{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,18]],"date-time":"2026-09-18T20:05:39Z","timestamp":1789761939975,"version":"4.0.1"},"reference-count":18,"publisher":"Optica Publishing Group","issue":"19","license":[{"start":{"date-parts":[[2026,9,18]],"date-time":"2026-09-18T00:00:00Z","timestamp":1789689600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,9,18]],"date-time":"2026-09-18T00:00:00Z","timestamp":1789689600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"name":"National Research Foundation of Korea","award":["NRF-2019R1A3B2068083"],"award-info":[{"award-number":["NRF-2019R1A3B2068083"]}],"id":[{"id":"https:\/\/ror.org\/013aysd81","id-type":"ROR","asserted-by":"publisher"}]},{"name":"State of Texas Emerging Technology Fund","id":[{"id":"https:\/\/ror.org\/02yyzvz79","id-type":"ROR","asserted-by":"crossref"}]},{"name":"Texas Instruments Distinguished University Chair in Nanoelectronics"}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2026,10,1]]},"abstract":"<jats:p>\n                    We propose a concept for compact laser-interference lithography with integral suppression of the parasitic zero-order beam. The device combines a first-order diffraction grating with a subwavelength guided-mode resonance reflector implemented in a fully dielectric TiO\n                    <jats:sub>2<\/jats:sub>\n                    \/SiO\n                    <jats:sub>2<\/jats:sub>\n                    platform. The upper grating efficiently generates the \u00b11 diffraction orders, while the lower resonant layer selectively reflects the transmitted zero-order component through resonance excitation. Rigorous coupled-wave analysis shows that the combined structure transfers approximately 90% of the incident ultraviolet laser power into the two first diffraction orders while suppressing the zero-order transmission below 0.1% near the i-line wavelength of 365\u2009nm. The resulting interference pattern exhibits extremely high contrast with calculated fringe visibility exceeding 0.999 and a period of 215\u2009nm in the example design presented. The proposed architecture eliminates the need for external beam-management optics and provides a compact, alignment-stable, and scalable approach for high-quality interference lithography applicable to Bragg gratings, metasurfaces, resonance lattices, and other periodic nanophotonic structures.\n                  <\/jats:p>","DOI":"10.1364\/ol.606575","type":"journal-article","created":{"date-parts":[[2026,8,28]],"date-time":"2026-08-28T16:00:12Z","timestamp":1787932812000},"page":"5325","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Guided-mode-resonance phase mask for compact laser-interference lithography"],"prefix":"10.1364","volume":"51","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3362-6873","authenticated-orcid":true,"given":"Jae Woong","family":"Yoon","sequence":"first","affiliation":[{"name":"Hanyang University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8584-0791","authenticated-orcid":true,"given":"Robert","family":"Magnusson","sequence":"additional","affiliation":[{"name":"University of Texas at Arlington"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,9,18]]},"reference":[{"key":"ol-51-19-5325-R1","author":"Kashyap","year":"2009"},{"key":"ol-51-19-5325-R2","doi-asserted-by":"publisher","first-page":"1035","DOI":"10.1063\/1.108786","type":"journal-article","volume":"62","author":"Hill","year":"1993","journal-title":"Appl. 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All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}