{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,29]],"date-time":"2025-11-29T16:23:15Z","timestamp":1764433395633},"reference-count":53,"publisher":"Institute of Electronics, Information and Communications Engineers (IEICE)","issue":"9","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["IEICE Trans. Electron."],"published-print":{"date-parts":[[2021,9,1]]},"DOI":"10.1587\/transele.2020sup0001","type":"journal-article","created":{"date-parts":[[2021,3,16]],"date-time":"2021-03-16T22:09:06Z","timestamp":1615932546000},"page":"435-445","source":"Crossref","is-referenced-by-count":6,"title":["Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation"],"prefix":"10.1587","volume":"E104.C","author":[{"given":"Shuichi","family":"NAGASAWA","sequence":"first","affiliation":[{"name":"AIST"}]},{"given":"Masamitsu","family":"TANAKA","sequence":"additional","affiliation":[{"name":"Nagoya University"}]},{"given":"Naoki","family":"TAKEUCHI","sequence":"additional","affiliation":[{"name":"Yokohama National University"}]},{"given":"Yuki","family":"YAMANASHI","sequence":"additional","affiliation":[{"name":"Yokohama National University"}]},{"given":"Shigeyuki","family":"MIYAJIMA","sequence":"additional","affiliation":[{"name":"NICT"}]},{"given":"Fumihiro","family":"CHINA","sequence":"additional","affiliation":[{"name":"NICT"}]},{"given":"Taiki","family":"YAMAE","sequence":"additional","affiliation":[{"name":"Yokohama National University"}]},{"given":"Koki","family":"YAMAZAKI","sequence":"additional","affiliation":[{"name":"The University of Electro-Communications"}]},{"given":"Yuta","family":"SOMEI","sequence":"additional","affiliation":[{"name":"The University of Electro-Communications"}]},{"given":"Naonori","family":"SEGA","sequence":"additional","affiliation":[{"name":"The University of Electro-Communications"}]},{"given":"Yoshinao","family":"MIZUGAKI","sequence":"additional","affiliation":[{"name":"The University of Electro-Communications"}]},{"given":"Hiroaki","family":"MYOREN","sequence":"additional","affiliation":[{"name":"Saitama University"}]},{"given":"Hirotaka","family":"TERAI","sequence":"additional","affiliation":[{"name":"NICT"}]},{"given":"Mutsuo","family":"HIDAKA","sequence":"additional","affiliation":[{"name":"AIST"}]},{"given":"Nobuyuki","family":"YOSHIKAWA","sequence":"additional","affiliation":[{"name":"Yokohama National University"}]},{"given":"Akira","family":"FUJIMAKI","sequence":"additional","affiliation":[{"name":"Nagoya University"}]}],"member":"532","reference":[{"key":"1","doi-asserted-by":"crossref","unstructured":"[1] A. Fujimaki, M. Tanaka, T. Yamada, Y. Yamanashi, H. Park, and N. Yoshikawa, \u201cBit-serial single flux quantum microprocessor CORE,\u201d IEICE Trans. Electron., vol.E91-C, no.3, pp.342-349, 2008. 10.1093\/ietele\/e91-c.3.342","DOI":"10.1093\/ietele\/e91-c.3.342"},{"key":"2","doi-asserted-by":"publisher","unstructured":"[2] D.S. Holmes, A.L. Ripple, and M.A. Manheimer, \u201cEnergy-efficient superconducting computing \u2014 power budgets and requirements,\u201d IEEE Trans. Appl. Supercond., vol.23, no.3, pp.1701610-1701610, 2013. 