{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T01:54:32Z","timestamp":1760234072202,"version":"build-2065373602"},"reference-count":30,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2021,3,9]],"date-time":"2021-03-09T00:00:00Z","timestamp":1615248000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100009629","name":"Fondazione Cassa Di Risparmio Di Trento E Rovereto","doi-asserted-by":"publisher","award":["2018.0281"],"award-info":[{"award-number":["2018.0281"]}],"id":[{"id":"10.13039\/501100009629","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Data"],"abstract":"<jats:p>Over the last few years, employment of the standard silicon microfabrication techniques for the gas sensor technology has allowed for the development of ever-small, low-cost, and low-power consumption devices. Specifically, the development of silicon microheaters (MHs) has become well established to produce MOS gas sensors. Therefore, the development of predictive models that help to define a priori the optimal design and layout of the device have become crucial, in order to achieve both low power consumption and high mechanical stability. In this research dataset, we present the experimental data collected to develop a specific and useful predictive thermal-mechanical model for high performing silicon MHs. To this aim, three MH layouts over three different membrane sizes were developed by using the standard silicon microfabrication process. Thermal and mechanical performances of the produced devices were experimentally evaluated, by using probe stations and mechanical failure analysis, respectively. The measured thermal curves were used to develop the predictive thermal model towards low power consumption. Moreover, a statistical analysis was finally introduced to cross-correlate the mechanical failure results and the thermal predictive model, aiming at MH design optimization for gas sensing applications. All the data collected in this investigation are shown.<\/jats:p>","DOI":"10.3390\/data6030030","type":"journal-article","created":{"date-parts":[[2021,3,9]],"date-time":"2021-03-09T12:08:01Z","timestamp":1615291681000},"page":"30","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Dataset of the Optimization of a Low Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis"],"prefix":"10.3390","volume":"6","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6688-6161","authenticated-orcid":false,"given":"Andrea","family":"Gaiardo","sequence":"first","affiliation":[{"name":"MNF\u2014Micro Nano Facility, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4166-0676","authenticated-orcid":false,"given":"David","family":"Novel","sequence":"additional","affiliation":[{"name":"MNF\u2014Micro Nano Facility, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0071-3484","authenticated-orcid":false,"given":"Elia","family":"Scattolo","sequence":"additional","affiliation":[{"name":"MNF\u2014Micro Nano Facility, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"},{"name":"Faculty of Science and Technology, Free University of Bolzano-Bozen, 39100 Bolzano, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alessio","family":"Bucciarelli","sequence":"additional","affiliation":[{"name":"MST\u2014The MicroSystems Technology Research Unit, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6732-3654","authenticated-orcid":false,"given":"Pierluigi","family":"Bellutti","sequence":"additional","affiliation":[{"name":"MNF\u2014Micro Nano Facility, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7397-1946","authenticated-orcid":false,"given":"Giancarlo","family":"Pepponi","sequence":"additional","affiliation":[{"name":"MNF\u2014Micro Nano Facility, Sensors &amp; Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2021,3,9]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"127227","DOI":"10.1016\/j.snb.2019.127227","article-title":"Correlation of gaseous emissions to water stress in tomato and maize crops: From field to laboratory and back","volume":"303","author":"Fabbri","year":"2020","journal-title":"Sens. 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