{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,28]],"date-time":"2026-07-28T13:50:16Z","timestamp":1785246616788,"version":"3.55.0"},"reference-count":30,"publisher":"Optica Publishing Group","issue":"20","license":[{"start":{"date-parts":[[2021,10,8]],"date-time":"2021-10-08T00:00:00Z","timestamp":1633651200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v1#VOR"},{"start":{"date-parts":[[2021,10,8]],"date-time":"2021-10-08T00:00:00Z","timestamp":1633651200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"name":"Special-Key Project of the \u201cInnovative Research Plan\u201d, Shanghai Municipality Bureau of Education","award":["2019-01-07-00-02-E00075"],"award-info":[{"award-number":["2019-01-07-00-02-E00075"]}]},{"DOI":"10.13039\/501100003399","name":"Science and Technology Commission of Shanghai Municipality","doi-asserted-by":"publisher","award":["19XD1404100"],"award-info":[{"award-number":["19XD1404100"]}],"id":[{"id":"10.13039\/501100003399","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003399","name":"Science and Technology Commission of Shanghai Municipality","doi-asserted-by":"publisher","award":["21ZR1473400"],"award-info":[{"award-number":["21ZR1473400"]}],"id":[{"id":"10.13039\/501100003399","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012152","name":"National Postdoctoral Program for Innovative Talents","doi-asserted-by":"publisher","award":["BX20200205"],"award-info":[{"award-number":["BX20200205"]}],"id":[{"id":"10.13039\/501100012152","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["2020TQ0331"],"award-info":[{"award-number":["2020TQ0331"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62104053"],"award-info":[{"award-number":["62104053"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2021,10,15]]},"abstract":"<jats:p>Silicon photonics has become the preferred candidate for technologies applicable to multifarious fields. However, the applications are strictly limited by the intrinsic in-band photo effect of silicon. Herein, near-infrared photodetectors that break through the silicon bandgap by Er\/O hyperdoping are fabricated, potentially extending their applications into telecommunications, low-light-level night vision, medical treatment, and others. Er\/O-hyperdoped silicon was achieved as an infrared light absorption layer through ion implantation. The lattice damage caused by ion implantation was repaired by a deep cooling process in which high-temperature samples were cooled by helium flushing cooled by liquid nitrogen. Traditional junction and metallization processes were performed to form a photodiode. We demonstrate that the device has a spectral range up to the wavelength of 1568\u00a0nm, a maximum responsivity of 165\u00a0\u00b5A\/W at 1310\u00a0nm, and 3\u00a0dB cutoff bandwidth up to 3\u00a0kHz. Finally, temperature-dependent optical-electrical characteristics were measured to demonstrate the activation mechanism of Er\/O in silicon. This Letter proves silicon\u2019s potential in realizing extended infrared detection at room temperature, and it provides a possible way to fabricate infrared optoelectronics and signal processing integrated chips on a CMOS (complementary metal-oxide-semiconductor) platform.<\/jats:p>","DOI":"10.1364\/ol.441553","type":"journal-article","created":{"date-parts":[[2021,9,23]],"date-time":"2021-09-23T12:04:24Z","timestamp":1632398664000},"page":"5165","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Extended infrared responses in Er\/O-hyperdoped Si at room temperature"],"prefix":"10.1364","volume":"46","author":[{"given":"Kun","family":"Zhang","sequence":"first","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"ShanghaiTech University"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiajing","family":"He","sequence":"additional","affiliation":[{"name":"Shanghai Jiao Tong