key":"oe-34-13-23147-R46","doi-asserted-by":"publisher","first-page":"21341","DOI":"10.1364\/OE.20.021341","type":"journal-article","volume":"20","author":"Griffith","year":"2012","journal-title":"Opt. Express"},{"key":"oe-34-13-23147-R47","doi-asserted-by":"publisher","first-page":"25057","DOI":"10.1364\/OE.19.025057","type":"journal-article","volume":"19","author":"Avino","year":"2011","journal-title":"Opt. Express"},{"key":"oe-34-13-23147-R48","doi-asserted-by":"publisher","first-page":"1945","DOI":"10.1364\/OE.16.001945","type":"journal-article","volume":"16","author":"Gatti","year":"2008","journal-title":"Opt. Express"},{"key":"oe-34-13-23147-R49","doi-asserted-by":"publisher","first-page":"1458","DOI":"10.1126\/science.1216210","type":"journal-article","volume":"335","author":"Wang","year":"2012","journal-title":"Science"},{"key":"oe-34-13-23147-R50","doi-asserted-by":"publisher","first-page":"4496","DOI":"10.1038\/srep04496","type":"journal-article","volume":"4","author":"Li","year":"2014","journal-title":"Sci. Rep."}],"container-title":["Optics Express"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=oe-34-13-23147&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,6,15]],"date-time":"2026-06-15T18:25:11Z","timestamp":1781547911000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=oe-34-13-23147"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,6,15]]},"references-count":50,"journal-issue":{"issue":"13","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/oe.599644","relation":{},"ISSN":["1094-4087"],"issn-type":[{"value":"1094-4087","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,6,15]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OE.599644","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"research-article","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"23 March 2026","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"6 June 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"15 June 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement","name":"copyright","label":"Copyright"}]}}