{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,5,14]],"date-time":"2025-05-14T04:47:32Z","timestamp":1747198052463,"version":"3.40.5"},"reference-count":24,"publisher":"Walter de Gruyter GmbH","issue":"3","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,3,28]]},"abstract":"<jats:title>Zusammenfassung<\/jats:title>\n               <jats:p>Das VGF-Verfahren ist ein moderner Prozess zur Z\u00fcchtung von Einkristallen, der Grundlage f\u00fcr nahezu alle elektronischen Anwendungen. Die sukzessive Erstarrung der Schmelze zum Einkristall wird dabei durch geeignete Ansteuerung der als Aktoren in der Anlage zur Verf\u00fcgung stehenden Heizer realisiert. Dieses Regelungsproblem ist Gegenstand des Beitrags, wobei der Schwerpunkt auf einer anschaulichen und einf\u00fchrenden Darstellung der Thematik und weniger den mathematischen Details liegt. Basierend auf einem Modell des Kristallz\u00fcchtungsprozesses, das partielle Differentialgleichungen f\u00fcr die W\u00e4rmediffusion in Schmelze und Kristall beinhaltet und aufgrund der \u00dcbergangsbedingung an der Phasengrenze als zweiphasiges Stefan-Problem bezeichnet wird, werden zwei Entw\u00fcrfe von Folgereglern vorgestellt. Ein flachheitsbasierter Ansatz nutzt eine endlichdimensionale Approximation des Modells, w\u00e4hrend eine mittels Backstepping entworfene Zustandsr\u00fcckf\u00fchrung unendlichdimensional ist. Beide Regler werden in umfangreichen Simulationsstudien validiert und miteinander verglichen.<\/jats:p>","DOI":"10.1515\/auto-2023-0005","type":"journal-article","created":{"date-parts":[[2023,3,10]],"date-time":"2023-03-10T00:52:41Z","timestamp":1678409561000},"page":"232-243","source":"Crossref","is-referenced-by-count":0,"title":["Beitr\u00e4ge zur Regelung des VGF-Kristallz\u00fcchtungsprozesses"],"prefix":"10.1515","volume":"71","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4911-1233","authenticated-orcid":false,"given":"Stefan","family":"Ecklebe","sequence":"first","affiliation":[{"name":"Fakult\u00e4t Elektrotechnik und Informationstechnik , Institut f\u00fcr Regelungs-und Steuerungstheorie, TU Dresden , Dresden , Deutschland"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Nicole","family":"Gehring","sequence":"additional","affiliation":[{"name":"Institut f\u00fcr Regelungstechnik und Prozessautomatisierung, Johannes Kepler Universit\u00e4t Linz , Linz , \u00d6sterreich"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Frank","family":"Woittennek","sequence":"additional","affiliation":[{"name":"Institut f\u00fcr Automatisierungs-und Regelungstechnik, UMIT Tirol \u2013 Private Universit\u00e4t f\u00fcr Gesundheitswissenschaften und -technologie , Tirol , \u00d6sterreich"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jan","family":"Winkler","sequence":"additional","affiliation":[{"name":"Fakult\u00e4t Elektrotechnik und Informationstechnik , Institut f\u00fcr Regelungs-und Steuerungstheorie, TU Dresden , Dresden , Deutschland"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"374","published-online":{"date-parts":[[2023,3,10]]},"reference":[{"key":"2023033111483233755_j_auto-2023-0005_ref_001","doi-asserted-by":"crossref","unstructured":"M. Jurisch, S. Eichler, und M. Bruder, \u201cVertical Bridgman growth of binary compound semiconductors,\u201d in Handbook of Crystal Growth, Hrsg. von P. Rudolph, Boston, Elsevier, 2015, pp.