{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:32:15Z","timestamp":1760243535470,"version":"build-2065373602"},"reference-count":44,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2012,2,15]],"date-time":"2012-02-15T00:00:00Z","timestamp":1329264000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 \u03bcm and 12 \u03bcm in fluorescent detection and counting tests using 2.5 and 6 \u03bcm beads-show CVs of 9%\u201313% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%\u201315%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.<\/jats:p>","DOI":"10.3390\/mi3010062","type":"journal-article","created":{"date-parts":[[2012,2,15]],"date-time":"2012-02-15T12:03:12Z","timestamp":1329307392000},"page":"62-77","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":16,"title":["Fabrication and Performance of a Photonic-Microfluidic Integrated Device"],"prefix":"10.3390","volume":"3","author":[{"given":"Benjamin R.","family":"Watts","sequence":"first","affiliation":[{"name":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Thomas","family":"Kowpak","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhiyi","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Microstructural Science, National Research Council of Canada, 1200 Montreal Road, Ottawa, ON K1A 0R6, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chang-Qing","family":"Xu","sequence":"additional","affiliation":[{"name":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shiping","family":"Zhu","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xudong","family":"Cao","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biological Engineering, University of Ottawa, 550 Cumberland Street, Ottawa, ON K1N 6N5, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Min","family":"Lin","sequence":"additional","affiliation":[{"name":"Ottawa Laboratory Fallowfield, Canadian Food Inspection Agency, 3851 Fallowfield Road, Ottawa, ON K2H 8P9, Canada"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2012,2,15]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"368","DOI":"10.1038\/nature05058","article-title":"The origins and future of microfluidics","volume":"442","author":"Whitesides","year":"2006","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1767","DOI":"10.1039\/b710504e","article-title":"An integrated optics microfluidic device for detecting single DNA molecules","volume":"7","author":"Krogmeier","year":"2007","journal-title":"Lab Chip"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"977","DOI":"10.1103\/RevModPhys.77.977","article-title":"Microfluidics: Fluid physics at the nanoliter scale","volume":"77","author":"Squires","year":"2005","journal-title":"Rev. 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