University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ting","family":"He","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Qing","family":"Li","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Meng","family":"Peng","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiaxiang","family":"Guo","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Tao","family":"Zhang","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaoming","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Jiao Tong University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Huimin","family":"Wen","sequence":"additional","affiliation":[{"name":"Shanghai Jiao Tong University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"He","family":"Zhu","sequence":"additional","affiliation":[{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ning","family":"Li","sequence":"additional","affiliation":[{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Peng","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2983-7213","authenticated-orcid":true,"given":"Yaping","family":"Dan","sequence":"additional","affiliation":[{"name":"Shanghai Jiao Tong University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5278-8969","authenticated-orcid":true,"given":"Weida","family":"Hu","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Technical Physics"},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2021,10,8]]},"reference":[{"key":"ol-46-20-5165-R1","doi-asserted-by":"publisher","first-page":"679","DOI":"10.1126\/science.aaq1144","volume":"359","author":"Chen","year":"2018","journal-title":"Science"},{"key":"ol-46-20-5165-R2","doi-asserted-by":"publisher","first-page":"19752","DOI":"10.1038\/s41598-019-56374-2","volume":"9","author":"Sun","year":"2019","journal-title":"Sci. Rep."},{"key":"ol-46-20-5165-R3","doi-asserted-by":"publisher","first-page":"1904396","DOI":"10.1002\/smll.201904396","volume":"15","author":"Wang","year":"2019","journal-title":"Small"},{"key":"ol-46-20-5165-R4","doi-asserted-by":"publisher","first-page":"2006329","DOI":"10.1002\/adfm.202006329","volume":"31","author":"Atalla","year":"2021","journal-title":"Adv. Funct. Mater."},{"key":"ol-46-20-5165-R5","doi-asserted-by":"publisher","first-page":"131103","DOI":"10.1063\/5.0022235","volume":"117","author":"Delli","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"ol-46-20-5165-R6","doi-asserted-by":"publisher","first-page":"103390","DOI":"10.1016\/j.infrared.2020.103390","volume":"109","author":"Wang","year":"2020","journal-title":"Infrared Phys. Technol."},{"key":"ol-46-20-5165-R7","doi-asserted-by":"publisher","first-page":"081107","DOI":"10.1063\/5.0018219","volume":"117","author":"Manis-Levy","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"ol-46-20-5165-R8","first-page":"182","volume-title":"Quantum Sensing: Evolution and Revolution from Past to Future","author":"HaegelRazeghi","year":"2003"},{"key":"ol-46-20-5165-R9","doi-asserted-by":"publisher","first-page":"1347","DOI":"10.1007\/s11082-014-0064-3","volume":"47","author":"Wang","year":"2015","journal-title":"Opt. Quantum Electron."},{"key":"ol-46-20-5165-R10","doi-asserted-by":"publisher","first-page":"146","DOI":"10.1038\/nphoton.2012.1","volume":"6","author":"Luque","year":"2012","journal-title":"Nat. Photonics"},{"key":"ol-46-20-5165-R11","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1109\/JQE.2020.2976565","volume":"56","author":"Chen","year":"2020","journal-title":"IEEE J. Quantum Electron."},{"key":"ol-46-20-5165-R12","doi-asserted-by":"publisher","first-page":"261104","DOI":"10.1063\/1.3059559","volume":"93","author":"Rauter","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ol-46-20-5165-R13","first-page":"86","volume-title":"Optical and Infrared Detectors for Astronomy","author":"LoveGarnett","year":"2004"},{"key":"ol-46-20-5165-R14","doi-asserted-by":"publisher","first-page":"3011","DOI":"10.1038\/ncomms4011","volume":"5","author":"Mailoa","year":"2014","journal-title":"Nat. Commun."},{"key":"ol-46-20-5165-R15","doi-asserted-by":"publisher","first-page":"90","DOI":"10.1016\/j.matlet.2015.10.018","volume":"163","author":"Chen","year":"2016","journal-title":"Mater. Lett."