{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,9]],"date-time":"2026-07-09T03:26:23Z","timestamp":1783567583978,"version":"3.55.0"},"reference-count":0,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,7]]},"DOI":"10.23919\/ecc.2013.6669553","type":"proceedings-article","created":{"date-parts":[[2018,6,21]],"date-time":"2018-06-21T16:11:56Z","timestamp":1529597516000},"page":"1445-1500","source":"Crossref","is-referenced-by-count":9,"title":["Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment"],"prefix":"10.23919","author":[{"given":"Alexis","family":"Thieullen","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mustapha","family":"Ouladsine","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jacques","family":"Pinaton","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","event":{"name":"2013 European Control Conference (ECC)","location":"Zurich","start":{"date-parts":[[2013,7,17]]},"end":{"date-parts":[[2013,7,19]]}},"container-title":["2013 European Control Conference (ECC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/6657188\/6669080\/06669553.pdf?arnumber=6669553","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2018,6,21]],"date-time":"2018-06-21T16:15:15Z","timestamp":1529597715000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/6669553\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,7]]},"references-count":0,"URL":"https:\/\/doi.org\/10.23919\/ecc.2013.6669553","relation":{},"subject":[],"published":{"date-parts":[[2013,7]]}}}