{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,8]],"date-time":"2025-11-08T22:39:22Z","timestamp":1762641562517,"version":"build-2065373602"},"reference-count":25,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2013,6,5]],"date-time":"2013-06-05T00:00:00Z","timestamp":1370390400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper presents a novel method for fabricating nanopillar micropatterns for surface-directed liquid flows. It employs hybrid mask lithography, which uses a mask consisting of a combination of a photoresist and nanoparticles in the photolithography process. The nanopillar density is controlled by varying the weight ratio of nanoparticles in the composite mask. Hybrid mask lithography was used to fabricate a surface-directed liquid flow. The effect of the surface-directed liquid flow, which was formed by the  air-liquid interface due to nanopillar micropatterns, was evaluated, and the results show that the oscillation of microparticles, when the micro-tool was actuated, was dramatically reduced by using a surface-directed liquid flow. Moreover, the target particle was manipulated individually without non-oscillating ambient particles.<\/jats:p>","DOI":"10.3390\/mi4020232","type":"journal-article","created":{"date-parts":[[2013,6,5]],"date-time":"2013-06-05T12:40:57Z","timestamp":1370436057000},"page":"232-242","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow"],"prefix":"10.3390","volume":"4","author":[{"given":"Shinya","family":"Sakuma","sequence":"first","affiliation":[{"name":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"}]},{"given":"Masakuni","family":"Sugita","sequence":"additional","affiliation":[{"name":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2508-1615","authenticated-orcid":false,"given":"Fumihito","family":"Arai","sequence":"additional","affiliation":[{"name":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"}]}],"member":"1968","published-online":{"date-parts":[[2013,6,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"369","DOI":"10.1038\/28615","article-title":"Full-term development of mice fromenucleated oocytes injected with cumulus cell nuclei","volume":"394","author":"Wakayama","year":"1998","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"279","DOI":"10.1109\/TNB.2003.820273","article-title":"Mechanical property characterization of mouse zona pellucida","volume":"2","author":"Sun","year":"2003","journal-title":"IEEE Trans. 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