},{"key":"ol-46-20-5165-R16","doi-asserted-by":"publisher","first-page":"211105","DOI":"10.1063\/1.4879851","volume":"104","author":"Garc\u00eda-Hemme","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ol-46-20-5165-R17","doi-asserted-by":"publisher","first-page":"063520","DOI":"10.1063\/1.4790808","volume":"113","author":"Sher","year":"2013","journal-title":"J. Appl. Phys."},{"key":"ol-46-20-5165-R18","doi-asserted-by":"publisher","first-page":"024054","DOI":"10.1103\/PhysRevApplied.10.024054","volume":"10","author":"Wang","year":"2018","journal-title":"Phys. Rev. Appl."},{"key":"ol-46-20-5165-R19","doi-asserted-by":"publisher","first-page":"345","DOI":"10.1016\/j.snb.2019.04.073","volume":"291","author":"Liu","year":"2019","journal-title":"Sens. Actuators B Chem."},{"key":"ol-46-20-5165-R20","doi-asserted-by":"publisher","first-page":"075028","DOI":"10.1063\/5.0008281","volume":"10","author":"Gandhi","year":"2020","journal-title":"AIP Adv."},{"key":"ol-46-20-5165-R21","doi-asserted-by":"publisher","first-page":"152","DOI":"10.1007\/s13320-015-0241-4","volume":"5","author":"Hammadi","year":"2015","journal-title":"Photon. Sens."},{"key":"ol-46-20-5165-R22","doi-asserted-by":"publisher","first-page":"16","DOI":"10.1016\/j.matlet.2017.03.011","volume":"196","author":"Zhang","year":"2017","journal-title":"Mater. Lett."},{"key":"ol-46-20-5165-R23","doi-asserted-by":"publisher","first-page":"5381","DOI":"10.1063\/1.1310188","volume":"88","author":"Hamelin","year":"2000","journal-title":"J. Appl. Phys."},{"key":"ol-46-20-5165-R24","doi-asserted-by":"publisher","first-page":"1721","DOI":"10.1063\/1.118680","volume":"70","author":"Kik","year":"1997","journal-title":"Appl. Phys. Lett."},{"key":"ol-46-20-5165-R25","doi-asserted-by":"publisher","first-page":"3874","DOI":"10.1063\/1.359904","volume":"78","author":"Priolo","year":"1995","journal-title":"J. Appl. Phys."},{"key":"ol-46-20-5165-R26","doi-asserted-by":"publisher","first-page":"2000720","DOI":"10.1002\/adom.202000720","volume":"8","author":"Wen","year":"2020","journal-title":"Adv. Opt. Mater."},{"key":"ol-46-20-5165-R27","doi-asserted-by":"publisher","first-page":"1944","DOI":"10.1109\/LPT.2019.2950542","volume":"31","author":"Xu","year":"2019","journal-title":"IEEE Photon. Technol. Lett."},{"key":"ol-46-20-5165-R28","doi-asserted-by":"publisher","first-page":"125","DOI":"10.1038\/s41377-020-00369-6","volume":"9","author":"Knez","year":"2020","journal-title":"Light Sci. Appl."},{"key":"ol-46-20-5165-R29","doi-asserted-by":"publisher","first-page":"045405","DOI":"10.1103\/PhysRevB.102.045405","volume":"102","author":"Nugroho","year":"2020","journal-title":"Phys. Rev. B"},{"key":"ol-46-20-5165-R30","doi-asserted-by":"publisher","first-page":"21368","DOI":"10.1364\/OE.395187","volume":"28","author":"Balena","year":"2020","journal-title":"Opt. Express"}],"container-title":["Optics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-46-20-5165&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T19:29:12Z","timestamp":1722972552000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ol-46-20-5165"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,10,8]]},"references-count":30,"journal-issue":{"issue":"20","published-online":{"date-parts":[[2021]]},"published-print":{"date-parts":[[2021]]}},"URL":"https:\/\/doi.org\/10.1364\/ol.441553","relation":{},"ISSN":["0146-9592","1539-4794"],"issn-type":[{"value":"0146-9592","type":"print"},{"value":"1539-4794","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,10,8]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OL.441553","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"letter","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"30 August 2021","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"22 September 2021","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"8 October 2021","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2021 Optical Society of America","name":"copyright","label":"Copyright"}]}}