10.1109\/tasc.2013.2244634","DOI":"10.1109\/TASC.2013.2244634"},{"key":"3","doi-asserted-by":"publisher","unstructured":"[3] A. Fujimaki, M. Tanaka, R. Kasagi, K. Takagi, M. Okada, Y. Hayakawa, K. Takata, H. Akaike, N. Yoshikawa, S. Nagasawa, K. Takagi, and N. Takagi, \u201cLarge-scale integrated circuit design based on a Nb nine-layer structure for reconfigurable data-path processors,\u201d IEICE Trans. Electron., vol.E97-C, no.3, pp.157-165, March 2014. 10.1587\/transele.e97.c.157","DOI":"10.1587\/transele.E97.C.157"},{"key":"4","doi-asserted-by":"publisher","unstructured":"[4] O. Chen, R. Cai, Y. Wang, F. Ke, T. Yamae, R. Saito, N. Takeuchi, and N. Yoshikawa, \u201cAdiabatic quantum-flux-parametron: Towards building extremely energy-efficient circuits and systems,\u201d Sci. Rep., vol.9, no.1, Dec. 2019. 10.1038\/s41598-019-46595-w","DOI":"10.1038\/s41598-019-46595-w"},{"key":"5","doi-asserted-by":"publisher","unstructured":"[5] O.A. Mukhanov, D. Kirichenko, I.V. Vernik, T.V. Filippov, A. Kirichenko, R. Webber, V. Dotsenko, A. Talalaevskii, J.C. Tang, A. Sahu, P. Shevchenko, R. Miller, S.B. Kaplan, S. Sarwana, and D. Gupta, \u201cSuperconductor digital-RF receiver systems,\u201d IEICE Trans. Electron., vol.E91-C, no.3, pp.306-317, March 2008. 10.1093\/ietele\/e91-c.3.306","DOI":"10.1093\/ietele\/e91-c.3.306"},{"key":"6","doi-asserted-by":"publisher","unstructured":"[6] M. Maezawa, F. Hirayama, and M. Suzuki, \u201cRapid single flux quantum digital-to-analog converter for ac voltage standard,\u201d Physica C, vol.426-431, pp.1674-1679, 2005. 10.1016\/j.physc.2005.02.130","DOI":"10.1016\/j.physc.2005.02.130"},{"key":"7","doi-asserted-by":"publisher","unstructured":"[7] Y. Mizugaki, Y. Arai, T. Watanabe, and H. Shimada, \u201c1000-fold double-flux-quantum voltage multiplier employing directional propagation of flux quanta through asymmetrically damped junction branches,\u201d IEEE Trans. Appl. Supercond., vol.29, no.5, 1400105, 2019. 10.1109\/tasc.2019.2895606","DOI":"10.1109\/TASC.2019.2895606"},{"key":"8","doi-asserted-by":"publisher","unstructured":"[8] Y. Mizugaki, Y. Takahashi, H. Shimada, and M. Maezawa, \u201c9 bit superconductive single-flux-quantum digital-to-analogue converter,\u201d Electron. Lett., vol.50, no.22, pp.1637-1639, 2014. 10.1049\/el.2014.1926","DOI":"10.1049\/el.2014.1926"},{"key":"9","doi-asserted-by":"publisher","unstructured":"[9] S. Miyajima, M. Yabuno, S. Miki, T. Yamashita, and H. Terai, \u201cHigh-time-resolved 64-channel single-flux quantum-based address encoder integrated with a multi-pixel superconducting nanowire single-photon detector,\u201d Opt. Express, vol.26, no.22, 29045, Oct. 2018. 10.1364\/oe.26.029045","DOI":"10.1364\/OE.26.029045"},{"key":"10","doi-asserted-by":"publisher","unstructured":"[10] M. Tanaka, M. Kozaka, K. Kamiya, K. \u00dc\u015fenmez, E.C. Aydo\u011fan, S. Razmkhah, A. Bozbey, and A. Fujimaki, \u201cSfq parallel encoders promising for video imaging with superconductor stripline detectors,\u201d IEEE Trans. Appl. Supercond., vol.31, no.1, 1300106, 2021. 10.1109\/tasc.2020.3013385","DOI":"10.1109\/TASC.2020.3013385"},{"key":"11","doi-asserted-by":"publisher","unstructured":"[11] N. Takeuchi, T. Yamashita, S. Miyajima, S. Miki, N. Yoshikawa, and H. Terai, \u201cAdiabatic quantum-flux-parametron interface for the readout of superconducting nanowire single-photon detectors,\u201d Opt. Express, vol.25, no.26, pp.32650-32658, Dec. 2017. 