{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T15:22:47Z","timestamp":1760368967880,"version":"build-2065373602"},"reference-count":13,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2011,5,23]],"date-time":"2011-05-23T00:00:00Z","timestamp":1306108800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at \u22123 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.<\/jats:p>","DOI":"10.3390\/mi2020167","type":"journal-article","created":{"date-parts":[[2011,5,23]],"date-time":"2011-05-23T09:52:28Z","timestamp":1306144348000},"page":"167-178","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer"],"prefix":"10.3390","volume":"2","author":[{"given":"Alexandra","family":"Garraud","sequence":"first","affiliation":[{"name":"IES UMR CNRS 5214, Universit\u00e9 de Montpellier 2, Place Eug\u00e8ne Bataillon 34095 Montpellier, France"}]},{"given":"Philippe","family":"Combette","sequence":"additional","affiliation":[{"name":"IES UMR CNRS 5214, Universit\u00e9 de Montpellier 2, Place Eug\u00e8ne Bataillon 34095 Montpellier, France"}]},{"given":"Johann","family":"Courteaud","sequence":"additional","affiliation":[{"name":"IES UMR CNRS 5214, Universit\u00e9 de Montpellier 2, Place Eug\u00e8ne Bataillon 34095 Montpellier, France"}]},{"given":"Alain","family":"Giani","sequence":"additional","affiliation":[{"name":"IES UMR CNRS 5214, Universit\u00e9 de Montpellier 2, Place Eug\u00e8ne Bataillon 34095 Montpellier, France"}]}],"member":"1968","published-online":{"date-parts":[[2011,5,23]]},"reference":[{"key":"ref_1","unstructured":"Fraden, J. (1997). Handbook of Modern Sensors: Physics, Designs, and Applications, American Institute of Physics."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"201","DOI":"10.1016\/0924-4247(94)00890-T","article-title":"Silicon accelerometer based on thermopiles","volume":"46","author":"Hiratsuka","year":"1995","journal-title":"Sens. Actuat. A"},{"key":"ref_3","unstructured":"Leung, A.M., Jones, J., Czyzewska, E., Chen, J., and Pascal, M. (1997, January 10). Micromachined accelerometer with no proof mass. Washington, DC, USA."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"508","DOI":"10.1063\/1.125803","article-title":"Micromachined convective accelerometers in standard integrated circuits technology","volume":"76","author":"Bowen","year":"2000","journal-title":"Appl. Phys. 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Manuel De Thermique: Th\u00e9orie Et Pratique, Hermes Sciences Publicat. [2nd ed.]."},{"key":"ref_12","unstructured":"Thermophysical Properties of Fluid Systems. Available online: http:\/\/webbook.nist.gov\/chemistry\/fluid (accessed on 11 May 2011)."},{"key":"ref_13","first-page":"507","article-title":"Natural convection between horizontal heated concentric circular cylinders","volume":"24","author":"Hodnett","year":"1973","journal-title":"J. Appl. Math. Phys."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/2\/2\/167\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:56:10Z","timestamp":1760219770000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/2\/2\/167"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011,5,23]]},"references-count":13,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2011,6]]}},"alternative-id":["mi2020167"],"URL":"https:\/\/doi.org\/10.3390\/mi2020167","relation":{},"ISSN":["2072-666X"],"issn-type":[{"type":"electronic","value":"2072-666X"}],"subject":[],"published":{"date-parts":[[2011,5,23]]}}}