{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,4]],"date-time":"2026-07-04T16:48:35Z","timestamp":1783183715558,"version":"3.54.6"},"reference-count":21,"publisher":"IEEE","license":[{"start":{"date-parts":[[2023,6,11]],"date-time":"2023-06-11T00:00:00Z","timestamp":1686441600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2023,6,11]],"date-time":"2023-06-11T00:00:00Z","timestamp":1686441600000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2023,6,11]]},"DOI":"10.23919\/vlsitechnologyandcir57934.2023.10185331","type":"proceedings-article","created":{"date-parts":[[2023,7,24]],"date-time":"2023-07-24T17:36:33Z","timestamp":1690220193000},"page":"1-2","source":"Crossref","is-referenced-by-count":16,"title":["Ultrathin Atomic-Layer-Deposited In<sub>2<\/sub>O<sub>3<\/sub> Radio-Frequency Transistors with Record High f<sub>T<\/sub> of 36 GHz and BEOL Compatibility"],"prefix":"10.23919","author":[{"given":"Dongqi","family":"Zheng","sequence":"first","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Adam","family":"Charnas","sequence":"additional","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jian-Yu","family":"Lin","sequence":"additional","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jackson","family":"Anderson","sequence":"additional","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dana","family":"Weinstein","sequence":"additional","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Peide D.","family":"Ye","sequence":"additional","affiliation":[{"name":"Purdue University,Elmore Family School of Electrical and Computer Engineering,West Lafayette,IN,USA,47907"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"263","reference":[{"key":"ref13","doi-asserted-by":"crossref","first-page":"23","DOI":"10.1149\/1.2783853","author":"wang","year":"2007","journal-title":"ECS Trans"},{"key":"ref12","author":"liao","year":"2022","journal-title":"VLSI T5-2"},{"key":"ref15","doi-asserted-by":"crossref","first-page":"1377","DOI":"10.1109\/TED.2018.2807621","author":"wang","year":"2018","journal-title":"IEEE TED"},{"key":"ref14","doi-asserted-by":"crossref","first-page":"15007","DOI":"10.1088\/2058-8585\/ab639f","author":"m\u00fcnzenrieder","year":"2020","journal-title":"Flex Print Elect"},{"key":"ref20","first-page":"8.2.1","author":"wang","year":"2019","journal-title":"IEDM"},{"key":"ref11","doi-asserted-by":"crossref","first-page":"532","DOI":"10.1109\/TED.2022.3231226","author":"charnas","year":"2023","journal-title":"IEEE TED"},{"key":"ref10","doi-asserted-by":"crossref","first-page":"946","DOI":"10.1109\/LED.2009.2025672","author":"bayraktaroglu","year":"2009","journal-title":"IEEE EDL"},{"key":"ref21","first-page":"1","author":"mehlman","year":"2017","journal-title":"DRC"},{"key":"ref2","first-page":"40.5.1","author":"li","year":"2020","journal-title":"IEDM"},{"key":"ref1","doi-asserted-by":"crossref","first-page":"164","DOI":"10.1038\/s41928-022-00718-w","author":"si","year":"2022","journal-title":"Nat Electron"},{"key":"ref17","doi-asserted-by":"crossref","first-page":"1786","DOI":"10.1109\/LED.2020.3029956","author":"t\u00fcckmantel","year":"2020","journal-title":"IEEE EDL"},{"key":"ref16","doi-asserted-by":"crossref","first-page":"2815","DOI":"10.1109\/TED.2013.2274575","author":"m\u00fcnzenrieder","year":"2013","journal-title":"IEEE TED"},{"key":"ref19","doi-asserted-by":"crossref","first-page":"1091","DOI":"10.1038\/s41563-019-0455-8","author":"li","year":"2019","journal-title":"Nat Mater"},{"key":"ref18","doi-asserted-by":"crossref","first-page":"122","DOI":"10.1016\/j.sse.2014.10.007","author":"su","year":"2015","journal-title":"Solid-State Elect"},{"key":"ref8","author":"si","year":"2021","journal-title":"VLSI TF 2-4"},{"key":"ref7","doi-asserted-by":"crossref","first-page":"1905","DOI":"10.1109\/LED.2022.3210005","author":"zhang","year":"2022","journal-title":"IEEE EDL"},{"key":"ref9","first-page":"294","author":"wang","year":"2022","journal-title":"VLSI"},{"key":"ref4","first-page":"4.3.1","author":"zheng","year":"2022","journal-title":"IEDM"},{"key":"ref3","doi-asserted-by":"crossref","first-page":"5336","DOI":"10.1109\/TED.2020.3034063","author":"chakraborty","year":"2020","journal-title":"IEEE TED"},{"key":"ref6","first-page":"21536","author":"lin","year":"2020","journal-title":"ACS Nano"},{"key":"ref5","first-page":"500","author":"si","year":"2022","journal-title":"Nano Lett"}],"event":{"name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","location":"Kyoto, Japan","start":{"date-parts":[[2023,6,11]]},"end":{"date-parts":[[2023,6,16]]}},"container-title":["2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)"],"original-title":[],"link":[{"URL":"http:\/\/xplorestaging.ieee.org\/ielx7\/10185199\/10185158\/10185331.pdf?arnumber=10185331","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,7,24]],"date-time":"2023-07-24T21:53:42Z","timestamp":1690235622000},"score":1,"resource":{"primary":{"URL":"https:\/\/ieeexplore.ieee.org\/document\/10185331\/"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,6,11]]},"references-count":21,"URL":"https:\/\/doi.org\/10.23919\/vlsitechnologyandcir57934.2023.10185331","relation":{},"subject":[],"published":{"date-parts":[[2023,6,11]]}}}