{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T10:18:25Z","timestamp":1785406705930,"version":"3.56.0"},"reference-count":13,"publisher":"Optica Publishing Group","issue":"14","license":[{"start":{"date-parts":[[2026,7,7]],"date-time":"2026-07-07T00:00:00Z","timestamp":1783382400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,7,7]],"date-time":"2026-07-07T00:00:00Z","timestamp":1783382400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["52375414"],"award-info":[{"award-number":["52375414"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key R&D Program of China","doi-asserted-by":"crossref","award":["2025YFF0513801"],"award-info":[{"award-number":["2025YFF0513801"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"crossref"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2026,7,15]]},"abstract":"<jats:p>Optical defect inspection is fundamentally constrained by diffraction and by the weak response of intensity-based methods to defects that perturb the optical phase rather than the amplitude of the reflected field. We present a structured-illumination phase-derivative (SIPD) method that is sensitive to phase and identifies defects through the symmetry breaking  induced in the reconstructed phase signal. Coherent fringe illumination shifts high-spatial-frequency defect information into the optical passband, and Fourier analysis of a phase-shifting sequence yields a complex field whose phase equals the difference between the two asymmetrically filtered channels. This phase difference varies slowly and smoothly across defect-free regions, whereas a localized defect introduces a sharp anomaly that is selectively enhanced by successive phase derivatives. Using a 0.4\u2009NA objective at 532\u2009nm, we localize defects as small as 100\u2009nm, well below the Rayleigh limit, with a signal-to-noise ratio higher than that of conventional bright-field illumination. The method provides a practical, high-sensitivity route for defect detection and quality control.<\/jats:p>","DOI":"10.1364\/ol.600031","type":"journal-article","created":{"date-parts":[[2026,6,22]],"date-time":"2026-06-22T14:00:10Z","timestamp":1782136810000},"page":"3850","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Structured-illumination phase-derivative method for sub-diffraction-limit defect inspection"],"prefix":"10.1364","volume":"51","author":[{"given":"Jiating","family":"An","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/013q1eq08","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4522-2961","authenticated-orcid":true,"given":"Lingbao","family":"Kong","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/013q1eq08","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Min","family":"Xu","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/013q1eq08","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,7,7]]},"reference":[{"key":"ol-51-14-3850-R1","doi-asserted-by":"publisher","first-page":"183192","DOI":"10.1109\/ACCESS.2020.3029127","type":"journal-article","volume":"8","author":"Ebayyeh","year":"2020","journal-title":"IEEE Access"},{"key":"ol-51-14-3850-R2","doi-asserted-by":"publisher","first-page":"1153","DOI":"10.1126\/science.1137395","type":"journal-article","volume":"316","author":"Hell","year":"2007","journal-title":"Science"},{"key":"ol-51-14-3850-R3","doi-asserted-by":"publisher","first-page":"863","DOI":"10.1007\/s00170-008-1901-y","type":"journal-article","volume":"46","author":"Usuki","year":"2010","journal-title":"Int. J. Adv. Manuf. Technol."},{"key":"ol-51-14-3850-R4","first-page":"376","volume":"12565","author":"Li","year":"2023"},{"key":"ol-51-14-3850-R5","doi-asserted-by":"publisher","first-page":"1016","DOI":"10.1109\/TASE.2024.3358693","type":"journal-article","volume":"22","author":"Sun","year":"2025","journal-title":"IEEE Trans. Autom. Sci. Eng."},{"key":"ol-51-14-3850-R6","doi-asserted-by":"publisher","first-page":"35","DOI":"10.5121\/Jmicro.2016.1404","type":"journal-article","volume":"1","author":"Sandeep","year":"2016","journal-title":"Int. J. Microwave Eng."},{"key":"ol-51-14-3850-R7","doi-asserted-by":"publisher","first-page":"032001","DOI":"10.1088\/2631-7990\/ac64d7","type":"journal-article","volume":"4","author":"Zhu","year":"2022","journal-title":"Int. J. Extreme Manuf."},{"key":"ol-51-14-3850-R8","doi-asserted-by":"publisher","first-page":"3716","DOI":"10.1021\/nl401622b","type":"journal-article","volume":"13","author":"Zhou","year":"2013","journal-title":"Nano Lett."},{"key":"ol-51-14-3850-R9","first-page":"183","volume":"5041","author":"Schulze","year":"2003"},{"key":"ol-51-14-3850-R10","doi-asserted-by":"publisher","first-page":"126111","DOI":"10.1063\/5.0232405","type":"journal-article","volume":"9","author":"Bouchal","year":"2024","journal-title":"APL Photonics"},{"key":"ol-51-14-3850-R11","doi-asserted-by":"publisher","first-page":"1813","DOI":"10.1007\/s12541-024-01009-4","type":"journal-article","volume":"25","author":"Usuki","year":"2024","journal-title":"Int. J. Precis. Eng. Manuf."},{"key":"ol-51-14-3850-R12","doi-asserted-by":"publisher","first-page":"118459","DOI":"10.1016\/j.measurement.2025.118459","type":"journal-article","volume":"256","author":"Pham","year":"2025","journal-title":"Measurement"},{"key":"ol-51-14-3850-R13","doi-asserted-by":"publisher","first-page":"5347","DOI":"10.1021\/acs.nanolett.9b01806","type":"journal-article","volume":"19","author":"Zhu","year":"2019","journal-title":"Nano Lett."}],"container-title":["Optics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-51-14-3850&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,7]],"date-time":"2026-07-07T17:00:40Z","timestamp":1783443640000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ol-51-14-3850"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,7,7]]},"references-count":13,"journal-issue":{"issue":"14","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/ol.600031","relation":{},"ISSN":["0146-9592","1539-4794"],"issn-type":[{"value":"0146-9592","type":"print"},{"value":"1539-4794","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,7,7]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OL.600031","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"letter","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"26 March 2026","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"19 June 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"7 July 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}