{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,6]],"date-time":"2026-06-06T08:03:39Z","timestamp":1780733019534,"version":"3.54.1"},"reference-count":58,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2023,7,19]],"date-time":"2023-07-19T00:00:00Z","timestamp":1689724800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"internal resources of the INFN tHEEOM-RD experiment"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Entropy"],"abstract":"<jats:p>In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a Fabry\u2013Perot cavity for electromagnetic cooling of the LC circuit in a dilution refrigerator exploiting the opto-electro-mechanical interaction. To this aim, an optically measured steady-state frequency shift of 380 Hz was seen with a polarization voltage of 30 V and a Q-factor of the assembled device above 106 at room temperature. The rf-sputtered titanium nitride layer can be made superconductive to develop efficient quantum transducers.<\/jats:p>","DOI":"10.3390\/e25071087","type":"journal-article","created":{"date-parts":[[2023,7,19]],"date-time":"2023-07-19T21:20:14Z","timestamp":1689801614000},"page":"1087","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications"],"prefix":"10.3390","volume":"25","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7996-3544","authenticated-orcid":false,"given":"Michele","family":"Bonaldi","sequence":"first","affiliation":[{"name":"Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, TN, Italy"},{"name":"Istituto Nazionale di Fisica Nucleare, TIFPA, 38123 Povo, TN, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7989-7724","authenticated-orcid":false,"given":"Antonio","family":"Borrielli","sequence":"additional","affiliation":[{"name":"Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo, TN, Italy"},{"name":"Istituto Nazionale di Fisica Nucleare, TIFPA, 38123 Povo, TN, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6880-3139","authenticated-orcid":false,"given":"Giovanni","family":"Di Giuseppe","sequence":"additional","affiliation":[{"name":"Physics Division, School of Science and Technology, University of Camerino, 62032 Camerino, MC, Italy"},{"name":"INFN, Sezione di Perugia, 06123 Perugia, PG, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5729-3399","authenticated-orcid":false,"given":"Nicola","family":"Malossi","sequence":"additional","affiliation":[{"name":"Physics Division, School of Science and Technology, University of Camerino, 62032 Camerino, MC, Italy"},{"name":"INFN, Sezione di Perugia, 06123 Perugia, PG, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8052-5848","authenticated-orcid":false,"given":"Bruno","family":"Morana","sequence":"additional","affiliation":[{"name":"Department of Microelectronics and Computer Engineering, ECTM, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9348-6895","authenticated-orcid":false,"given":"Riccardo","family":"Natali","sequence":"additional","affiliation":[{"name":"Physics Division, School of Science and Technology, University of Camerino, 62032 Camerino, MC, Italy"},{"name":"INFN, Sezione di Perugia, 06123 Perugia, PG, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2125-4766","authenticated-orcid":false,"given":"Paolo","family":"Piergentili","sequence":"additional","affiliation":[{"name":"Physics Division, School of Science and Technology, University of Camerino, 62032 Camerino, MC, Italy"},{"name":"INFN, Sezione di Perugia, 06123 Perugia, PG, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2766-0880","authenticated-orcid":false,"given":"Pasqualina Maria","family":"Sarro","sequence":"additional","affiliation":[{"name":"Department of Microelectronics and Computer Engineering, ECTM, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5120-4092","authenticated-orcid":false,"given":"Enrico","family":"Serra","sequence":"additional","affiliation":[{"name":"Istituto Nazionale di Fisica Nucleare, TIFPA, 38123 Povo, TN, Italy"},{"name":"Department of Microelectronics and Computer Engineering, ECTM, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1409-7136","authenticated-orcid":false,"given":"David","family":"Vitali","sequence":"additional","affiliation":[{"name":"Physics Division, School of Science and Technology, University of Camerino, 62032 Camerino, MC, Italy"},{"name":"INFN, Sezione di Perugia, 06123 Perugia, PG, Italy"},{"name":"CNR-INO, L.go Enrico Fermi 6, 50125 Firenze, FI, Italy"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2023,7,19]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"150503","DOI":"10.1063\/5.0021088","article-title":"A perspective on hybrid quantum opto- and electromechanical systems","volume":"117","author":"Chu","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"020501","DOI":"10.1088\/2058-9565\/ab788a","article-title":"Perspectives on quantum transduction","volume":"5","author":"Lauk","year":"2020","journal-title":"Quantum Sci. