{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T13:27:41Z","timestamp":1762522061657},"reference-count":21,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2017,5]]},"DOI":"10.23919\/acc.2017.7963386","type":"proceedings-article","created":{"date-parts":[[2017,7,10]],"date-time":"2017-07-10T17:39:58Z","timestamp":1499708398000},"page":"2869-2874","source":"Crossref","is-referenced-by-count":2,"title":["Design and control of a single-chip SOI-MEMS atomic force microscope"],"prefix":"10.23919","author":[{"given":"Mohammad","family":"Maroufi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Michael G.","family":"Ruppert","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Anthony G.","family":"Fowler","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"S.O. Reza","family":"Moheimani","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1116\/1.576401"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1063\/1.108593"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/4\/4\/007"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1063\/1.4841855"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1063\/1.4918729"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.3182\/20140824-6-ZA-1003.00376"},{"journal-title":"PiezoMUMPS Design Handbook","year":"2014","author":"cowen","key":"ref16"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1116\/1.2955728"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/21\/7\/074007"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2014.2345098"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1115\/IMECE2005-82158"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/9\/007"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1109\/JSEN.2015.2504846"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2012.2191940"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/20\/43\/434003"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TRANSDUCERS.2011.5969836"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1063\/1.100061"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4765048"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/S0924-4247(96)01440-9"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1109\/TCST.2015.2478077"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.3762\/bjnano.7.26"}],"event":{"name":"2017 American Control Conference (ACC)","start":{"date-parts":[[2017,5,24]]},"location":"Seattle, WA, USA","end":{"date-parts":[[2017,5,26]]}},"container-title":["2017 American Control Conference (ACC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/7951530\/7962914\/07963386.pdf?arnumber=7963386","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,6,23]],"date-time":"2021-06-23T16:01:24Z","timestamp":1624464084000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/7963386\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,5]]},"references-count":21,"URL":"https:\/\/doi.org\/10.23919\/acc.2017.7963386","relation":{},"subject":[],"published":{"date-parts":[[2017,5]]}}}