{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T13:04:18Z","timestamp":1785416658206,"version":"3.56.0"},"reference-count":15,"publisher":"Optica Publishing Group","issue":"15","license":[{"start":{"date-parts":[[2026,7,22]],"date-time":"2026-07-22T00:00:00Z","timestamp":1784678400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,7,22]],"date-time":"2026-07-22T00:00:00Z","timestamp":1784678400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["62575206"],"award-info":[{"award-number":["62575206"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100010041","name":"Tianjin Municipal Science and Technology Commission","doi-asserted-by":"crossref","award":["24JCYBJC00140"],"award-info":[{"award-number":["24JCYBJC00140"]}],"id":[{"id":"10.13039\/501100010041","id-type":"DOI","asserted-by":"crossref"},{"id":"https:\/\/ror.org\/03wb1xh22","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2026,8,1]]},"abstract":"<jats:p>This Letter presents a laser-welded all-silicon dual-cavity MEMS Fabry\u2013Perot sensor operating from 0.5\u2009kPa to 3.5\u2009MPa over a temperature range of \u221240 to 125\u2009\u00b0C. Adhesive-free laser-welded integration and encapsulation of the sensor chip and optical fiber ferrule are achieved using a carbon dioxide laser, enhancing structural reliability. Compared with previous all-silicon dual-cavity FP sensors, the key advance of this work lies in the laser-welded fiber integration, which suppresses thermally induced cavity drift and enables stable pressure-temperature decoupling over the full operating temperature range. Temperature sensing is realized through the combined thermo-optic and thermal expansion effects within the silicon substrate cavity, while pressure is determined based on the pressure-sensitive response of the vacuum cavity. To mitigate cross-sensitivity, a piecewise linearization method is employed for pressure\u2013temperature decoupling and in situ temperature compensation. At 125\u202f\u00b0C, temperature compensation improves pressure accuracy from 0.404%\u202fFS to 0.195%\u202fFS during pressurization and from 0.398%\u202fFS to 0.062%\u202fFS during depressurization. These results demonstrate the potential of the proposed sensor for reliable pressure sensing over a wide temperature range.<\/jats:p>","DOI":"10.1364\/ol.601490","type":"journal-article","created":{"date-parts":[[2026,7,9]],"date-time":"2026-07-09T14:00:07Z","timestamp":1783605607000},"page":"4196","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Laser-welded high-stability all-silicon dual-cavity MEMS Fabry\u2013Perot pressure sensor with self-temperature compensation"],"prefix":"10.1364","volume":"51","author":[{"given":"Penghui","family":"Dai","sequence":"first","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Haojun","family":"Lin","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Quan","family":"Guo","sequence":"additional","affiliation":[{"name":"National Institute of Natural Hazards"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hongyu","family":"Liu","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xuesong","family":"Xiang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xueyi","family":"Wu","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0393-8451","authenticated-orcid":true,"given":"Junfeng","family":"Jiang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Tiegen","family":"Liu","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9593-8357","authenticated-orcid":true,"given":"Shuang","family":"Wang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/04r1ssz88","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Hainan University"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,7,22]]},"reference":[{"key":"ol-51-15-4196-R1","doi-asserted-by":"publisher","first-page":"26910","DOI":"10.1109\/JSEN.2023.3326449","type":"journal-article","volume":"23","author":"Chen","year":"2023","journal-title":"IEEE Sens. J."},{"key":"ol-51-15-4196-R2","doi-asserted-by":"publisher","first-page":"2005809","DOI":"10.1109\/TIM.2023.3292963","type":"journal-article","volume":"72","author":"Zhang","year":"2023","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ol-51-15-4196-R3","doi-asserted-by":"publisher","first-page":"119080","DOI":"10.1016\/j.measurement.2025.119080","type":"journal-article","volume":"258","author":"Zhang","year":"2026","journal-title":"Measurement"},{"key":"ol-51-15-4196-R4","doi-asserted-by":"publisher","first-page":"151660","DOI":"10.1016\/j.cej.2024.151660","type":"journal-article","volume":"490","author":"Huang","year":"2024","journal-title":"Chem. Eng. J."