{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:14:33Z","timestamp":1760220873998,"version":"build-2065373602"},"reference-count":28,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2013,12,5]],"date-time":"2013-12-05T00:00:00Z","timestamp":1386201600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common \u201cpull-in\u201d instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator\u2019s physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 \u03bcm and 0.63 \u03bcm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 \u03bcm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications.<\/jats:p>","DOI":"10.3390\/mi4040431","type":"journal-article","created":{"date-parts":[[2015,12,9]],"date-time":"2015-12-09T15:21:41Z","timestamp":1449674501000},"page":"431-443","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":9,"title":["A Bi-Directional Out-of-Plane Actuator by Electrostatic Force"],"prefix":"10.3390","volume":"4","author":[{"given":"Hao","family":"Ren","sequence":"first","affiliation":[{"name":"School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe,  AZ 85287, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weimin","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics,  Chinese Academy of Sciences, Chengdu 610209, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fenggang","family":"Tao","sequence":"additional","affiliation":[{"name":"State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics,  Chinese Academy of Sciences, Chengdu 610209, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jun","family":"Yao","sequence":"additional","affiliation":[{"name":"State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics,  Chinese Academy of Sciences, Chengdu 610209, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2013,12,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"321","DOI":"10.1016\/S0304-3886(01)00159-0","article-title":"Electrostatic micromirrors for subaperturing in an adaptive optics system","volume":"54","author":"Horenstein","year":"2002","journal-title":"J. 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