{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,9]],"date-time":"2025-06-09T19:29:06Z","timestamp":1749497346556,"version":"3.28.0"},"reference-count":42,"publisher":"IEEE","license":[{"start":{"date-parts":[[2024,6,27]],"date-time":"2024-06-27T00:00:00Z","timestamp":1719446400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2024,6,27]],"date-time":"2024-06-27T00:00:00Z","timestamp":1719446400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2024,6,27]]},"DOI":"10.23919\/mixdes62605.2024.10614012","type":"proceedings-article","created":{"date-parts":[[2024,8,2]],"date-time":"2024-08-02T17:20:23Z","timestamp":1722619223000},"page":"23-28","source":"Crossref","is-referenced-by-count":2,"title":["Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems"],"prefix":"10.23919","author":[{"given":"Ivo W.","family":"Rangelow","sequence":"first","affiliation":[{"name":"Technische Universität Ilmenau,NanoScale Systems,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Thomas","family":"Schenkel","sequence":"additional","affiliation":[{"name":"Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Arun","family":"Persaud","sequence":"additional","affiliation":[{"name":"Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zahid","family":"Durrani","sequence":"additional","affiliation":[{"name":"Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mervyn","family":"Jones","sequence":"additional","affiliation":[{"name":"Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hans-Georg","family":"Pietscher","sequence":"additional","affiliation":[{"name":"nano analytik GmbH,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fabian","family":"Dietrich","sequence":"additional","affiliation":[{"name":"nano analytik GmbH,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Aditya S.","family":"Tan","sequence":"additional","affiliation":[{"name":"nano analytik GmbH,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jaqueline","family":"Stauffenberg","sequence":"additional","affiliation":[{"name":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eberhard","family":"Manske","sequence":"additional","affiliation":[{"name":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Thomas","family":"Froehlich","sequence":"additional","affiliation":[{"name":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dimitre","family":"Karpuzov","sequence":"additional","affiliation":[{"name":"University of Alberta,Edmonton,Alberta,Canada,T6G 2R3"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"263","reference":[{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5050773"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1103\/physrevapplied.12.064050"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6463\/ac66a8"},{"issue":"677","key":"ref4","article-title":"Development of single-ion implantation - controllability of implanted ion number","volume-title":"Appl. Surf. Sci.","volume":"117","author":"Matsukawa","year":"1997"},{"key":"ref5","doi-asserted-by":"publisher","DOI":"10.1063\/1.1925320"},{"issue":"2596","key":"ref6","article-title":"Single-atom doping for quantum device development in diamond and silicon","volume-title":"J. Vac. Sci. Techn. B","volume":"26","author":"Weis","year":"2008"},{"issue":"123005","key":"ref7","volume-title":"New J. Phys.","volume":"19","author":"Sahin","year":"2017"},{"issue":"9781","key":"ref8","volume-title":"Sci. Rep.","volume":"8","author":"Racke","year":"2018"},{"issue":"106802","key":"ref9","volume-title":"Phys. Rev. Lett.","volume":"123","author":"Groot-Berning","year":"2019"},{"issue":"204502","key":"ref10","volume-title":"Journal of Applied Physics","volume":"131","author":"Racke","year":"2022"},{"key":"ref11","volume-title":"Eberhard Manske Proc. SPIE 11610, Novel Patterning Technologies","volume":"1161016","author":"Stauffenberg","year":"2021"},{"key":"ref12","doi-asserted-by":"crossref","first-page":"233","DOI":"10.1007\/s11128-004-3879-1","volume":"3","author":"Persaud","year":"2004","journal-title":"Quantum Information Processing"},{"key":"ref13","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1007\/s00339-006-3497-0","volume":"83","author":"Meijer","year":"2006","journal-title":"Appl. Phys. A"},{"issue":"2103235","key":"ref14","volume":"34","author":"Jakob","year":"2022","journal-title":"Adv. Mater."},{"issue":"062101","key":"ref15","volume":"108","author":"Singh","year":"2016","journal-title":"Appl. Phys. Lett."