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Herstellung und Charakterisierung einer mit Ultraschall hei\u00dfgepr\u00e4gten ventillosen Mikropumpe, Studienarbeit; RWTH Aachen University."},{"key":"ref_12","unstructured":"Stemme, E., and Stemme, G. (1993, January 7\u201310). A novel piezoelectric valve-less fluid pump. Yokohama, Japan."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Burlage, K., Gerhardy, C., and Schomburg, W.K. (2010, January 25\u201327). PVDF micro heat exchanger manufactured by ultrasonic hot embossing and welding. Enschede, The Netherlands.","DOI":"10.1007\/978-94-007-2721-2_11"},{"key":"ref_14","unstructured":"Lomas, C.G. (1986). Fundamentals of Hot Wire Anemometry, Cambridge University Press."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Elwenspoek, M., and Wiegerink, R. (2001). Mechanical Microsensors, Springer-Verlag.","DOI":"10.1007\/978-3-662-04321-9"},{"key":"ref_16","unstructured":"Nguyen, N.-T., and Wereley, S.T. (2002). 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