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1023","DOI":"10.1038\/nature07127","article-title":"The quantum Internet","volume":"453","author":"Kimble","year":"2008","journal-title":"Nature"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"724","DOI":"10.1038\/s41566-018-0301-6","article-title":"Advances in photonic quantum sensing","volume":"12","author":"Pirandola","year":"2018","journal-title":"Nat. Photon."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"81","DOI":"10.1038\/nature13029","article-title":"Optical detection of radio waves through a nanomechanical transducer","volume":"507","author":"Bagci","year":"2014","journal-title":"Nature"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"152","DOI":"10.1364\/OPTICA.5.000152","article-title":"Electro-mechano-optical detection of nuclear magnetic resonance","volume":"5","author":"Takeda","year":"2018","journal-title":"Optica"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"034031","DOI":"10.1103\/PhysRevApplied.9.034031","article-title":"Sensitivity-Bandwidth Limit in a Multimode Optoelectromechanical Transducer","volume":"9","author":"Malossi","year":"2018","journal-title":"Phys. Rev. Appl."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"18561","DOI":"10.1364\/OE.27.018561","article-title":"Sensitive optomechanical transduction of electric and magnetic signals to the optical domain","volume":"27","author":"Simonsen","year":"2019","journal-title":"Opt. Express"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"18173","DOI":"10.1038\/s41598-019-54200-3","article-title":"Magnetic resonance imaging with optical preamplication and detection","volume":"9","author":"Simonsen","year":"2019","journal-title":"Sci. Rep."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"153603","DOI":"10.1103\/PhysRevLett.108.153603","article-title":"Using Interference for High Fidelity Quantum State Transfer in Optomechanics","volume":"108","author":"Wang","year":"2012","journal-title":"Phys. Rev. Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"153604","DOI":"10.1103\/PhysRevLett.108.153604","article-title":"Adiabatic State Conversion and Pulse Transmission in Optomechanical Systems","volume":"108","author":"Tian","year":"2012","journal-title":"Phys. Rev. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"130503","DOI":"10.1103\/PhysRevLett.109.130503","article-title":"Reversible Optical-to-Microwave Quantum Interface","volume":"109","author":"Barzanjeh","year":"2012","journal-title":"Phys. Rev. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1196","DOI":"10.1038\/ncomms2201","article-title":"Coherent optical wavelength conversion via cavity optomechanics","volume":"3","author":"Hill","year":"2010","journal-title":"Nat. Commun."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1038\/nphys2911","article-title":"Bidirectional and efficient conversion between microwave and optical light","volume":"10","author":"Andrews","year":"2014","journal-title":"Nat. Phys."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"1038","DOI":"10.1038\/s41567-018-0210-0","article-title":"Harnessing electro-optic correlations in an efficient mechanical converter","volume":"14","author":"Higginbotham","year":"2018","journal-title":"Nat. Phys."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"033516","DOI":"10.1103\/PhysRevA.103.033516","article-title":"Sympathetic cooling of a radio-frequency LC circuit to its ground state in an optoelectromechanical system","volume":"103","author":"Malossi","year":"2021","journal-title":"Phys. Rev. A"},{"key":"ref_17","first-page":"021062","article-title":"Optomechanical ground-state cooling in a continuous and efficient electro-optic transducer","volume":"12","author":"Brubaker","year":"2022","journal-title":"Phys. Rev. X"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"020302","DOI":"10.1103\/PhysRevA.85.020302","article-title":"Atomic interface between microwave and optical photons","volume":"85","author":"Hafezi","year":"2012","journal-title":"Phys. Rev. A"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"073033","DOI":"10.1088\/1367-2630\/ab307c","article-title":"Microwave to optical conversion with atoms on a superconducting chip","volume":"21","author":"Petrosyan","year":"2019","journal-title":"New J. Phys."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1038\/s41566-022-00959-3","article-title":"High-efficiency coherent microwave-to-optics conversion via off-resonant scattering","volume":"16","author":"Tu","year":"2022","journal-title":"Nat. Photon."