10.1364\/oe.25.032650","DOI":"10.1364\/OE.25.032650"},{"key":"12","doi-asserted-by":"publisher","unstructured":"[12] N. Takeuchi, F. China, S. Miki, S. Miyajima, M. Yabuno, N. Yoshikawa, and H. Terai, \u201cScalable readout interface for superconducting nanowire single-photon detectors using aqfp and rsfq logic families,\u201d Opt. Express, vol.28, no.11, pp.15824-15834, May 2020. 10.1364\/oe.392507","DOI":"10.1364\/OE.392507"},{"key":"13","doi-asserted-by":"publisher","unstructured":"[13] V.K. Semenov, \u201cDigital SQUIDs: new definitions and results,\u201d IEEE Trans. Appl. Supercond., vol.13, no.2, pp.747-750, 2003. 10.1109\/tasc.2003.814027","DOI":"10.1109\/TASC.2003.814027"},{"key":"14","doi-asserted-by":"publisher","unstructured":"[14] H. Myoren, K. Okabe, R. Matsunawa, M. Naruse, and T. Taino, \u201cDesign of digital filter for digital SQUID with sub-flux quantum feedback resolution,\u201d IEEE Trans. Appl. Supercond., vol.29, no.5, 1303004, 2019. 10.1109\/tasc.2019.2908625","DOI":"10.1109\/TASC.2019.2908625"},{"key":"15","doi-asserted-by":"publisher","unstructured":"[15] S. Nagasawa, Y. Hashimoto, H. Numata, and S. Tahara, \u201cA 380 ps, 9.5 mW Josephson 4-Kbit RAM operated at a high bit yield,\u201d IEEE Trans. Appl. Supercond., vol.5, no.2, pp.2447-2452, June 1995. 10.1109\/77.403086","DOI":"10.1109\/77.403086"},{"key":"16","unstructured":"[16] H. Numata and S. Tahara, \u201cFabrication technology for Nb integrated circuits,\u201d IEICE Trans. Electron., vol.E84-C, no.1, pp.2-8, Jan. 2001."},{"key":"17","doi-asserted-by":"publisher","unstructured":"[17] S. Nagasawa, K. Hinode, M. Sugita, T. Satoh, H. Akaike, Y. Kitagawa, and M. Hidaka, \u201cPlanarized multi-layer fabrication technology for LTS large-scale SFQ circuits,\u201d Supercond. Sci. Technol., vol.16, pp.1483-1486, 2003. 10.1088\/0953-2048\/16\/12\/036","DOI":"10.1088\/0953-2048\/16\/12\/036"},{"key":"18","unstructured":"[18] K. Hinode, S. Nagasawa, M. Sugita, T. Satoh, H. Akaike, Y. Kitagawa, and M. Hidaka, \u201cPattern-size-free planarization for multilayered large-scale SFQ circuits,\u201d IEICE Trans. Electron., vol.E86-C, no.12, pp.2511-2513, 2003."},{"key":"19","doi-asserted-by":"publisher","unstructured":"[19] S. Nagasawa, K. Hinode, T. Satoh, H. Akaike, Y. Kitagawa, and M. Hidaka, \u201cDevelopment of advanced Nb process for SFQ circuits,\u201d Physica C, vol.412-414, pp.1429-1436, Oct. 2004. 10.1016\/j.physc.2003.12.097","DOI":"10.1016\/j.physc.2003.12.097"},{"key":"20","doi-asserted-by":"publisher","unstructured":"[20] S. Nagasawa, K. Hinode, T. Satoh, H. Akaike, Y. Kitagawa, and M. Hidaka, \u201cReliability evaluation of Nb 10 kA\/cm<sup>2<\/sup> fabrication process for large-scale SFQ circuits,\u201d Physica C, vol.426-431, pp.1525-1532, 2005. 10.1016\/j.physc.2005.03.058","DOI":"10.1016\/j.physc.2005.03.058"},{"key":"21","doi-asserted-by":"publisher","unstructured":"[21] T. Satoh, K. Hinode, H. Akaike, S. Nagasawa, Y. Kitagawa, and M. Hidaka, \u201cFabrication process of planarized multi-layer Nb integrated circuits,\u201d IEEE Trans. Appl. Supercond., vol.15, no.2, pp.78-81, June 2005. 