{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,7]],"date-time":"2026-10-07T05:32:15Z","timestamp":1791351135518,"version":"4.3.1"},"reference-count":32,"publisher":"Optica Publishing Group","issue":"8","license":[{"start":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T00:00:00Z","timestamp":1776124800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T00:00:00Z","timestamp":1776124800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/100012774","name":"Innovation Fund Denmark","doi-asserted-by":"crossref","award":["3129-00077B"],"award-info":[{"award-number":["3129-00077B"]}],"id":[{"id":"10.13039\/100012774","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/00daj4111","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2026,4,15]]},"abstract":"<jats:p>\n                    We present a systematic study of how thermal annealing (450\u20131000\u00b0C) affects optical propagation loss in low-pressure chemical vapor deposited (LPCVD) stoichiometric silicon nitride (Si\n                    <jats:sub>3<\/jats:sub>\n                    N\n                    <jats:sub>4<\/jats:sub>\n                    ) thin films and waveguides at visible wavelengths. Slab-mode characterization using prism coupling shows that the loss remains within measurement uncertainty up to annealing temperatures of \u223c900\u00b0C, above which it increases sharply at all measured wavelengths. After accounting for modeled scattering, the residual loss is consistent with an absorption-like increase of 11.1\u2009\u00b1\u20091.48\u2009dB\/cm at 447\u2009nm following 975\u00b0C annealing. This behavior is corroborated by measurements on high-confinement waveguides. For the Si\n                    <jats:sub>3<\/jats:sub>\n                    N\n                    <jats:sub>4<\/jats:sub>\n                    stack investigated here, annealing above 900\u00b0C substantially increases visible-wavelength propagation loss, highlighting a trade-off between infrared-optimized annealing and visible performance.\n                  <\/jats:p>","DOI":"10.1364\/ol.596082","type":"journal-article","created":{"date-parts":[[2026,3,23]],"date-time":"2026-03-23T15:00:14Z","timestamp":1774278014000},"page":"2332","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Visible light propagation loss of LPCVD Si\n                    <sub>3<\/sub>\n                    N\n                    <sub>4<\/sub>\n                    thin films and waveguides: impact of high-temperature annealing"],"prefix":"10.1364","volume":"51","author":[{"ORCID":"https:\/\/orcid.org\/0009-0002-5337-771X","authenticated-orcid":true,"given":"Jacob Christian","family":"Loft","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/01aj84f44","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0006-0557-3846","authenticated-orcid":true,"given":"Asger Brimnes","family":"Gardner","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/01aj84f44","id-type":"ROR","asserted-by":"publisher"}]},{"name":"UVL A\/S"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0007-7307-2864","authenticated-orcid":true,"given":"Kevin Bach","family":"Gravesen","sequence":"additional","affiliation":[{"name":"UVL A\/S"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Peter","family":"T\u00f8nning","sequence":"additional","affiliation":[{"name":"UVL A\/S"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7149-375X","authenticated-orcid":true,"given":"Eric J.","family":"Stanton","sequence":"additional","affiliation":[{"name":"EMode Photonix"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6619-2901","authenticated-orcid":true,"given":"Nicolas","family":"Volet","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/01aj84f44","id-type":"ROR","asserted-by":"publisher"}]},{"name":"UVL A\/S"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2550-6182","authenticated-orcid":true,"given":"Emil Zanchetta","family":"Ulsig","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/01aj84f44","id-type":"ROR","asserted-by":"publisher"}]},{"name":"UVL