{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,4]],"date-time":"2022-04-04T05:24:29Z","timestamp":1649049869588},"reference-count":11,"publisher":"Institute of Electronics, Information and Communications Engineers (IEICE)","issue":"9","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEICE Electron. Express"],"published-print":{"date-parts":[[2014]]},"DOI":"10.1587\/elex.11.20140113","type":"journal-article","created":{"date-parts":[[2014,4,20]],"date-time":"2014-04-20T23:17:32Z","timestamp":1398035852000},"page":"20140113-20140113","source":"Crossref","is-referenced-by-count":4,"title":["A CMOS-MEMS cantilever sensor for capnometric applications"],"prefix":"10.1587","volume":"11","author":[{"given":"Asif","family":"Mirza","sequence":"first","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"N. H.","family":"Hamid","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M. H. Md.","family":"Khir","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J. O.","family":"Dennis","sequence":"additional","affiliation":[{"name":"Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Khalid","family":"Ashraf","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Muhammad","family":"Shoaib","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mohammad Tariq","family":"Jan","sequence":"additional","affiliation":[{"name":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"532","reference":[{"key":"1","unstructured":"[1] Respironics: CO<sub>2<\/sub> Solutions (2014) http:\/\/oem.respironics.com."},{"key":"2","unstructured":"[2] L. Kimmig, P. Krause, M. Ludwig and K. Schmidt: US Patent 6,166,383 (2000) http:\/\/patentimages.storage.googleapis.com\/pdfs\/US6166383.pdf."},{"key":"3","unstructured":"[3] C. Vancura: Ph.D thesis Swiss Fedral Institute of Technology Zurich, Germany (2006)."},{"key":"4","doi-asserted-by":"crossref","unstructured":"[4] A. Mirza, M. H. M. Khir, J. O. Dennis, K. Ashraf and N. H. Hamid: IEEE RSM (2011) 324. DOI:10.1109\/RSM.2011.6088353","DOI":"10.1109\/RSM.2011.6088353"},{"key":"5","unstructured":"[5] A. Mirza, N. H. Hamid, M. H. Md. Khir, J. O. Dennis and K. Ashraf: Sens. Transducers <b>17<\/b> (2012) 8. http:\/\/www.sensorsportal.com\/HTML\/DIGEST\/P_SI_262.htm"},{"key":"6","doi-asserted-by":"crossref","unstructured":"[6] A. Mirza, N. H. Hamid, M. H. Md. Khir, K. Ashraf, T. M. Jan and K. Riaz: Adv. Mater. Res. <b>403<\/b> (2012) 3769. DOI:10.4028\/www.scientific.net\/AMR.403-408.3769","DOI":"10.4028\/www.scientific.net\/AMR.403-408.3769"},{"key":"7","doi-asserted-by":"crossref","unstructured":"[7] H. Xie, L. Erdmann, X. Zhu, K. J. Gabriel and G. K. Fedder: JMEMS <b>11<\/b> (2002) 9. DOI:10.1109\/84.993443","DOI":"10.1109\/84.993443"},{"key":"8","doi-asserted-by":"crossref","unstructured":"[8] H. Hosaka, K. Itao and S. Kuroda: MEMS\u201994 (1994) 193. DOI:10.1109\/MEMSYS.1994.555622","DOI":"10.1109\/MEMSYS.1994.555622"},{"key":"9","doi-asserted-by":"publisher","DOI":"10.1063\/1.347347"},{"key":"10","doi-asserted-by":"publisher","DOI":"10.3390\/s110807892"},{"key":"11","doi-asserted-by":"crossref","unstructured":"[11] S. Fanget, H. Grange, F. Palancade, G. Ganuchaud, M. Matheron and S. Charlot: Transducers\u201911 (2011) 1136. DOI:10.1109\/TRANSDUCERS.2011.5969259","DOI":"10.1109\/TRANSDUCERS.2011.5969259"}],"container-title":["IEICE Electronics Express"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.jstage.jst.go.jp\/article\/elex\/11\/9\/11_11.20140113\/_pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,4,23]],"date-time":"2021-04-23T19:15:46Z","timestamp":1619205346000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.jstage.jst.go.jp\/article\/elex\/11\/9\/11_11.20140113\/_article"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014]]},"references-count":11,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2014]]}},"URL":"https:\/\/doi.org\/10.1587\/elex.11.20140113","relation":{},"ISSN":["1349-2543"],"issn-type":[{"value":"1349-2543","type":"electronic"}],"subject":[],"published":{"date-parts":[[2014]]}}}