{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,21]],"date-time":"2026-02-21T07:14:35Z","timestamp":1771658075515,"version":"3.50.1"},"reference-count":25,"publisher":"Zhejiang University Press","issue":"1","license":[{"start":{"date-parts":[[2013,1,1]],"date-time":"2013-01-01T00:00:00Z","timestamp":1356998400000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["J. Zhejiang Univ. - Sci. C"],"published-print":{"date-parts":[[2013,1]]},"DOI":"10.1631\/jzus.c1200251","type":"journal-article","created":{"date-parts":[[2013,1,8]],"date-time":"2013-01-08T15:30:57Z","timestamp":1357659057000},"page":"65-74","source":"Crossref","is-referenced-by-count":5,"title":["Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers"],"prefix":"10.1631","volume":"14","author":[{"given":"Jian-qiang","family":"Han","sequence":"first","affiliation":[]},{"given":"Ri-sheng","family":"Feng","sequence":"additional","affiliation":[]},{"given":"Yan","family":"Li","sequence":"additional","affiliation":[]},{"given":"Sen-lin","family":"Li","sequence":"additional","affiliation":[]},{"given":"Qing","family":"Li","sequence":"additional","affiliation":[]}],"member":"635","published-online":{"date-parts":[[2013,1,9]]},"reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(93)80123-x"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(96)01135-1"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/84.506200"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.3390\/s90301330"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/icsens.2009.5398209"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/memsys.2010.5442517"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/memsys.2011.5734478"},{"key":"ref8","volume-title":"Simulation of Microelectromechanical Systems","author":"Fedder","year":"1994"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2005.03.067"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1080\/10584580390259722"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/s0924-4247(97)80094-5"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1109\/smelec.2006.381013"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1149\/1.2086334"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/jmems.2009.2020374"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1016\/j.proche.2009.07.134"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/0924-4247(90)87085-w"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/icinfa.2009.5205115"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/sensor.1997.635237"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1049\/el:20061774"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/icsens.2002.1037259"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/jmems.2002.805207"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1109\/jsen.2005.857876"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1109\/nems.2011.6017409"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(89)87019-2"},{"key":"ref25","doi-asserted-by":"publisher","DOI":"10.1016\/s0924-4247(96)01312-x"}],"container-title":["Journal of Zhejiang University SCIENCE C"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1631\/jzus.C1200251.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/article\/10.1631\/jzus.C1200251\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1631\/jzus.C1200251","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,2,21]],"date-time":"2026-02-21T06:47:25Z","timestamp":1771656445000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1631\/jzus.C1200251"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,1]]},"references-count":25,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2013,1]]}},"alternative-id":["1376"],"URL":"https:\/\/doi.org\/10.1631\/jzus.c1200251","relation":{},"ISSN":["1869-1951","1869-196X"],"issn-type":[{"value":"1869-1951","type":"print"},{"value":"1869-196X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,1]]}}}