{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,15]],"date-time":"2025-10-15T06:12:33Z","timestamp":1760508753626,"version":"build-2065373602"},"reference-count":21,"publisher":"IEEE","license":[{"start":{"date-parts":[[2025,6,24]],"date-time":"2025-06-24T00:00:00Z","timestamp":1750723200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2025,6,24]],"date-time":"2025-06-24T00:00:00Z","timestamp":1750723200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2025,6,24]]},"DOI":"10.23919\/ecc65951.2025.11186843","type":"proceedings-article","created":{"date-parts":[[2025,10,14]],"date-time":"2025-10-14T17:38:09Z","timestamp":1760463489000},"page":"1720-1727","source":"Crossref","is-referenced-by-count":0,"title":["Run-to-Run Control of an Atomic Layer Etching Process with a Machine Learning-Based Endpoint-Detection Control System"],"prefix":"10.23919","author":[{"given":"Feiyang","family":"Ou","sequence":"first","affiliation":[{"name":"University of California,Department of Chemical and Biomolecular Engineering,Los Angeles,CA,USA,90095-1592"}]},{"given":"Henrik","family":"Wang","sequence":"additional","affiliation":[{"name":"University of California,Department of Chemical and Biomolecular Engineering,Los Angeles,CA,USA,90095-1592"}]},{"given":"Julius","family":"Suherman","sequence":"additional","affiliation":[{"name":"University of California,Department of Chemical and Biomolecular Engineering,Los Angeles,CA,USA,90095-1592"}]},{"given":"Gerassimos","family":"Orkoulas","sequence":"additional","affiliation":[{"name":"Widener University,Department of Chemical Engineering,Chester,PA,USA,19013"}]},{"given":"Panagiotis D.","family":"Christofides","sequence":"additional","affiliation":[{"name":"University of California,Department of Chemical and Biomolecular Engineering and the Department of Electrical and Computer Engineering,Los Angeles,CA,USA,90095-1592"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1109\/TED.2020.2987442"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1109\/MITP.2021.3105248"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1116\/1.4913379"},{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1021\/cr900056b"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1016\/j.mejo.2021.105141"},{"key":"ref6","doi-asserted-by":"publisher","DOI":"10.1201\/9781003311720"},{"key":"ref7","doi-asserted-by":"publisher","DOI":"10.1002\/aic.16400"},{"key":"ref8","doi-asserted-by":"publisher","DOI":"10.1016\/j.compchemeng.2022.107757"},{"key":"ref9","doi-asserted-by":"publisher","DOI":"10.3390\/coatings14091115"},{"key":"ref10","doi-asserted-by":"publisher","DOI":"10.1016\/j.compchemeng.2018.03.011"},{"key":"ref11","doi-asserted-by":"publisher","DOI":"10.1016\/j.compchemeng.2020.107066"},{"key":"ref12","doi-asserted-by":"publisher","DOI":"10.1116\/1.4833561"},{"key":"ref13","doi-asserted-by":"publisher","DOI":"10.1016\/j.cherd.2021.10.016"},{"key":"ref14","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6463\/aab322"},{"key":"ref15","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.6b00111"},{"key":"ref16","doi-asserted-by":"publisher","DOI":"10.1016\/j.dche.2024.100140"},{"key":"ref17","doi-asserted-by":"publisher","DOI":"10.1016\/j.dche.2024.100140"},{"key":"ref18","article-title":"Attention is all you need","author":"Vaswani","year":"2017","journal-title":"Advances in Neural Information Processing Systems"},{"key":"ref19","doi-asserted-by":"publisher","DOI":"10.1080\/00224065.1993.11979473"},{"key":"ref20","doi-asserted-by":"publisher","DOI":"10.1080\/00224065.1997.11979749"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1016\/j.cherd.2022.03.039"}],"event":{"name":"2025 European Control Conference (ECC)","start":{"date-parts":[[2025,6,24]]},"location":"Thessaloniki, Greece","end":{"date-parts":[[2025,6,27]]}},"container-title":["2025 European Control Conference (ECC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/11186289\/11186290\/11186843.pdf?arnumber=11186843","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,15]],"date-time":"2025-10-15T05:52:31Z","timestamp":1760507551000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/11186843\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,6,24]]},"references-count":21,"URL":"https:\/\/doi.org\/10.23919\/ecc65951.2025.11186843","relation":{},"subject":[],"published":{"date-parts":[[2025,6,24]]}}}