{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,12]],"date-time":"2026-10-12T16:13:43Z","timestamp":1791821623559,"version":"4.3.4"},"reference-count":21,"publisher":"Optica Publishing Group","issue":"2","license":[{"start":{"date-parts":[[2023,1,2]],"date-time":"2023-01-02T00:00:00Z","timestamp":1672617600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR-OA"},{"start":{"date-parts":[[2023,1,2]],"date-time":"2023-01-02T00:00:00Z","timestamp":1672617600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/100006133","name":"Advanced Research Projects Agency - Energy","doi-asserted-by":"publisher","award":["DE-AR000843"],"award-info":[{"award-number":["DE-AR000843"]}],"id":[{"id":"10.13039\/100006133","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100000185","name":"Defense Advanced Research Projects Agency","doi-asserted-by":"publisher","award":["HR00111920014"],"award-info":[{"award-number":["HR00111920014"]}],"id":[{"id":"10.13039\/100000185","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2023,1,15]]},"abstract":"<jats:p>Perturbations to the effective refractive index from nanometer-scale fabrication variations in waveguide geometry plague high index-contrast photonic platforms; this includes the ubiquitous sub-micron silicon-on-insulator (SOI) process. Such variations are particularly troublesome for phase-sensitive devices, such as interferometers and resonators, which exhibit drastic changes in performance as a result of these fabrication-induced phase errors. In this Letter, we propose and experimentally demonstrate a design methodology for dramatically reducing device sensitivity to silicon width variations. We apply this methodology to a highly phase-sensitive device, the ring-assisted Mach\u2013Zehnder interferometer (RAMZI), and show comparable performance and footprint to state-of-the-art devices, while substantially reducing stochastic phase errors from etch variations. This decrease in sensitivity is directly realized as energy savings by significantly reducing the required corrective thermal tuning power, providing a promising path toward ultra-energy-efficient large-scale silicon photonic circuits.<\/jats:p>","DOI":"10.1364\/ol.476873","type":"journal-article","created":{"date-parts":[[2022,12,12]],"date-time":"2022-12-12T15:00:09Z","timestamp":1670857209000},"page":"215","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":31,"title":["Fabrication-robust silicon photonic devices in standard sub-micron silicon-on-insulator processes"],"prefix":"10.1364","volume":"48","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4752-797X","authenticated-orcid":true,"given":"Anthony","family":"Rizzo","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Air Force Research Laboratory Information Directorate"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9598-6794","authenticated-orcid":true,"given":"Utsav","family":"Dave","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Asher","family":"Novick","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Alexandre","family":"Freitas","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2193-0082","authenticated-orcid":true,"given":"Samantha P.","family":"Roberts","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6252-7807","authenticated-orcid":true,"given":"Aneek","family":"James","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Michal","family":"Lipson","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Keren","family":"Bergman","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/00hj8s172","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2023,1,2]]},"reference":[{"key":"ol-48-2-215-R1","doi-asserted-by":"publisher","first-page":"4374","DOI":"10.1109\/JLT.2021.3066203","volume":"39","author":"Siew","year":"2021","journal-title":"J. Lightwave Technol."},{"key":"ol-48-2-215-R2","doi-asserted-by":"publisher","first-page":"8201406","DOI":"10.1109\/JSTQE.2019.2935698","volume":"25","author":"Fahrenkopf","year":"2019","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ol-48-2-215-R3","doi-asserted-by":"publisher","first-page":"78","DOI":"10.1364\/OL.413724","volume":"46","author":"Song","year":"2021","journal-title":"Opt. Lett."},{"key":"ol-48-2-215-R4","doi-asserted-by":"publisher","first-page":"6265","DOI":"10.1364\/OE.24.006265","volume":"24","author":"Oton","year":"2016","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R5","doi-asserted-by":"publisher","first-page":"2000353","DOI":"10.1002\/lpor.202000353","volume":"15","author":"Ji","year":"2021","journal-title":"Laser Photonics Rev."