{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,20]],"date-time":"2026-03-20T18:03:18Z","timestamp":1774029798014,"version":"3.50.1"},"reference-count":26,"publisher":"Optica Publishing Group","issue":"18","license":[{"start":{"date-parts":[[2020,9,4]],"date-time":"2020-09-04T00:00:00Z","timestamp":1599177600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v1#VOR-OA"},{"start":{"date-parts":[[2020,9,4]],"date-time":"2020-09-04T00:00:00Z","timestamp":1599177600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/100010665","name":"H2020 Marie Sk\u0142odowska-Curie Actions","doi-asserted-by":"publisher","award":["722380"],"award-info":[{"award-number":["722380"]}],"id":[{"id":"10.13039\/100010665","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004543","name":"China Scholarship Council","doi-asserted-by":"publisher","award":["201803170195"],"award-info":[{"award-number":["201803170195"]}],"id":[{"id":"10.13039\/501100004543","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100004735","name":"Natural Science Foundation of Hunan Province","doi-asserted-by":"publisher","award":["2019JJ40341"],"award-info":[{"award-number":["2019JJ40341"]}],"id":[{"id":"10.13039\/501100004735","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100008398","name":"Villum Fonden","doi-asserted-by":"publisher","award":["00023316"],"award-info":[{"award-number":["00023316"]}],"id":[{"id":"10.13039\/100008398","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100008393","name":"Teknologi og Produktion, Det Frie Forskningsr\u00e5d","doi-asserted-by":"publisher","award":["DFF-7107-00242"],"award-info":[{"award-number":["DFF-7107-00242"]}],"id":[{"id":"10.13039\/100008393","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2020,9,15]]},"abstract":"Titanium dioxide (\n \n\t\n\t \n\t \n\t T<\/mml:mi>\n\t i<\/mml:mi>\n\t O<\/mml:mi>\n\t <\/mml:mrow>\n\t 2<\/mml:mn>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula>) microring resonators (MRRs) with high quality factors (Qs) are demonstrated by using a new, to the best of our knowledge, bottom-up fabrication method. Pattern platforms with a T-shaped cross section are first defined by etching a thin top layer of silicon nitride and a thick bottom layer of silica and partially undercutting the silica. Then, \n \n\t\n\t \n\t \n\t T<\/mml:mi>\n\t i<\/mml:mi>\n\t O<\/mml:mi>\n\t <\/mml:mrow>\n\t 2<\/mml:mn>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> is deposited on the platforms to form the \n \n\t\n\t \n\t \n\t T<\/mml:mi>\n\t i<\/mml:mi>\n\t O<\/mml:mi>\n\t <\/mml:mrow>\n\t 2<\/mml:mn>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> waveguides and devices. \n \n\t\n\t \n\t \n\t T<\/mml:mi>\n\t i<\/mml:mi>\n\t O<\/mml:mi>\n\t <\/mml:mrow>\n\t 2<\/mml:mn>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> MRRs with different bending radii, waveguide widths, and gaps in the bus waveguide are fabricated and measured. The intrinsic \n \n\t\n\t Q<\/mml:mi>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula>(\n \n\t\n\t \n\t \n\t Q<\/mml:mi>\n\t <\/mml:mrow>\n\t \n\t \n\t\ti<\/mml:mi>\n\t\tn<\/mml:mi>\n\t\tt<\/mml:mi>\n\t <\/mml:mrow>\n\t <\/mml:mrow>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula>) is achieved to be \n \n\t\n\t \u223c<\/mml:mo>\n\t<\/mml:mrow>\n\t\n\t 1.1<\/mml:mn>\n\t<\/mml:mrow>\n\t\u00d7<\/mml:mo>\n\t\n\t \n\t \n\t 10<\/mml:mn>\n\t <\/mml:mrow>\n\t 5<\/mml:mn>\n\t <\/mml:msup>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> at the telecommunication wavelengths, corresponding to a bend waveguide loss of 3.9\u00a0dB\/cm while the compact MRR with a radius of 10\u00a0\u00b5m can still sustain a \n \n\t\n\t \n\t \n\t Q<\/mml:mi>\n\t <\/mml:mrow>\n\t \n\t \n\t\ti<\/mml:mi>\n\t\tn<\/mml:mi>\n\t\tt<\/mml:mi>\n\t <\/mml:mrow>\n\t <\/mml:mrow>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> of \n \n\t\n\t \u223c<\/mml:mo>\n\t<\/mml:mrow>\n\t\n\t\n\t \n\t \n\t 10<\/mml:mn>\n\t <\/mml:mrow>\n\t 5<\/mml:mn>\n\t <\/mml:msup>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula>. These results not only unfold the feasibilities of the proposed bottom-up method for fabricating \n \n\t\n\t \n\t \n\t T<\/mml:mi>\n\t i<\/mml:mi>\n\t O<\/mml:mi>\n\t <\/mml:mrow>\n\t 2<\/mml:mn>\n\t <\/mml:msub>\n\t<\/mml:mrow>\n <\/mml:math>\n <\/jats:inline-formula> waveguides and MRRs with high Qs and compact footprints but also suggest a new approach for fabricating waveguides in other materials, of which direct etching is not easily accessible.<\/jats:p>","DOI":"10.1364\/ol.400644","type":"journal-article","created":{"date-parts":[[2020,8,6]],"date-time":"2020-08-06T18:31:53Z","timestamp":1596738713000},"page":"5012","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["TiO2<\/sub> microring resonators with high Q and compact footprint fabricated by a bottom-up method"],"prefix":"10.1364","volume":"45","author":[{"given":"Gaoyuan","family":"Li","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3101-3088","authenticated-orcid":true,"given":"Meicheng","family":"Fu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0163-9255","authenticated-orcid":true,"given":"Yi","family":"Zheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1393-6214","authenticated-orcid":true,"given":"Xiaowei","family":"Guan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"285","published-online":{"date-parts":[[2020,9,4]]},"reference":[{"key":"ol-45-18-5012-R1","doi-asserted-by":"publisher","first-page":"6712","DOI":"10.1364\/OE.20.006712","volume":"20","author":"Bi","year":"2012","journal-title":"Opt. 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