},{"key":"ol-51-15-4196-R5","doi-asserted-by":"publisher","first-page":"111000","DOI":"10.1016\/j.nanoen.2025.111000","type":"journal-article","volume":"140","author":"Choi","year":"2025","journal-title":"Nano Energy"},{"key":"ol-51-15-4196-R6","doi-asserted-by":"publisher","first-page":"7216","DOI":"10.1021\/acsnano.5c20600","type":"journal-article","volume":"20","author":"Hu","year":"2026","journal-title":"ACS Nano"},{"key":"ol-51-15-4196-R7","doi-asserted-by":"publisher","first-page":"4138","DOI":"10.1109\/JLT.2021.3055252","type":"journal-article","volume":"39","author":"Zolfaghari","year":"2021","journal-title":"J. Lightwave Technol."},{"key":"ol-51-15-4196-R8","doi-asserted-by":"publisher","first-page":"31840","DOI":"10.1364\/OE.468184","type":"journal-article","volume":"30","author":"Dai","year":"2022","journal-title":"Opt. Express"},{"key":"ol-51-15-4196-R9","doi-asserted-by":"publisher","first-page":"5974","DOI":"10.1109\/JLT.2025.3557011","type":"journal-article","volume":"43","author":"Zhang","year":"2025","journal-title":"J. Lightwave Technol."},{"key":"ol-51-15-4196-R10","doi-asserted-by":"publisher","first-page":"10598","DOI":"10.1109\/JSEN.2020.2990940","type":"journal-article","volume":"20","author":"Lorenzo","year":"2020","journal-title":"IEEE Sens. J."},{"key":"ol-51-15-4196-R11","doi-asserted-by":"publisher","first-page":"17199","DOI":"10.1109\/JSEN.2025.3557953","type":"journal-article","volume":"25","author":"Fu","year":"2025","journal-title":"IEEE Sens. J."},{"key":"ol-51-15-4196-R12","doi-asserted-by":"publisher","first-page":"4204","DOI":"10.1364\/OE.27.004204","type":"journal-article","volume":"27","author":"Wang","year":"2019","journal-title":"Opt. Express"},{"key":"ol-51-15-4196-R13","doi-asserted-by":"publisher","first-page":"521","DOI":"10.1364\/PRJ.413278","type":"journal-article","volume":"9","author":"Wang","year":"2021","journal-title":"Photonics Res."},{"key":"ol-51-15-4196-R14","doi-asserted-by":"publisher","first-page":"7115","DOI":"10.1063\/1.1328062","type":"journal-article","volume":"88","author":"Della Corte","year":"2000","journal-title":"J. Appl. Phys."},{"key":"ol-51-15-4196-R15","doi-asserted-by":"publisher","first-page":"31937","DOI":"10.1364\/OE.25.031937","type":"journal-article","volume":"25","author":"Wang","year":"2017","journal-title":"Opt. Express"}],"container-title":["Optics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/opg.optica.org\/viewmedia.cfm?URI=ol-51-15-4196&seq=0","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,22]],"date-time":"2026-07-22T17:25:48Z","timestamp":1784741148000},"score":1,"resource":{"primary":{"URL":"https:\/\/opg.optica.org\/abstract.cfm?URI=ol-51-15-4196"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,7,22]]},"references-count":15,"journal-issue":{"issue":"15","published-online":{"date-parts":[[2026]]},"published-print":{"date-parts":[[2026]]}},"URL":"https:\/\/doi.org\/10.1364\/ol.601490","relation":{},"ISSN":["0146-9592","1539-4794"],"issn-type":[{"value":"0146-9592","type":"print"},{"value":"1539-4794","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,7,22]]},"assertion":[{"value":"Optica Publishing Group","name":"publisher","label":"This article is maintained by"},{"value":"https:\/\/doi.org\/10.1364\/OL.601490","name":"articlelink","label":"Crossref DOI link to publisher maintained version"},{"value":"letter","name":"content_type","label":"Article type"},{"value":"Screened by Similarity Check","name":"cross_check","label":"Similarity check"},{"value":"Yes","order":0,"name":"peer_reviewed","label":"Peer reviewed","group":{"name":"peer_review","label":"Peer review"}},{"value":"Single blind","order":1,"name":"review_process","label":"Review process","group":{"name":"peer_review","label":"Peer review"}},{"value":"16 April 2026","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"7 July 2026","order":1,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"22 July 2026","order":2,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}},{"value":"\u00a9 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}