{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,14]],"date-time":"2026-07-14T14:44:56Z","timestamp":1784040296394,"version":"3.55.0"},"reference-count":75,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2014,9,22]],"date-time":"2014-09-22T00:00:00Z","timestamp":1411344000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the versatility of the process. The shrinkage of SU-8 during carbonization is then detailed as one of the guidelines necessary to design carbon patterns. A couple of applications\u2014(1) carbon-electrode dielectrophoresis for bioparticle manipulation; and (2) the use of carbon structures as micro-molds are  also presented.<\/jats:p>","DOI":"10.3390\/mi5030766","type":"journal-article","created":{"date-parts":[[2014,9,22]],"date-time":"2014-09-22T10:39:10Z","timestamp":1411382350000},"page":"766-782","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":74,"title":["SU-8 Photolithography as a Toolbox for Carbon MEMS"],"prefix":"10.3390","volume":"5","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8023-1161","authenticated-orcid":false,"given":"Rodrigo","family":"Martinez-Duarte","sequence":"first","affiliation":[{"name":"Mechanical Engineering Department, Clemson University, 250 Fluor Daniel, Clemson, SC 29634, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2014,9,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"175","DOI":"10.1038\/231175a0","article-title":"Structure of glassy carbon","volume":"231","author":"Jenkins","year":"1971","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1023\/A:1013100920130","article-title":"Structure and properties of glass-like carbon","volume":"37","author":"Pesin","year":"2002","journal-title":"J. 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