10.1109\/tasc.2005.849698","DOI":"10.1109\/TASC.2005.849698"},{"key":"22","doi-asserted-by":"publisher","unstructured":"[22] T. Satoh, K. Hinode, H. Akaike, S. Nagasawa, Y. Kitagawa, and M. Hidaka, \u201cCharacteristics of Nb\/AlO<i><sub>x<\/sub><\/i>\/Nb junctions fabricated in planarized multi-layer Nb SFQ circuits,\u201d Physica C, vol.445-448, pp.937-940, 2006. 10.1016\/j.physc.2006.05.060","DOI":"10.1016\/j.physc.2006.05.060"},{"key":"23","doi-asserted-by":"publisher","unstructured":"[23] S. Nagasawa, T. Satoh, K. Hinode, Y. Kitagawa, and M. Hidaka, \u201cYield evaluation of 10-kA\/cm<sup>2<\/sup> Nb multi-layer fabrication process using conventional superconducting RAMs,\u201d IEEE Trans. Appl. Supercond., vol.17, no.2, pp.177-180, 2007. 10.1109\/tasc.2007.898050","DOI":"10.1109\/TASC.2007.898050"},{"key":"24","doi-asserted-by":"publisher","unstructured":"[24] T. Satoh, K. Hinode, S. Nagasawa, Y. Kitagawa, and M. Hidaka, \u201cImprovement of fabrication process for 10-kA\/cm<sup>2<\/sup> multi-layer Nb integrated circuits,\u201d IEEE Trans. Appl. Supercond., vol.17, no.2, pp.169-172, 2007. 10.1109\/tasc.2007.897871","DOI":"10.1109\/TASC.2007.897871"},{"key":"25","doi-asserted-by":"publisher","unstructured":"[25] T. Satoh, K. Hinode, S. Nagasawa, Y. Kitagawa, M. Hidaka, N. Yoshikawa, H. Akaike, A. Fujimaki, K. Takagi, and N. Takagi, \u201cPlanarization process for fabricating multi-layer Nb integrated circuits incorporating top active layer,\u201d IEEE Trans. Appl. Supercond., vol.19, no.3, pp.167-170, 2009. 10.1109\/tasc.2009.2018188","DOI":"10.1109\/TASC.2009.2018188"},{"key":"26","doi-asserted-by":"publisher","unstructured":"[26] S. Nagasawa, T. Satoh, K. Hinode, Y. Kitagawa, M. Hidaka, H. Akaike, A. Fujimaki, K. Takagi, N. Takagi, and N. Yoshikawa, \u201cNew Nb multi-layer fabrication process for large-scale SFQ circuits,\u201d Physica C, vol.469, no.15-20, pp.1578-1584, 2009. 10.1016\/j.physc.2009.05.219","DOI":"10.1016\/j.physc.2009.05.219"},{"key":"27","doi-asserted-by":"publisher","unstructured":"[27] H. Akaike, K. Shigehara, A. Fujimaki, T. Satoh, K. Hinode, S. Nagasawa, and M. Hidaka, \u201cThe effects of a DC power layer in a 10-Nb-layer device for SFQ LSIs,\u201d IEEE Trans. Appl. Supercond., vol.19, no.3, pp.594-597, 2009. 10.1109\/tasc.2009.2018033","DOI":"10.1109\/TASC.2009.2018033"},{"key":"28","doi-asserted-by":"publisher","unstructured":"[28] H. Akaike, Y. Kitagawa, T. Satoh, K. Hinode, S. Nagasawa, and M. Hidaka, \u201cEffect of photomask pattern shape for a junction counter-electrode on critical current uniformity and controllability in Nb\/AlO<i><sub>x<\/sub><\/i>\/Nb junctions,\u201d IEEE Trans. Appl. Supercond., vol.15, no.2, pp.102-105, 2005. 10.1109\/tasc.2005.849704","DOI":"10.1109\/TASC.2005.849704"},{"key":"29","doi-asserted-by":"publisher","unstructured":"[29] S. Nagasawa, K. Hinode, T. Satoh, M. Hidaka, H. Akaike, A. Fujimaki, N. Yoshikawa, K. Takagi, and N. Takagi, \u201cNb 9-layer fabrication process for superconducting large-scale SFQ circuits and its process evaluation,\u201d IEICE Trans. Electron., vol.E97-C, no.3, pp.132-140, March 2014. 