{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T01:18:35Z","timestamp":1774315115623,"version":"3.50.1"},"reference-count":40,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2019,2,4]],"date-time":"2019-02-04T00:00:00Z","timestamp":1549238400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51801128, 51701125"],"award-info":[{"award-number":["51801128, 51701125"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100010226","name":"Department of Education of Guangdong Province","doi-asserted-by":"publisher","award":["2017KQNCX175"],"award-info":[{"award-number":["2017KQNCX175"]}],"id":[{"id":"10.13039\/501100010226","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100009019","name":"Shenzhen University","doi-asserted-by":"publisher","award":["2017069, 201553, 827-000180, JG2018090"],"award-info":[{"award-number":["2017069, 201553, 827-000180, JG2018090"]}],"id":[{"id":"10.13039\/501100009019","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100010877","name":"Shenzhen Science and Technology Innovation Commission","doi-asserted-by":"publisher","award":["JCYJ20170302142339007, JCYJ20170413141157573"],"award-info":[{"award-number":["JCYJ20170302142339007, JCYJ20170413141157573"]}],"id":[{"id":"10.13039\/501100010877","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Entropy"],"abstract":"<jats:p>Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al0.3CoCrFeNi HEATFs with a thickness of ~4 \u03bcm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.<\/jats:p>","DOI":"10.3390\/e21020146","type":"journal-article","created":{"date-parts":[[2019,2,5]],"date-time":"2019-02-05T11:31:07Z","timestamp":1549366267000},"page":"146","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":44,"title":["High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4342-4332","authenticated-orcid":false,"given":"Wei-Bing","family":"Liao","sequence":"first","affiliation":[{"name":"College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4051-2655","authenticated-orcid":false,"given":"Hongti","family":"Zhang","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, China"},{"name":"School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China"}]},{"given":"Zhi-Yuan","family":"Liu","sequence":"additional","affiliation":[{"name":"College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Pei-Feng","family":"Li","sequence":"additional","affiliation":[{"name":"College of Materials Science and Engineering, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Jian-Jun","family":"Huang","sequence":"additional","affiliation":[{"name":"College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China"}]},{"given":"Chun-Yan","family":"Yu","sequence":"additional","affiliation":[{"name":"College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9280-2718","authenticated-orcid":false,"given":"Yang","family":"Lu","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, China"},{"name":"Nano-Manufacturing Laboratory (NML), City University of Hong Kong Shenzhen Research Institute, Shenzhen 518057, China"}]}],"member":"1968","published-online":{"date-parts":[[2019,2,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"299","DOI":"10.1002\/adem.200300567","article-title":"Nanostructured high-entropy alloys with multiple principal elements: Novel alloy design concepts and outcomes","volume":"6","author":"Yeh","year":"2004","journal-title":"Adv. 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