A\/S"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,4,14]]},"reference":[{"key":"ol-51-8-2332-R1","doi-asserted-by":"publisher","first-page":"538","DOI":"10.1038\/s41586-020-2811-x","type":"journal-article","volume":"586","author":"Niffenegger","year":"2020","journal-title":"Nature"},{"key":"ol-51-8-2332-R2","doi-asserted-by":"publisher","first-page":"185","DOI":"10.1038\/nphoton.2015.5","type":"journal-article","volume":"9","author":"Ushijima","year":"2015","journal-title":"Nat. Photonics"},{"key":"ol-51-8-2332-R3","doi-asserted-by":"publisher","first-page":"5098","DOI":"10.1364\/BOE.464903","type":"journal-article","volume":"13","author":"Tabatabaei Mashayekh","year":"2022","journal-title":"Biomed. Opt. Express"},{"key":"ol-51-8-2332-R4","doi-asserted-by":"publisher","first-page":"10921","DOI":"10.1038\/s41598-024-60708-0","type":"journal-article","volume":"14","author":"Jooken","year":"2024","journal-title":"Sci. Rep."},{"key":"ol-51-8-2332-R5","doi-asserted-by":"publisher","first-page":"652","DOI":"10.1038\/s41586-025-09107-7","type":"journal-article","volume":"644","author":"Shi","year":"2025","journal-title":"Nature"},{"key":"ol-51-8-2332-R6","doi-asserted-by":"publisher","first-page":"2301291","DOI":"10.1002\/lpor.202301291","type":"journal-article","volume":"18","author":"Santos","year":"2024","journal-title":"Laser Photonics Rev."},{"key":"ol-51-8-2332-R7","doi-asserted-by":"publisher","author":"Siddharth","year":"2025","DOI":"10.48550\/arXiv.2508.02568","type":"preprint"},{"key":"ol-51-8-2332-R8","doi-asserted-by":"publisher","first-page":"3238","DOI":"10.1038\/s41598-024-53144-7","type":"journal-article","volume":"14","author":"Stanton","year":"2024","journal-title":"Sci. Rep."},{"key":"ol-51-8-2332-R9","doi-asserted-by":"publisher","first-page":"19330","DOI":"10.1364\/OE.553404","type":"journal-article","volume":"33","author":"Gardner","year":"2025","journal-title":"Opt. Express"},{"key":"ol-51-8-2332-R10","doi-asserted-by":"publisher","first-page":"10294","DOI":"10.1038\/s41467-025-65211-2","type":"journal-article","volume":"16","author":"Franken","year":"2025","journal-title":"Nat. Commun."},{"key":"ol-51-8-2332-R11","doi-asserted-by":"publisher","first-page":"44157","DOI":"10.1364\/OE.573449","type":"journal-article","volume":"33","author":"Kervazo","year":"2025","journal-title":"Opt. Express"},{"key":"ol-51-8-2332-R12","doi-asserted-by":"publisher","first-page":"2200706","DOI":"10.1109\/JPHOT.2025.3568162","type":"journal-article","volume":"17","author":"Neutens","year":"2025","journal-title":"IEEE Photonics J."},{"key":"ol-51-8-2332-R13","doi-asserted-by":"publisher","first-page":"5679","DOI":"10.1364\/OL.44.005679","type":"journal-article","volume":"44","author":"Sun","year":"2019","journal-title":"Opt. Lett."},{"key":"ol-51-8-2332-R14","doi-asserted-by":"publisher","first-page":"11147","DOI":"10.1364\/OE.26.011147","type":"journal-article","volume":"26","author":"Lu","year":"2018","journal-title":"Opt. Express"},{"key":"ol-51-8-2332-R15","doi-asserted-by":"publisher","first-page":"218","DOI":"10.1038\/s41566-023-01364-0","type":"journal-article","volume":"18","author":"Wu","year":"2024","journal-title":"Nat. Photonics"},{"key":"ol-51-8-2332-R16","doi-asserted-by":"publisher","first-page":"380","DOI":"10.1364\/OPTICA.6.000380","type":"journal-article","volume":"6","author":"Desiatov","year":"2019","journal-title":"Optica"},{"key":"ol-51-8-2332-R17","doi-asserted-by":"publisher","first-page":"784","DOI":"10.1038\/s41586-024-07369-1","type":"journal-article","volume":"629","author":"Wang","year":"2024","journal-title":"Nature"},{"key":"ol-51-8-2332-R18","doi-asserted-by":"publisher","first-page":"1125","DOI":"10.1364\/OL.547762","type":"journal-article","volume":"50","author":"Chen","year":"2025","journal-title":"Opt. Lett."},{"key":"ol-51-8-2332-R19","doi-asserted-by":"publisher","first-page":"631","DOI":"10.1002\/lpor.201600006","type":"journal-article","volume":"10","author":"Wang","year":"2016","journal-title":"Laser Photonics Rev."