{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,23]],"date-time":"2026-09-23T15:07:32Z","timestamp":1790176052937,"version":"4.1.0"},"reference-count":34,"publisher":"Optica Publishing Group","issue":"19","license":[{"start":{"date-parts":[[2026,9,23]],"date-time":"2026-09-23T00:00:00Z","timestamp":1790121600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/doi.org\/10.1364\/OA_License_v2#VOR"},{"start":{"date-parts":[[2026,9,23]],"date-time":"2026-09-23T00:00:00Z","timestamp":1790121600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/opg.optica.org\/policies\/opg-tdm-policy.json"}],"funder":[{"name":"National Key R&D Program of China","award":["2025YFA1411803"],"award-info":[{"award-number":["2025YFA1411803"]}]},{"name":"National Key R&D Program of China","award":["2022YFA1205100"],"award-info":[{"award-number":["2022YFA1205100"]}]},{"name":"National Natural Science Foundation of China","award":["62335019"],"award-info":[{"award-number":["62335019"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Natural Science Foundation of China","award":["62475269"],"award-info":[{"award-number":["62475269"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Natural Science Foundation of China","award":["12192251"],"award-info":[{"award-number":["12192251"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Natural Science Foundation of China","award":["12334014"],"award-info":[{"award-number":["12334014"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Natural Science Foundation of China","award":["12474378"],"award-info":[{"award-number":["12474378"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"National Natural Science Foundation of China","award":["92480001"],"award-info":[{"award-number":["92480001"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]},{"name":"Quantum Science and Technology-National Science and Technology Major Project","award":["2021ZD0301403"],"award-info":[{"award-number":["2021ZD0301403"]}]},{"name":"Shanghai Municipal Science and Technology Major Project","award":["2019SHZDZX01"],"award-info":[{"award-number":["2019SHZDZX01"]}]},{"name":"Fundamental Research Funds for the Central Universities"},{"name":"National Postdoctoral Program for Innovative Talents","award":["GZC20240481"],"award-info":[{"award-number":["GZC20240481"]}]}],"content-domain":{"domain":["opg.optica.org"],"crossmark-restriction":false},"short-container-title":["Opt. Lett."],"published-print":{"date-parts":[[2026,10,1]]},"abstract":"<jats:p>\n                    Tantalum pentoxide (Ta\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>5<\/jats:sub>\n                    ), as a silicon-photonic-compatible material platform, has garnered significant attention for high-performance wafer-scale integrated photonics due to its exceptional properties: a broad transparency window spanning from 0.28\u2009\u00b5m to 8\u2009\u00b5m, a moderate refractive index of 2.05 at 1550\u2009nm, an impressive nonlinear refractive index of 1.0 \u00d7 10\n                    <jats:sup>\u221214<\/jats:sup>\n                    cm\n                    <jats:sup>2<\/jats:sup>\n                    \/W, and thick-film deposition with low residual stress at room-temperature. Despite these advantages, achieving low-loss fabrication of monolithic microrings on the Ta\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>5<\/jats:sub>\n                    platform remains challenging due to its inherent hardness and brittleness, which often result in rough sidewalls and significant scattering losses. In this work, we successfully demonstrated monolithic Ta\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>5<\/jats:sub>\n                    microring resonators with exceptionally high intrinsic and loaded quality (Q) factors, without covering with SiO\n                    <jats:sub>2<\/jats:sub>\n                    cladding to preserve its intrinsic material properties. This was accomplished through the innovative application of photolithography-assisted chemo-mechanical etching (PLACE) technique for producing the device with an ultra-smooth surface. By optimizing the coupling region between the microring and the bus waveguide, near-critical coupling was achieved. The device exhibited loaded Q factors of 3.89 \u00d7 10\n                    <jats:sup>6<\/jats:sup>\n                    in the telecom band without employing expensive electron-beam lithography, showing an intrinsic Q factor as high as 5.49 \u00d7 10\n                    <jats:sup>6<\/jats:sup>\n                    and a low propagation loss of only 0.0696\u2009dB\/cm\u2014representing the highest results reported for strongly confined Ta\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>5<\/jats:sub>\n                    -based microrings to date. Moreover, the suppressed temperature-induced resonant wavelength shift rate of only 9\u2009pm\/\u00b0C was also demonstrated, showing impressive thermal stability. This work paves the way for the development of advanced photonic devices on the Ta\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>5<\/jats:sub>\n                    platform with low manufacturing cost, including low-threshold microlasers, highly sensitive sensors, broad-bandwidth supercontinuum sources, and optical frequency combs.\n                  <\/jats:p>","DOI":"10.1364\/ol.608702","type":"journal-article","created":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T12:00:11Z","timestamp":1788868811000},"page":"5437","update-policy":"https:\/\/doi.org\/10.1364\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Monolithic tantalum pentoxide athermal microrings with intrinsic Q factors exceeding 5  \u00d7 10\n                    <sup>6<\/sup>\n                    without SiO\n                    <sub>2<\/sub>\n                    cladding"],"prefix":"10.1364","volume":"51","author":[{"given":"Xinzhi","family":"Zheng","sequence":"first","affiliation":[{"name":"East China Normal University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yixuan","family":"Yang","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/03g897070","id-type":"ROR","asserted-by":"publisher"}]},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1581-0033","authenticated-orcid":true,"given":"Renhong","family":"Gao","sequence":"additional","affiliation":[{"name":"East China Normal University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lingling","family":"Qiao","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/03g897070","id-type":"ROR","asserted-by":"publisher"}]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3783-7010","authenticated-orcid":true,"given":"Jintian","family":"Lin","sequence":"additional","affiliation":[{"id":[{"id":"https:\/\/ror.org\/03g897070","id-type":"ROR","asserted-by":"publisher"}]},{"name":"University of Chinese Academy of Sciences"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8269-5907","authenticated-orcid":true,"given":"Ya","family":"Cheng","sequence":"additional","affiliation":[{"name":"East China Normal University"},{"name":"Shanghai Research Center for Quantum Sciences"},{"name":"Hefei National Laboratory"},{"name":"Shanxi University"},{"name":"Shandong Normal University"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"285","published-online":{"date-parts":[[2026,9,23]]},"reference":[{"key":"ol-51-19-5437-R1","doi-asserted-by":"publisher","first-page":"532","DOI":"10.1364\/OPTICA.4.000532","type":"journal-article","volume":"4","author":"Belt","year":"2017","journal-title":"Optica"},{"key":"ol-51-19-5437-R2","doi-asserted-by":"publisher","first-page":"5110","DOI":"10.1364\/opex.12.005110","type":"journal-article","volume":"12","author":"Tai","year":"2004","journal-title":"Opt. 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All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.","name":"copyright","label":"Copyright"}]}}