\u00a0331\u2013372.","DOI":"10.1016\/B978-0-444-63303-3.00009-2"},{"key":"2023033111483233755_j_auto-2023-0005_ref_002","doi-asserted-by":"crossref","unstructured":"K. Hermann, A. Rehkopf, und H. Sauermann, \u201cBetrachtungen zur Identifikation einer Gradient-Freeze- Anlage zur Einkristallz\u00fcchtung,\u201d at, Automatisierungstechnik, vol.\u00a054, pp 566\u2013573, 2006. https:\/\/doi.org\/10.1524\/auto.2006.54.11.566.","DOI":"10.1524\/auto.2006.54.11.566"},{"key":"2023033111483233755_j_auto-2023-0005_ref_003","unstructured":"J. Crank, Free and Moving Boundary Problems, Oxford, Clarendon Press, 1984."},{"key":"2023033111483233755_j_auto-2023-0005_ref_004","doi-asserted-by":"crossref","unstructured":"S. Ecklebe, F. Woittennek, C. Frank-Rotsch, N. Dropka, und J. 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Winkler, \u201cModel predictive control of the vertical gradient freeze crystal growth process,\u201d in IFAC-PapersOnLine, vol.\u00a054, NMPC, 2021, pp.\u00a0218\u2013225.","DOI":"10.1016\/j.ifacol.2021.08.548"},{"key":"2023033111483233755_j_auto-2023-0005_ref_007","doi-asserted-by":"crossref","unstructured":"M. Hinze, O. P\u00e4tzold, und S. Ziegenbalg, \u201cSolidification of a GaAs melt\u2014optimal control of the phase interface,\u201d J. Cryst. Growth, vol.\u00a0311, pp.\u00a02501\u20132507, 2009. https:\/\/doi.org\/10.1016\/j.jcrysgro.2009.02.031.","DOI":"10.1016\/j.jcrysgro.2009.02.031"},{"key":"2023033111483233755_j_auto-2023-0005_ref_008","doi-asserted-by":"crossref","unstructured":"B. Petrus, J. Bentsman, und B. G. Thomas, \u201cApplication of enthalpy-based feedback control methodology to the two-sided Stefan problem,\u201d in 2014 American Control Conference, 2014, pp.\u00a01015\u20131020.","DOI":"10.1109\/ACC.2014.6859062"},{"key":"2023033111483233755_j_auto-2023-0005_ref_009","unstructured":"S. Ecklebe und N. Gehring, \u201cBackstepping-based tracking control of the vertical gradient freeze crystal growth process,\u201d Vorabversion verf\u00fcgbarunter, Eingereicht. https:\/\/doi.org\/10.48550\/arXiv.2301.05631."},{"key":"2023033111483233755_j_auto-2023-0005_ref_010","doi-asserted-by":"crossref","unstructured":"S. Ecklebe, F. Woittennek, und J. Winkler, \u201cControl of the vertical gradient freeze crystal growth process via backstepping,\u201d in IFAC-PapersOnLine, vol.\u00a053, 21th IFAC World Congress, 2020, pp.\u00a07758\u20137764.","DOI":"10.1016\/j.ifacol.2020.12.1537"},{"key":"2023033111483233755_j_auto-2023-0005_ref_011","doi-asserted-by":"crossref","unstructured":"S. Koga, M. Diagne, und M. Krstic, \u201cControl and state estimation of the one-phase Stefan problem via backstepping design,\u201d IEEE Trans. Autom. Control, vol.\u00a064, no.\u00a02, pp.\u00a0510\u2013525, 2019. https:\/\/doi.org\/10.1109\/tac.2018.2836018.","DOI":"10.1109\/TAC.2018.2836018"},{"key":"2023033111483233755_j_auto-2023-0005_ref_012","doi-asserted-by":"crossref","unstructured":"S. Koga und M. Krstic, \u201cControl of the Stefan system and applications: a tutorial,\u201d Annu. Rev. Control Robot. Auton. Syst., vol.\u00a05, pp.\u00a0547\u2013577, 2022. https:\/\/doi.org\/10.1146\/annurev-control-042920-014825.","DOI":"10.1146\/annurev-control-042920-014825"},{"key":"2023033111483233755_j_auto-2023-0005_ref_013","doi-asserted-by":"crossref","unstructured":"J. Stefan, \u201c\u00dcber die Theorie der Eisbildung, insbesondere \u00fcber die Eisbildung im Polarmeere,\u201d Ann. Phys. Chem., vol.