{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,10,31]],"date-time":"2024-10-31T02:28:10Z","timestamp":1730341690445,"version":"3.28.0"},"reference-count":12,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,5,31]],"date-time":"2023-05-31T00:00:00Z","timestamp":1685491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,5,31]],"date-time":"2023-05-31T00:00:00Z","timestamp":1685491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,5,31]]},"DOI":"10.23919\/acc55779.2023.10156155","type":"proceedings-article","created":{"date-parts":[[2023,7,3]],"date-time":"2023-07-03T17:48:03Z","timestamp":1688406483000},"page":"4039-4043","source":"Crossref","is-referenced-by-count":0,"title":["Model predictive control of sputter processes"],"prefix":"10.23919","author":[{"given":"Christian","family":"Woelfel","sequence":"first","affiliation":[{"name":"Ruhr University Bochum,Faculty for Electrical Engineering and Information Technology,Bochum,Germany,44801"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1088\/0022-3727\/33\/15\/319"},{"key":"ref7","article-title":"PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect","volume":"42","author":"donko","year":"2008","journal-title":"Journal of Physics D Applied Physics"},{"article-title":"MODEL PREDICTIVE CONTROL","year":"2017","author":"rawlings","key":"ref12"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(02)00030-2"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1109\/27.16552"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1109\/27.90309"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1063\/1.348436"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.automatica.2009.06.005"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1116\/1.576220"},{"key":"ref10","article-title":"Model identification of sputter processes","author":"woelfel","year":"2017","journal-title":"Proc 26th International Conference on Information Communication and Automation Technologies"},{"article-title":"Soviet Radio Frequency Discharge Research","year":"1986","author":"godyak","key":"ref2"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1002\/0471724254"}],"event":{"name":"2023 American Control Conference (ACC)","start":{"date-parts":[[2023,5,31]]},"location":"San Diego, CA, USA","end":{"date-parts":[[2023,6,2]]}},"container-title":["2023 American Control Conference (ACC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10155646\/10155787\/10156155.pdf?arnumber=10156155","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,12,11]],"date-time":"2023-12-11T19:01:39Z","timestamp":1702321299000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10156155\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,5,31]]},"references-count":12,"URL":"https:\/\/doi.org\/10.23919\/acc55779.2023.10156155","relation":{},"subject":[],"published":{"date-parts":[[2023,5,31]]}}}