},{"key":"ol-51-8-2332-R20","doi-asserted-by":"publisher","first-page":"755","DOI":"10.1364\/OPTICA.426065","type":"journal-article","volume":"8","author":"Morin","year":"2021","journal-title":"Optica"},{"key":"ol-51-8-2332-R21","doi-asserted-by":"publisher","first-page":"5718","DOI":"10.1364\/oe.505892","type":"journal-article","volume":"32","author":"Corato-Zanarella","year":"2024","journal-title":"Opt. Express"},{"key":"ol-51-8-2332-R22","doi-asserted-by":"publisher","first-page":"6960","DOI":"10.1364\/OE.448938","type":"journal-article","volume":"30","author":"Chauhan","year":"2022","journal-title":"Opt. Express"},{"key":"ol-51-8-2332-R23","doi-asserted-by":"publisher","first-page":"1010","DOI":"10.1038\/s41566-024-01529-5","type":"journal-article","volume":"18","author":"Lu","year":"2024","journal-title":"Nat. Photonics"},{"key":"ol-51-8-2332-R24","doi-asserted-by":"publisher","first-page":"291","DOI":"10.1016\/0040-6090(83)90096-2","type":"journal-article","volume":"101","author":"Stein","year":"1983","journal-title":"Thin Solid Films"},{"key":"ol-51-8-2332-R25","doi-asserted-by":"publisher","first-page":"450","DOI":"10.1149\/1.2119729","type":"journal-article","volume":"130","author":"Makino","year":"1983","journal-title":"J. Electrochem. Soc."},{"key":"ol-51-8-2332-R26","doi-asserted-by":"publisher","first-page":"2901","DOI":"10.1364\/AO.12.002901","type":"journal-article","volume":"12","author":"Ulrich","year":"1973","journal-title":"Appl. Opt."},{"key":"ol-51-8-2332-R27","doi-asserted-by":"publisher","first-page":"222","DOI":"10.1016\/j.mssp.2015.12.020","type":"journal-article","volume":"43","author":"Jiang","year":"2016","journal-title":"Mater. Sci. Semicond. Process"},{"key":"ol-51-8-2332-R28","doi-asserted-by":"publisher","first-page":"1217","DOI":"10.1016\/j.ceramint.2015.09.053","type":"journal-article","volume":"42","author":"Jiang","year":"2016","journal-title":"Ceram. Int."},{"key":"ol-51-8-2332-R30","doi-asserted-by":"publisher","first-page":"4098","DOI":"10.1364\/OL.529487","type":"journal-article","volume":"49","author":"S\u00f8rensen","year":"2024","journal-title":"Opt. Lett."},{"key":"ol-51-8-2332-R31","doi-asserted-by":"publisher","first-page":"843","DOI":"10.1038\/s41586-025-09598-4","type":"journal-article","volume":"646","author":"Ji","year":"2025","journal-title":"Nature"},{"key":"ol-51-8-2332-R32","doi-asserted-by":"publisher","first-page":"3723","DOI":"10.1063\/1.1664026","type":"journal-article","volume":"95","author":"Iacona","year":"2004","journal-title":"J. Appl. Phys."},{"key":"ol-51-8-2332-R33","doi-asserted-by":"publisher","author":"Loft","year":"2025","DOI":"10.5281\/zenodo.18664094","type":"dataset"}],"container-title":["Optics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-51-8-2332&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T14:40:32Z","timestamp":1778683232000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ol-51-8-2332"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,4,14]]},"references-count":32,"journal-issue":{"issue":"8","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/ol.596082","relation":{"has-preprint":[{"id-type":"doi","id":"10.1364\/opticaopen.31362169","asserted-by":"subject"},{"id-type":"doi","id":"10.1364\/opticaopen.31362169","asserted-by":"object"},{"id-type":"doi","id":"10.1364\/opticaopen.31362169.v1","asserted-by":"object"}]},"ISSN":["0146-9592","1539-4794"],"issn-type":[{"value":"0146-9592","type":"print"},{"value":"1539-4794","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,4,14]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OL.596082","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"letter","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"19 February 2026","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"23 March 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"14 April 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}