10.1587\/transele.e97.c.132","DOI":"10.1587\/transele.E97.C.132"},{"key":"30","doi-asserted-by":"publisher","unstructured":"[30] S. Nagasawa and M. Hidaka, \u201cRun-to-run yield evaluation of improved Nb 9-layer advanced process using single flux quantum shift register chip with 68,990 Josephson junctions,\u201d J. Phys. Conf. Ser., vol.871, 012065, July 2017. 10.1088\/1742-6596\/871\/1\/012065","DOI":"10.1088\/1742-6596\/871\/1\/012065"},{"key":"31","doi-asserted-by":"publisher","unstructured":"[31] N. Takeuchi, S. Nagasawa, F. China, T. Ando, M. Hidaka, Y. Yamanashi, and N. Yoshikawa, \u201cAdiabatic quantum-flux-parametron cell library designed using a 10 kA cm<sup>-2<\/sup> niobium fabrication process,\u201d Supercond. Sci. Technol., vol.30, no.3, 035002, March 2017. 10.1088\/1361-6668\/aa52f3","DOI":"10.1088\/1361-6668\/aa52f3"},{"key":"32","doi-asserted-by":"publisher","unstructured":"[32] S.K. Tolpygo, V. Bolkhovsky, T.J. Weir, L.M. Johnson, M.A. Gouker, and W.D. Oliver, \u201cFabrication process and properties of fully-planarized deep-submicron Nb\/Al-AlO<i><sub>x<\/sub><\/i>\/Nb Josephson junctions for VLSI circuits,\u201d IEEE Trans. Appl. Supercond., vol.25, no.3, 1101312, 2015. 10.1109\/tasc.2014.2374836","DOI":"10.1109\/TASC.2014.2374836"},{"key":"33","doi-asserted-by":"publisher","unstructured":"[33] D.T. Yohannes, R.T. Hunt, J.A. Vivalda, D. Amparo, A. Cohen, I.V. Vernik, and A.F. Kirichenko, \u201cPlanarized, extendible, multilayer fabrication process for superconducting electronics,\u201d IEEE Trans. Appl. Supercond., vol.25, no.3, 1100405, 2015. 10.1109\/tasc.2014.2365562","DOI":"10.1109\/TASC.2014.2365562"},{"key":"34","doi-asserted-by":"publisher","unstructured":"[34] S. Tolpygo, V. Bolkhovsky, T. Weir, A. Wynn, D. Oates, L. Johnson, and M. Gouker, \u201cAdvanced fabrication processes for superconducting very large scale integrated circuits,\u201d IEEE Trans. Appl. Supercond., 1100110, 2016. 10.1109\/tasc.2016.2519388","DOI":"10.1109\/TASC.2016.2519388"},{"key":"35","doi-asserted-by":"publisher","unstructured":"[35] S.K. Tolpygo, V. Bolkhovsky, S. Zarr, T.J. Weir, A. Wynn, A.L. Day, L.M. Johnson, and M.A. Gouker, \u201cProperties of unshunted and resistively shunted Nb\/AlO<i><sub>x<\/sub><\/i>-Al\/Nb Josephson junctions with critical current densities from 0.1 to 1 mA\/\u00b5m<sup>2<\/sup>,\u201d IEEE Trans. Appl. Supercond., vol.27, no.4, 1100815, June 2017. 10.1109\/tasc.2017.2667403","DOI":"10.1109\/TASC.2017.2667403"},{"key":"36","doi-asserted-by":"publisher","unstructured":"[36] S.K. Tolpygo, V. Bolkhovsky, R. Rastogi, S. Zarr, A.L. Day, E. Golden, T.J. Weir, A. Wynn, and L.M. Johnson, \u201cAdvanced fabrication processes for superconductor electronics: current status and new developments,\u201d IEEE Trans. Appl. Supercond., vol.29, no.5, 1100110, Aug. 2019. 10.1109\/tasc.2019.2904919","DOI":"10.1109\/TASC.2019.2904919"},{"key":"37","doi-asserted-by":"publisher","unstructured":"[37] D. Olaya, M. Castellanos-Beltran, J. Pulecio, J. Biesecker, S. Khadem, T. Lewitt, P. Hopkins, P. Dresselhaus, and S. Benz, \u201cPlanarized process for single-flux-quantum circuits with self-shunted Nb\/Nb<i><sub>x<\/sub><\/i>Si<sub>1-<i>x<\/i><\/sub>\/Nb Josephson junctions,\u201d IEEE Trans. Appl. Supercond., vol.29, no.6, 1101708, 2019. 