},{"issue":"023113","key":"ref16","article-title":"Implantation of labelled single nitrogen vacancy centers in diamond using 15N","volume":"88","author":"Rabeau","year":"2006","journal-title":"Appl. Phys. Lett."},{"issue":"112101","key":"ref18","volume":"88","author":"Schenkel","year":"2006","journal-title":"Appl. Phys. Lett."},{"issue":"035306","key":"ref19","article-title":"Surface code architecture for donors and dots in silicon with imprecise and non-uniform qubit couplings","volume":"93","author":"Pica","year":"2016","journal-title":"Phys. Rev. B"},{"key":"ref20","doi-asserted-by":"crossref","first-page":"916","DOI":"10.1116\/1.1371018","article-title":"Fabrication and electrical characterization of high aspect ratio silicon field emitter arrays","author":"Rangelow","year":"2001","journal-title":"J. Vac. Sci. Technol. B 19"},{"key":"ref21","doi-asserted-by":"publisher","DOI":"10.1021\/nn2027566"},{"key":"ref22","doi-asserted-by":"publisher","DOI":"10.1021\/nl2015069"},{"key":"ref23","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/26\/30\/305203"},{"issue":"2262","key":"ref24","article-title":"Coherent states in a coupled quantum dot nanocrystalline silicon transistor","volume":"85","author":"Khalafalla","year":"2004","journal-title":"Appl. Phys. Lett."},{"journal-title":"2020 Int. J. Extrem. Manuf. 2 032005","article-title":"Scanning probe lithography on calixarene towards single-digit nanometer fabrication","author":"Kaestner","key":"ref25"},{"key":"ref26","doi-asserted-by":"crossref","first-page":"085011","DOI":"10.1088\/1361-6501\/ad4668","article-title":"Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)","volume":"35","author":"Stauffenberg","year":"2024","journal-title":"Measurement Science and Technology"},{"key":"ref27","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1038\/s41699-022-00318-4","article-title":"Low-energy Se ion implantation in MoS2 monolayers","volume":"6","author":"Bui","year":"2022","journal-title":"npj 2D Materials and Applications"},{"key":"ref28","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6528\/aa5ddd"},{"key":"ref29","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6528\/aae3df"},{"key":"ref30","doi-asserted-by":"publisher","DOI":"10.1063\/5.0154994"},{"key":"ref31","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2018.01.022"},{"key":"ref32","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2009.373"},{"key":"ref33","doi-asserted-by":"publisher","DOI":"10.1142\/9781848164147"},{"key":"ref34","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevResearch.5.033025"},{"key":"ref35","doi-asserted-by":"publisher","DOI":"10.1016\/j.mne.2022.100114"},{"key":"ref36","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms15301"},{"key":"ref37","doi-asserted-by":"publisher","DOI":"10.1149\/10404.0033ecst"},{"key":"ref38","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2014.2377774"},{"journal-title":"Springer Nature","article-title":"Active Probe Atomic Force Microscopy","author":"Xia","key":"ref39"},{"issue":"4497","key":"ref40","article-title":"Programmable quantum emitter formation in silicon","volume":"15","author":"Jhuria","year":"2024","journal-title":"Nat Commun"},{"key":"ref41","doi-asserted-by":"publisher","DOI":"10.1021\/nl0506103"},{"issue":"3323","key":"ref42","article-title":"Coherent control of a donor-molecule electron spin qubit in silicon","volume":"12","author":"Fricke","year":"2021","journal-title":"Nat Commun"},{"key":"ref43","doi-asserted-by":"publisher","DOI":"10.1116\/1.1622935"}],"event":{"name":"2024 31st International Conference on Mixed Design of Integrated Circuits and System (MIXDES)","start":{"date-parts":[[2024,6,27]]},"location":"Gdansk, Poland","end":{"date-parts":[[2024,6,28]]}},"container-title":["2024 31st International Conference on Mixed Design of Integrated Circuits and System (MIXDES)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx8\/10613861\/10613931\/10614012.pdf?arnumber=10614012","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,3]],"date-time":"2024-08-03T04:50:52Z","timestamp":1722660652000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10614012\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,27]]},"references-count":42,"URL":"https:\/\/doi.org\/10.23919\/mixdes62605.2024.10614012","relation":{},"subject":[],"published":{"date-parts":[[2024,6,27]]}}}