{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,31]],"date-time":"2024-10-31T02:22:08Z","timestamp":1730341328736,"version":"3.28.0"},"reference-count":24,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,5]]},"DOI":"10.23919\/acc.2017.7963273","type":"proceedings-article","created":{"date-parts":[[2017,7,10]],"date-time":"2017-07-10T17:39:58Z","timestamp":1499708398000},"page":"2164-2170","source":"Crossref","is-referenced-by-count":1,"title":["A modeling framework and flux controller for free molecular flow deposition processes"],"prefix":"10.23919","author":[{"given":"M.","family":"Dresscher","sequence":"first","affiliation":[]},{"given":"B.","family":"Jayawardhana","sequence":"additional","affiliation":[]},{"given":"J.J.","family":"Barradas-Berglind","sequence":"additional","affiliation":[]},{"given":"J.M.A.","family":"Scherpen","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1016\/S0360-3199(97)00038-4","article-title":"Direct solar thermal splitting of water and on-site separation of the products II. Experimental feasibility study","volume":"23","author":"kogan","year":"1998","journal-title":"International Journal of Hydrogen Energy"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"1803","DOI":"10.1021\/ie00031a020","article-title":"Theoretical and experimental study on membrane distillation in the concentration of orange juice","volume":"33","author":"calabro","year":"1994","journal-title":"Industrial & Engineering Chemistry Research"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1063\/1.556019"},{"key":"ref13","doi-asserted-by":"crossref","first-page":"517","DOI":"10.1007\/s11242-012-9966-3","article-title":"Knudsen diffusion through cylindrical tubes of varying radii: theory and Monte Carlo simulations","volume":"93","author":"shi","year":"2012","journal-title":"Transport in Porous Media"},{"key":"ref14","doi-asserted-by":"crossref","first-page":"1567","DOI":"10.1016\/S0005-1098(00)00084-4","article-title":"Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities","volume":"36","author":"edgar","year":"2000","journal-title":"Automatica"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"316","DOI":"10.1016\/j.ces.2012.06.063","article-title":"A model-based methodology for the analysis and design of atomic layer deposition processes-Part II: Experimental validation and mechanistic analysis","volume":"94","author":"holmqvist","year":"2013","journal-title":"Chemical Engineering Science"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.ces.2013.03.061"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1016\/j.automatica.2015.12.011"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2014.7039737"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2014.7040372"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1116\/1.584990"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0034-4885\/49\/10\/001"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1002\/cvde.201106922"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1116\/1.2717191"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1002\/cvde.200390005"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1016\/j.ces.2012.07.015"},{"key":"ref2","first-page":"1113","article-title":"The cosine law in the kinetic theory of gases","volume":"48","author":"knudsen","year":"1915","journal-title":"Annalen der Physik"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1002\/andp.19093330106"},{"journal-title":"Separation of Isotopes","year":"1976","author":"villani","key":"ref9"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1016\/j.ifacol.2015.11.152"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1111\/j.1934-6093.1999.tb00002.x"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1109\/CDC.2016.7799254"},{"key":"ref24","doi-asserted-by":"publisher","DOI":"10.1137\/1.9780898718713"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1016\/j.ifacol.2015.11.155"}],"event":{"name":"2017 American Control Conference (ACC)","start":{"date-parts":[[2017,5,24]]},"location":"Seattle, WA, USA","end":{"date-parts":[[2017,5,26]]}},"container-title":["2017 American Control Conference (ACC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7951530\/7962914\/07963273.pdf?arnumber=7963273","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,6,23]],"date-time":"2021-06-23T16:00:30Z","timestamp":1624464030000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7963273\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,5]]},"references-count":24,"URL":"https:\/\/doi.org\/10.23919\/acc.2017.7963273","relation":{},"subject":[],"published":{"date-parts":[[2017,5]]}}}