{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,20]],"date-time":"2026-01-20T07:06:37Z","timestamp":1768892797865,"version":"3.49.0"},"reference-count":82,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2012,11,14]],"date-time":"2012-11-14T00:00:00Z","timestamp":1352851200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Despite the advancements made in drug delivery systems over the years, many challenges remain in drug delivery systems for treating chronic diseases at the personalized medicine level. The current urgent need is to develop novel strategies for targeted therapy of chronic diseases. Due to their unique properties, microelectromechanical systems (MEMS) technology has been recently engineered as implantable drug delivery systems for disease therapy. This review examines the challenges faced in implementing implantable MEMS drug delivery systems in vivo and the solutions available to overcome these challenges.<\/jats:p>","DOI":"10.3390\/mi3040615","type":"journal-article","created":{"date-parts":[[2012,11,14]],"date-time":"2012-11-14T11:02:05Z","timestamp":1352890925000},"page":"615-631","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":60,"title":["Approaches and Challenges of Engineering Implantable Microelectromechanical Systems (MEMS) Drug Delivery Systems for in Vitro and in Vivo Applications"],"prefix":"10.3390","volume":"3","author":[{"given":"Danny","family":"Tng","sequence":"first","affiliation":[{"name":"School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore"}]},{"given":"Rui","family":"Hu","sequence":"additional","affiliation":[{"name":"School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore"}]},{"given":"Peiyi","family":"Song","sequence":"additional","affiliation":[{"name":"School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore"}]},{"given":"Indrajit","family":"Roy","sequence":"additional","affiliation":[{"name":"Department of Chemistry, University of Delhi, Delhi 110 007, India"}]},{"given":"Ken-Tye","family":"Yong","sequence":"additional","affiliation":[{"name":"School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore"}]}],"member":"1968","published-online":{"date-parts":[[2012,11,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1109\/JPROC.2003.820534","article-title":"A BioMEMS review: MEMS technology for physiologically integrated devices","volume":"92","author":"Grayson","year":"2004","journal-title":"Proc. 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A"}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/3\/4\/615\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:53:34Z","timestamp":1760219614000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/3\/4\/615"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012,11,14]]},"references-count":82,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2012,12]]}},"alternative-id":["mi3040615"],"URL":"https:\/\/doi.org\/10.3390\/mi3040615","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012,11,14]]}}}