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"614","DOI":"10.1038\/s41586-023-05740-2","article-title":"Quantum-enabled millimetre wave to optical transduction using neutral atoms","volume":"615","author":"Kumar","year":"2023","journal-title":"Nature"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"063837","DOI":"10.1103\/PhysRevA.81.063837","article-title":"Cavity quantum electro-optics","volume":"81","author":"Tsang","year":"2010","journal-title":"Phys. Rev. A"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"108","DOI":"10.1038\/s41534-019-0220-5","article-title":"Electro-optic entanglement source for microwave to telecom quantum state transfer","volume":"5","author":"Rueda","year":"2019","journal-title":"Npj Quantum Inf."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1737","DOI":"10.1364\/OPTICA.397235","article-title":"Cryogenic microwave-to-optical conversion using a triply resonant lithium-niobate-on-sapphire transducer","volume":"7","author":"McKenna","year":"2020","journal-title":"Optica"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"020315","DOI":"10.1103\/PRXQuantum.1.020315","article-title":"Bidirectional Electro-Optic Wavelength Conversion in the Quantum Ground State","volume":"1","author":"Hease","year":"2020","journal-title":"PRX Quantum"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1276","DOI":"10.1038\/s41467-022-28924-2","article-title":"Quantum-enabled operation of a microwave-optical interface","volume":"13","author":"Sahu","year":"2022","journal-title":"Nat. Commun."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"718","DOI":"10.1126\/science.adg3812","article-title":"Entangling microwaves with light","volume":"380","author":"Sahu","year":"2023","journal-title":"Science"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"174427","DOI":"10.1103\/PhysRevB.93.174427","article-title":"Bidirectional conversion between microwave and light via ferromagnetic magnons","volume":"93","author":"Hisatomi","year":"2016","journal-title":"Phys. Rev. B"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"033107","DOI":"10.1063\/1.4955408","article-title":"Bi-directional conversion between microwave and optical frequencies in a piezoelectric optomechanical device","volume":"109","author":"Vainsencher","year":"2016","journal-title":"Appl. Phys. Lett."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"346","DOI":"10.1038\/nphoton.2016.46","article-title":"Coherent coupling between radiofrequency, optical and acoustic waves in piezo-optomechanical circuits","volume":"10","author":"Balram","year":"2016","journal-title":"Nat. Photon."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"577","DOI":"10.1364\/OPTICA.6.000577","article-title":"Optomechanics with one-dimensional gallium phosphide photonic crystal cavities","volume":"6","author":"Schneider","year":"2019","journal-title":"Optica"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"6583","DOI":"10.1038\/s41467-022-34338-x","article-title":"Ultra-low-noise Microwave to Optics Conversion in Gallium Phosphide","volume":"13","author":"Stockill","year":"2022","journal-title":"Nat. Commun."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"845","DOI":"10.1364\/OPTICA.6.000845","article-title":"Lithium niobate piezo-optomechanical crystals","volume":"6","author":"Jiang","year":"2019","journal-title":"Optica"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"1498","DOI":"10.1364\/OPTICA.6.001498","article-title":"Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators","volume":"6","author":"Shao","year":"2019","journal-title":"Optica"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"1166","DOI":"10.1038\/s41467-020-14863-3","article-title":"Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency","volume":"11","author":"Jiang","year":"2020","journal-title":"Nat. Commun."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"3237","DOI":"10.1038\/s41467-020-17053-3","article-title":"Cavity piezo-mechanics for superconducting-nanophotonic quantum interface","volume":"11","author":"Han","year":"2020","journal-title":"Nat. Commun."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1038\/s41567-019-0673-7","article-title":"Microwave-to-optics conversion using a mechanical oscillator in its quantum ground state","volume":"16","author":"Forsch","year":"2020","journal-title":"Nat. Phys."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"599","DOI":"10.1038\/s41586-020-3038-6","article-title":"Superconducting qubit to optical photon transduction","volume":"588","author":"Mirhosseini","year":"2020","journal-title":"Nature"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"010511","DOI":"10.1103\/PhysRevLett.124.010511","article-title":"Proposal for Heralded Generation and Detection of Entangled Microwave\u2013Optical-Photon Pairs","volume":"124","author":"Zhong","year":"2020","journal-title":"Phys. Rev. Lett."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"083024","DOI":"10.1088\/1367-2630\/aad85f","article-title":"Two-membrane cavity optomechanics","volume":"20","author":"Piergentili","year":"2018","journal-title":"New J. Phys."