10.1109\/tasc.2019.2900020","DOI":"10.1109\/TASC.2019.2900020"},{"key":"38","doi-asserted-by":"publisher","unstructured":"[38] N. Takeuchi, D. Ozawa, Y. Yamanashi, and N. Yoshikawa, \u201cAn adiabatic quantum flux parametron as an ultra-low-power logic device,\u201d Supercond. Sci. Technol., vol.26, no.3, 035010, March 2013. 10.1088\/0953-2048\/26\/3\/035010","DOI":"10.1088\/0953-2048\/26\/3\/035010"},{"key":"39","doi-asserted-by":"publisher","unstructured":"[39] H. Terai, S. Miki, and Z. Wang, \u201cReadout electronics using single-flux-quantum circuit technology for superconducting single-photon detector array,\u201d IEEE Trans. Appl. Supercond., vol.19, no.3, pp.350-353, 2009. 10.1109\/tasc.2009.2019029","DOI":"10.1109\/TASC.2009.2019029"},{"key":"40","doi-asserted-by":"publisher","unstructured":"[40] K.K. Likharev and V.K. Semenov, \u201cRSFQ logic\/memory family: a new josephson-junction technology for sub-terahertz-clock-frequency digital systems,\u201d IEEE Trans. Appl. Supercond., vol.1, no.1, pp.3-28, 1991. 10.1109\/77.80745","DOI":"10.1109\/77.80745"},{"key":"41","doi-asserted-by":"publisher","unstructured":"[41] T. Ando, S. Nagasawa, N. Takeuchi, N. Tsuji, F. China, M. Hidaka, Y. Yamanashi, and N. Yoshikawa, \u201cThree-dimensional adiabatic quantum-flux-parametron fabricated using a double-active-layered niobium process,\u201d Supercond. Sci. Technol., vol.30, no.7, 075003, June 2017. 10.1088\/1361-6668\/aa6ef4","DOI":"10.1088\/1361-6668\/aa6ef4"},{"key":"42","unstructured":"[42] S. Nagasawa and M. Hidaka, \u201cYield improvement of Nb 9-layer advanced process using PECVD SiO<sub>2<\/sub> insulator,\u201d Proc. Superconducting SFQ VLSI Workshop 2016, pp.51-54, 2016."},{"key":"43","unstructured":"[43] S. Nagasawa, K. Hinode, and M. Hidaka, \u201cDegradations of superconducting contacts depending on integrated circuit layout designs,\u201d Proc. Superconducting SFQ VLSI Workshop 2019, pp.149-154, 2019."},{"key":"44","doi-asserted-by":"publisher","unstructured":"[44] C.J. Fourie, O. Wetzstein, T. Ortlepp, and J. Kunert, \u201cThree-dimensional multi-terminal superconductive integrated circuit inductance extraction,\u201d Supercond. Sci. Technol., vol.24, no.12, 125015, Nov. 2011. 10.1088\/0953-2048\/24\/12\/125015","DOI":"10.1088\/0953-2048\/24\/12\/125015"},{"key":"45","doi-asserted-by":"publisher","unstructured":"[45] C.J. Fourie, \u201cFull-gate verification of superconducting integrated circuit layouts with InductEx,\u201d IEEE Trans. Appl. Supercond., vol.25, no.1, 1300209, 2015. 10.1109\/tasc.2014.2360870","DOI":"10.1109\/TASC.2014.2360870"},{"key":"46","doi-asserted-by":"crossref","unstructured":"[46] S. Yorozu, Y. Kameda, H. Terai, A. Fujimaki, T. Yamada, and S. Tahara, \u201cA single flux quantum standard logic cell library,\u201d Physica C, vol.378-381, pp.1471-1474, 2002. 10.1016\/s0921-4534(02)01759-8","DOI":"10.1016\/S0921-4534(02)01759-8"},{"key":"47","doi-asserted-by":"publisher","unstructured":"[47] H. Akaike, M. Tanaka, K. Takagi, I. Kataeva, R. Kasagi, A. Fujimaki, K. Takagi, M. Igarashi, H. Park, Y. Yamanashi, N. Yoshikawa, K. Fujiwara, S. Nagasawa, M. Hidaka, and N. Takagi, \u201cDesign of single flux quantum cells for a 10-Nb-layer process,\u201d Physica C, vol.469, no.15-20, pp.1670-1673, Oct. 2009. 