{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,3]],"date-time":"2025-06-03T15:17:36Z","timestamp":1748963856221},"reference-count":4,"publisher":"IEEE","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019,7]]},"DOI":"10.23919\/ps.2019.8818059","type":"proceedings-article","created":{"date-parts":[[2019,8,29]],"date-time":"2019-08-29T21:36:12Z","timestamp":1567114572000},"page":"1-3","source":"Crossref","is-referenced-by-count":1,"title":["A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss"],"prefix":"10.23919","author":[{"given":"Ph.","family":"Helin","sequence":"first","affiliation":[]},{"given":"A.","family":"Firrincieli","sequence":"additional","affiliation":[]},{"given":"A. Ray","family":"Chaudhuri","sequence":"additional","affiliation":[]},{"given":"N.","family":"Pham","sequence":"additional","affiliation":[]},{"given":"S.","family":"Lenci","sequence":"additional","affiliation":[]},{"given":"M.","family":"Mannarino","sequence":"additional","affiliation":[]},{"given":"H.","family":"Osman","sequence":"additional","affiliation":[]}],"member":"263","reference":[{"key":"ref4","doi-asserted-by":"publisher","DOI":"10.1364\/CLEO.2009.CTuC6"},{"key":"ref3","doi-asserted-by":"publisher","DOI":"10.1364\/OE.25.030862"},{"key":"ref2","doi-asserted-by":"publisher","DOI":"10.1364\/AO.26.002621"},{"key":"ref1","doi-asserted-by":"publisher","DOI":"10.1364\/OE.19.003163"}],"event":{"name":"2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)","start":{"date-parts":[[2019,7,7]]},"location":"Fukuoka, Japan","end":{"date-parts":[[2019,7,11]]}},"container-title":["2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/8804302\/8817623\/08818059.pdf?arnumber=8818059","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,6,10]],"date-time":"2020-06-10T17:14:43Z","timestamp":1591809283000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/8818059\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019,7]]},"references-count":4,"URL":"https:\/\/doi.org\/10.23919\/ps.2019.8818059","relation":{},"subject":[],"published":{"date-parts":[[2019,7]]}}}