\u00a0278, pp.\u00a0269\u2013286, 1891. https:\/\/doi.org\/10.1002\/andp.18912780206.","DOI":"10.1002\/andp.18912780206"},{"key":"2023033111483233755_j_auto-2023-0005_ref_014","doi-asserted-by":"crossref","unstructured":"J. Vanhellemont, \u201cThe v\/G criterion for defect-free silicon single crystal growth from a melt revisited: implications for large diameter crystals,\u201d J. Cryst. Growth, vol.\u00a0381, pp.\u00a0134\u2013138, 2013. https:\/\/doi.org\/10.1016\/j.jcrysgro.2013.06.039.","DOI":"10.1016\/j.jcrysgro.2013.06.039"},{"key":"2023033111483233755_j_auto-2023-0005_ref_015","doi-asserted-by":"crossref","unstructured":"J. Rudolph, J. Winkler, und F. Woittennek, \u201cFlatness based approach to a heat conduction problem in a crystal growth process,\u201d in Control and Observer Design for Nonlinear Finite and Infinite Dimensional Systems, Hrsg. von T. Meurer, K. Graichen, und E. D. 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Rudolph, \u201cRekursiver Entwurf stabiler Regelkreise durch sukzessive Ber\u00fccksichtigung von Integratoren und quasi-statische R\u00fcckf\u00fchrungen,\u201d at - Automatisierungstechnik, vol.\u00a053, pp.\u00a0389\u2013399, 2005. https:\/\/doi.org\/10.1524\/auto.2005.53.8.389.","DOI":"10.1524\/auto.2005.53.8.389"},{"key":"2023033111483233755_j_auto-2023-0005_ref_022","unstructured":"S. Kerschbaum, Backstepping Control of Coupled Parabolic Systems with Varying Parameters, Doktorarbeit. FAU, Erlangen-N\u00fcrnberg, 2021."},{"key":"2023033111483233755_j_auto-2023-0005_ref_023","doi-asserted-by":"crossref","unstructured":"S. Kerschbaum und J. Deutscher, \u201cBackstepping control of coupled linear parabolic PDEs with space and time dependent coefficients,\u201d IEEE Trans. Autom. Control, vol.\u00a065, no.\u00a07, pp.\u00a03060\u20133067, 2020. https:\/\/doi.org\/10.1109\/tac.2019.2944918.","DOI":"10.1109\/TAC.2019.2944918"},{"key":"2023033111483233755_j_auto-2023-0005_ref_024","unstructured":"S. Kerschbaum, Backstepping Control of Coupled Parabolic Systems with Varying Parameters: A Matlab Library, Version 1.0, 2020. Available at: https:\/\/gitlab.com\/Ktree\/parabolicbackstepping."}],"container-title":["at - Automatisierungstechnik"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.degruyter.com\/document\/doi\/10.1515\/auto-2023-0005\/xml","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.degruyter.com\/document\/doi\/10.1515\/auto-2023-0005\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,3,31]],"date-time":"2023-03-31T15:44:16Z","timestamp":1680277456000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.degruyter.com\/document\/doi\/10.1515\/auto-2023-0005\/html"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,3,1]]},"references-count":24,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2023,3,10]]},"published-print":{"date-parts":[[2023,3,28]]}},"alternative-id":["10.1515\/auto-2023-0005"],"URL":"https:\/\/doi.org\/10.1515\/auto-2023-0005","relation":{},"ISSN":["0178-2312","2196-677X"],"issn-type":[{"type":"print","value":"0178-2312"},{"type":"electronic","value":"2196-677X"}],"subject":[],"published":{"date-parts":[[2023,3,1]]}}}