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"073013","DOI":"10.1088\/1367-2630\/abdd6a","article-title":"Two\u2013membrane cavity optomechanics: Non\u2013linear dynamics","volume":"7","author":"Piergentili","year":"2021","journal-title":"New J. Phys."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"034012","DOI":"10.1103\/PhysRevApplied.15.034012","article-title":"Absolute Determination of the Single-Photon Optomechanical Coupling Rate via a Hopf Bifurcation","volume":"15","author":"Piergentili","year":"2021","journal-title":"Phys. Rev. Appl."},{"key":"ref_43","first-page":"021025","article-title":"Nonreciprocal Photon Transmission and Amplification via Reservoir Engineering","volume":"5","author":"Metelmann","year":"2015","journal-title":"Phys. Rev. X"},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"023827","DOI":"10.1103\/PhysRevA.93.023827","article-title":"Nonreciprocal conversion between microwave and optical photons in electro-optomechanical systems","volume":"93","author":"Xu","year":"2016","journal-title":"Phys. Rev. A"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"604","DOI":"10.1038\/s41467-017-00447-1","article-title":"Nonreciprocal reconfigurable microwave optomechanical circuit","volume":"8","author":"Bernier","year":"2017","journal-title":"Nat. Commun."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"953","DOI":"10.1038\/s41467-017-01304-x","article-title":"Mechanical on-chip microwave circulator","volume":"8","author":"Barzanjeh","year":"2017","journal-title":"Nat. Commun."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"064014","DOI":"10.1103\/PhysRevApplied.7.064014","article-title":"Optical Nonreciprocity Based on Optomechanical Coupling","volume":"7","author":"Miri","year":"2017","journal-title":"Phys. Rev. Appl."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"1797","DOI":"10.1038\/s41467-018-04187-8","article-title":"Reconfigurable optomechanical circulator and directional amplifier","volume":"9","author":"Shen","year":"2018","journal-title":"Nat. Commun."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"1798","DOI":"10.1038\/s41467-018-04202-y","article-title":"Optical circulation in a multimode optomechanical resonator","volume":"9","author":"Ruesink","year":"2018","journal-title":"Nat. Commun."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"023601","DOI":"10.1103\/PhysRevLett.120.023601","article-title":"Quantum-Limited Directional Amplifiers with Optomechanics","volume":"120","author":"Malz","year":"2018","journal-title":"Phys. Rev. Lett."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"023603","DOI":"10.1103\/PhysRevLett.125.023603","article-title":"Nonreciprocal Transport Based on Cavity Floquet Modes in Optomechanics","volume":"125","author":"Malz","year":"2020","journal-title":"Phys. Rev. Lett."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"032606","DOI":"10.1103\/PhysRevA.106.032606","article-title":"Nonreciprocal conversion between radio-frequency and optical photons with an optoelectromechanical system","volume":"106","author":"Zippilli","year":"2022","journal-title":"Phys. Rev. A"},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"034009","DOI":"10.1088\/2058-9565\/ab8962","article-title":"Figures of merit for quantum transducers","volume":"5","author":"Zeuthen","year":"2020","journal-title":"Quantum Sci. Technol."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"121403(R)","DOI":"10.1103\/PhysRevB.94.121403","article-title":"Control of recoil losses in nanomechanical SiN membrane resonators","volume":"94","author":"Borrielli","year":"2016","journal-title":"Phys. Rev. B"},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"064503","DOI":"10.1063\/5.0055954","article-title":"Silicon-nitride nanosensors toward room temperature quantum optomechanics","volume":"130","author":"Serra","year":"2021","journal-title":"J. App. Phys."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"083603","DOI":"10.1103\/PhysRevLett.108.083603","article-title":"Control of Material Damping in High-Q Membrane Microresonators","volume":"108","author":"Yu","year":"2012","journal-title":"Phys. Rev. Lett."},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"764","DOI":"10.1109\/JMEMS.2011.2140357","article-title":"A Microcantilever Platform for Measuring Internal Friction in Thin Films Using Thermoelastic Damping for Calibration","volume":"20","author":"Sosale","year":"2011","journal-title":"J. Microelectromech. Syst."},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"1193","DOI":"10.1109\/JMEMS.2018.2876593","article-title":"Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics","volume":"26","author":"Serra","year":"2018","journal-title":"J. Microelectromech. 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