{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,5]],"date-time":"2026-06-05T06:01:41Z","timestamp":1780639301010,"version":"3.54.1"},"reference-count":19,"publisher":"IEEE","license":[{"start":{"date-parts":[[2026,4,20]],"date-time":"2026-04-20T00:00:00Z","timestamp":1776643200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,4,20]],"date-time":"2026-04-20T00:00:00Z","timestamp":1776643200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"funder":[{"DOI":"10.13039\/100007219","name":"Natural Science Foundation of Shanghai","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100007219","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,4,20]]},"DOI":"10.23919\/date69613.2026.11539108","type":"proceedings-article","created":{"date-parts":[[2026,6,4]],"date-time":"2026-06-04T19:53:10Z","timestamp":1780602790000},"page":"1-7","source":"Crossref","is-referenced-by-count":0,"title":["No Pixel, More Efficient: Multimodal Framework for Sub-nm Mask Process Correction"],"prefix":"10.23919","author":[{"given":"Kai","family":"Ma","sequence":"first","affiliation":[{"name":"ShanghaiTech University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Tianyi","family":"Li","sequence":"additional","affiliation":[{"name":"ShanghaiTech University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiaqi","family":"Liu","sequence":"additional","affiliation":[{"name":"Shanghai Optoelectronics Science and Technology Innovation Center"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jingyi","family":"Yu","sequence":"additional","affiliation":[{"name":"ShanghaiTech University"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hao","family":"Geng","sequence":"additional","affiliation":[{"name":"ShanghaiTech University"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1117\/12.2601035"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.23.4.041503"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1117\/12.2554867"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1117\/12.814362"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1117\/12.617133"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1117\/12.772975"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2022.3171441"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1117\/12.2601032"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.1117\/12.897037"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2023.3347293"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2018.07.013"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1117\/12.3035191"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2021.3116511"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2019.2939329"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1109\/DAC56929.2023.10247704"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1109\/TCAD.2022.3175939"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1109\/CVPR52733.2024.00463"},{"key":"ref18","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV51070.2023.00355"},{"key":"ref19","article-title":"Lmlitho","year":"2024"}],"event":{"name":"2026 Design, Automation & Test in Europe Conference (DATE)","location":"Verona, Italy","start":{"date-parts":[[2026,4,20]]},"end":{"date-parts":[[2026,4,22]]}},"container-title":["2026 Design, Automation & Test in Europe Conference (DATE)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/11539023\/11539024\/11539108.pdf?arnumber=11539108","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,6,5]],"date-time":"2026-06-05T05:13:07Z","timestamp":1780636387000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11539108\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,4,20]]},"references-count":19,"URL":"https:\/\/doi.org\/10.23919\/date69613.2026.11539108","relation":{},"subject":[],"published":{"date-parts":[[2026,4,20]]}}}