},{"key":"ol-48-2-215-R6","doi-asserted-by":"publisher","first-page":"2100292","DOI":"10.1002\/lpor.202100292","volume":"16","author":"Zhang","year":"2022","journal-title":"Laser Photonics Rev."},{"key":"ol-48-2-215-R7","doi-asserted-by":"publisher","first-page":"84","DOI":"10.1038\/s42005-022-00851-0","volume":"5","author":"Ji","year":"2022","journal-title":"Commun. Phys."},{"key":"ol-48-2-215-R8","doi-asserted-by":"publisher","first-page":"17814","DOI":"10.1364\/OE.21.017814","volume":"21","author":"Cherchi","year":"2013","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R9","doi-asserted-by":"publisher","first-page":"8200713","DOI":"10.1109\/JSTQE.2019.2911432","volume":"25","author":"Zilkie","year":"2019","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ol-48-2-215-R10","doi-asserted-by":"publisher","first-page":"101080V","DOI":"10.1117\/12.2252110","volume":"10108","author":"Cherchi","year":"2017","journal-title":"Proc. SPIE"},{"key":"ol-48-2-215-R11","doi-asserted-by":"publisher","first-page":"9150","DOI":"10.1364\/OE.25.009150","volume":"25","author":"Fujisawa","year":"2017","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R12","doi-asserted-by":"publisher","first-page":"3044","DOI":"10.1109\/JLT.2019.2909983","volume":"37","author":"Bahadori","year":"2019","journal-title":"J. Lightwave Technol."},{"key":"ol-48-2-215-R13","doi-asserted-by":"publisher","first-page":"31394","DOI":"10.1364\/OE.27.031394","volume":"27","author":"Vogelbacher","year":"2019","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R14","doi-asserted-by":"publisher","author":"Rizzo","year":"2021","DOI":"10.48550\/arXiv.2109.10297"},{"key":"ol-48-2-215-R15","doi-asserted-by":"publisher","first-page":"A22","DOI":"10.1364\/PRJ.444991","volume":"10","author":"Cheung","year":"2022","journal-title":"Photonics Res."},{"key":"ol-48-2-215-R16","doi-asserted-by":"publisher","first-page":"55","DOI":"10.1109\/LPT.2020.3044262","volume":"33","author":"Rizzo","year":"2021","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ol-48-2-215-R17","doi-asserted-by":"publisher","first-page":"3149","DOI":"10.1364\/OE.15.003149","volume":"15","author":"Xu","year":"2007","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R18","first-page":"1","author":"Rizzo","year":"2021"},{"key":"ol-48-2-215-R19","doi-asserted-by":"publisher","first-page":"1485","DOI":"10.1109\/LPT.2010.2063018","volume":"22","author":"Thomson","year":"2010","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ol-48-2-215-R20","doi-asserted-by":"publisher","first-page":"8406","DOI":"10.1364\/OE.18.008406","volume":"18","author":"Sun","year":"2010","journal-title":"Opt. Express"},{"key":"ol-48-2-215-R21","doi-asserted-by":"publisher","first-page":"1391","DOI":"10.1109\/LPT.2016.2544138","volume":"28","author":"Luo","year":"2016","journal-title":"IEEE Photonics Technol. Lett."}],"container-title":["Optics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-48-2-215&am=y","content-type":"application\/pdf","content-version":"am","intended-application":"syndication"},{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-48-2-215","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-48-2-215&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,6]],"date-time":"2024-08-06T15:32:58Z","timestamp":1722958378000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ol-48-2-215"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,1,2]]},"references-count":21,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2023]]},"published-print":{"date-parts":[[2023]]}},"URL":"https:\/\/doi.org\/10.1364\/ol.476873","relation":{},"ISSN":["0146-9592","1539-4794"],"issn-type":[{"value":"0146-9592","type":"print"},{"value":"1539-4794","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,1,2]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OL.476873","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"letter","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"30 September 2022","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"7 December 2022","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2 January 2023","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement","name":"copyright","label":"Copyright"}]}}