{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:11:00Z","timestamp":1760220660592,"version":"build-2065373602"},"reference-count":11,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2012,4,26]],"date-time":"2012-04-26T00:00:00Z","timestamp":1335398400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>A time of flight sensor has been equipped with a sensing wire parallel to the flow direction (flow parallel wire, FPW). A heat pulse is generated with a coil in the flow channel. The FPW has a center tap allowing its upstream and downstream parts to join in a half bridge. When a heat pulse passes the FPW, a large output peak is generated. The time between heat pulse generation and recording the peak maximum is only marginally affected by the properties of the fluid. With a combination of two FPWs, a measuring range of approximately 0.01\u20130.5 m\/s can be achieved.<\/jats:p>","DOI":"10.3390\/mi3020325","type":"journal-article","created":{"date-parts":[[2012,4,26]],"date-time":"2012-04-26T11:04:10Z","timestamp":1335438250000},"page":"325-330","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Time of Flight Sensor with a Flow Parallel Wire"],"prefix":"10.3390","volume":"3","author":[{"given":"Christof","family":"Gerhardy","sequence":"first","affiliation":[{"name":"RWTH Aachen University, Konstruktion und Entwicklung von Mikrosystemen (KEmikro), Steinbachstra\u00dfe 53 B, Aachen 52074, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Werner Karl","family":"Schomburg","sequence":"additional","affiliation":[{"name":"RWTH Aachen University, Konstruktion und Entwicklung von Mikrosystemen (KEmikro), Steinbachstra\u00dfe 53 B, Aachen 52074, Germany"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2012,4,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Schomburg, W.K. (2011). Introduction to Microsystem Design, Springer. [1st].","DOI":"10.1007\/978-3-642-19489-4"},{"key":"ref_2","unstructured":"Enoksson, P., Stemme, G., and Stemme, E. (1996, January 11\u201315). A Coriolis mass flow sensor structure in silicon. Proceedings of the 9th International Workshop on Micro Electromechanical Systems, San Diego, CA, USA."},{"key":"ref_3","unstructured":"Sparks, D., Smith, R., Cripe, J., Schneider, R., and Najafi, N. (2003, January 22\u201324). A portable MEMS Coriolis mass flow sensor. Proceedings of the IEEE Sensors Conference, Toronto, ON, Canada."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Haneveld, J., Lammerink, T.S.J., de Boer, M.J., and Wiegerink, R.J. (2009, January 25\u201329). Micro Coriolis mass flow sensor with integrated capacitive readout. 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A: Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"132","DOI":"10.1016\/j.proche.2009.07.033","article-title":"Micromachined flow sensors enabling electrocalorimetric and TOF transduction","volume":"1","author":"Kohl","year":"2009","journal-title":"Procedia Chem."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., and Lang, W. (1998, January 25\u201329). Thermal flow sensor for liquids and gases. Proceedings of the 11th International Workshop on Micro Electromechanical Systems, Heidelberg, Germany.","DOI":"10.1115\/IMECE1998-1280"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Gerhardy, C., and Schomburg, W.K. (2011, January 4\u20137). Flow parallel wire\u2014Flow sensor insensitive to fluid properties. Proceedings of the Eurosensors XXV, Athens, Greece.","DOI":"10.1016\/j.proeng.2011.12.293"},{"key":"ref_11","unstructured":"Di, Y., Gerhardy, C., and Schomburg, W.K. (2011, January 19\u201322). Quick flow sensor insensitive to fluid properties. Proceedings of the 22nd Micro Mechanics Europe Workshop, MME 2011, T\u00f8nsberg, Norway."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/3\/2\/325\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:49:59Z","timestamp":1760219399000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/3\/2\/325"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,4,26]]},"references-count":11,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2012,6]]}},"alternative-id":["mi3020325"],"URL":"https:\/\/doi.org\/10.3390\/mi3020325","relation":{},"ISSN":["2072-666X"],"issn-type":[{"type":"electronic","value":"2072-666X"}],"subject":[],"published":{"date-parts":[[2012,4,26]]}}}