10.1016\/j.physc.2009.05.041","DOI":"10.1016\/j.physc.2009.05.041"},{"key":"48","doi-asserted-by":"crossref","unstructured":"[48] Y. Yamanashi, T. Kainuma, N. Yoshikawa, I. Kataeva, H. Akaike, A. Fujimaki, M. Tanaka, N. Takagi, S. Nagasawa, and M. Hidaka, \u201c100 GHz demonstrations based on the single-flux-quantum cell library for the 10 kA\/cm<sup>2<\/sup> Nb multi-layer process,\u201d IEICE Trans. Electron., vol.E93-C, no.4, pp.440-444, 2010. 10.1587\/transele.e93.c.440","DOI":"10.1587\/transele.E93.C.440"},{"key":"49","doi-asserted-by":"publisher","unstructured":"[49] H. Terai, M. Tanaka, Y. Yamanashi, Y. Hashimoto, A. Fujimaki, N. Yoshikawa, and Z. Wang, \u201cDiagnostic test of large-scale SFQ shift register,\u201d IEEE Trans. Appl. Supercond., vol.17, no.2, pp.422-425, 2007. 10.1109\/tasc.2007.898559","DOI":"10.1109\/TASC.2007.898559"},{"key":"50","doi-asserted-by":"publisher","unstructured":"[50] N. Takeuchi, Y. Yamanashi, and N. Yoshikawa, \u201cAdiabatic quantum-flux-parametron cell library adopting minimalist design,\u201d J. Appl. Phys., vol.117, no.17, 173912, 2015. 10.1063\/1.4919838","DOI":"10.1063\/1.4919838"},{"key":"51","doi-asserted-by":"publisher","unstructured":"[51] N. Takeuchi, H. Suzuki, C.J. Fourie, and N. Yoshikawa, \u201cImpedance design of excitation lines in adiabatic quantum-flux-parametron logic using InductEx,\u201d IEEE Trans. Appl. Supercond., vol.31, no.5, 1300605, Aug. 2021. 10.1109\/tasc.2021.3058080","DOI":"10.1109\/TASC.2021.3058080"},{"key":"52","doi-asserted-by":"publisher","unstructured":"[52] S. Miyajima, S. Miki, M. Yabuno, T. Yamashita, and H. Terai, \u201cTiming discriminator based on single-flux-quantum circuit toward high time-resolved photon detection,\u201d Supercond. Sci. Technol., vol.30, no.12, 12LT01, Dec. 2017. 10.1088\/1361-6668\/aa926e","DOI":"10.1088\/1361-6668\/aa926e"},{"key":"53","doi-asserted-by":"publisher","unstructured":"[53] S. Miki, S. Miyajima, M. Yabuno, T. Yamashita, T. Yamamoto, N. Imoto, R. Ikuta, R.A. Kirkwood, R.H. Hadfield, and H. Terai, \u201cSuperconducting coincidence photon detector with short timing jitter,\u201d Appl. Phys. Lett., vol.112, no.26, 262601, June 2018. 10.1063\/1.5037254","DOI":"10.1063\/1.5037254"}],"container-title":["IEICE Transactions on Electronics"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.jstage.jst.go.jp\/article\/transele\/E104.C\/9\/E104.C_2020SUP0001\/_pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,9,4]],"date-time":"2021-09-04T03:23:29Z","timestamp":1630725809000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.jstage.jst.go.jp\/article\/transele\/E104.C\/9\/E104.C_2020SUP0001\/_article"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,9,1]]},"references-count":53,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2021]]}},"URL":"https:\/\/doi.org\/10.1587\/transele.2020sup0001","relation":{},"ISSN":["0916-8524","1745-1353"],"issn-type":[{"value":"0916-8524","type":"print"},{"value":"1745-1353","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,9,1]]},"article-number":"2020SUP0001"}}