{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:27:08Z","timestamp":1760243228415,"version":"build-2065373602"},"reference-count":28,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2014,12,4]],"date-time":"2014-12-04T00:00:00Z","timestamp":1417651200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper presents the design and simulation of an improved electro-thermal micromachined pump for drug delivery applications. Thermal actuators, which are a type of Micro Electro Mechanical system (MEMS) device, are highly useful because of their ability to deliver with great force and displacement. Thus, our structure is based on a thermal actuator that exploits the Joule heating effect and has been improved using the springy length properties of MEMS chevron beams. The Joule heating effect results in a difference in temperature and therefore displacement in the beams (actuators). Simulation results show that a maximum force of 4.4 mN and a maximum flow rate of 16 \u03bcL\/min can be obtained by applying an AC voltage as low as 8 V at different frequencies ranging from 1 to 32 Hz. The maximum temperature was a problem at the chevron beams and the center shaft. Thus, to locally increase the temperature of the chevron beams alone and not that of the pumping diaphragm: (1) The air gaps 2 \u03bcm underneath and above the device layer were optimized for heat transfer. (2) Release holes and providing fins were created at the center shaft and actuator, respectively, to decrease the temperature by approximately 10 \u00b0C. (3) We inserted and used a polymer tube to serve as an insulator and eliminate leakage problems in the fluidic channel.<\/jats:p>","DOI":"10.3390\/mi5041323","type":"journal-article","created":{"date-parts":[[2014,12,4]],"date-time":"2014-12-04T11:37:11Z","timestamp":1417693031000},"page":"1323-1341","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Design and Analysis of a High Force, Low Voltage and High Flow Rate Electro-Thermal Micropump"],"prefix":"10.3390","volume":"5","author":[{"given":"Ghader","family":"Yosefi","sequence":"first","affiliation":[{"name":"Department of Electrical Electronics Engineering, Science and Research Branch, Islamic Azad University, Tehran 14778-93855, Iran"}]},{"given":"Sattar","family":"Mirzakuchaki","sequence":"additional","affiliation":[{"name":"Department of Electrical Electronics Engineering, Iran University of Science and Technology, Tehran 16846, Iran"}]},{"given":"Farshid","family":"Raissi","sequence":"additional","affiliation":[{"name":"Department of Electrical Electronics Engineering, Khaje Nasir Toosi University of Technology, Tehran 19991-43344, Iran"}]},{"given":"Saeid","family":"Afrang","sequence":"additional","affiliation":[{"name":"Department of Electrical Electronics Engineering, Urmia University, Urmia 57159, Iran"}]}],"member":"1968","published-online":{"date-parts":[[2014,12,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"917","DOI":"10.1016\/j.snb.2007.10.064","article-title":"MEMS-based micropumps in drug delivery and biomedical applications","volume":"130","author":"Nisar","year":"2008","journal-title":"Sens. Actuators B Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"156","DOI":"10.1016\/j.sna.2004.12.002","article-title":"Design and test of a high-performance piezoelectric micropump for drug delivery","volume":"121","author":"Kan","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"555","DOI":"10.1016\/j.sna.2006.06.014","article-title":"Review of MEMS-based drug delivery and dosing systems","volume":"134","author":"Tsai","year":"2007","journal-title":"Sens. Actuators A Phys."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"3648","DOI":"10.3390\/ijms12063648","article-title":"Micro electromechanical systems (MEMS) based microfluidic devices for biomedical applications","volume":"12","author":"Ashraf","year":"2011","journal-title":"Int. J. Mol. Sci."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Wei, W., and Guo, S. (2010, January 14\u201318). A Novel PDMS Diaphragm Micropump Based on ICPF Actuator. Proceedings of IEEE International Conference on Robotics and Biomimetics, Tianjin, China.","DOI":"10.1109\/ROBIO.2010.5723565"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"222","DOI":"10.1016\/j.sna.2004.06.025","article-title":"Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications","volume":"117","author":"Teymoori","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_7","unstructured":"Sin, J., Lee, W.H., and Stephanou, H. (2004, January 7\u201311). In-plane micropump: Design optimization. Proceedings of the 2004 NSTI Nanotechnology conference and Trade show, Boston, MA, USA."},{"key":"ref_8","unstructured":"Ji, Q., and Scott, K.L. (2003). First Order Modeling of Thermal Actuators in SUGAR, Department of Electrical Engineering and Computer Sciences, University of California."},{"key":"ref_9","unstructured":"Mhatre, A.A. (2006). Implantable Drug Delivery System with an In\u2013Plane Micropump. [Master\u2019s Thesis, University of Texas]."},{"key":"ref_10","unstructured":"(1999). Standard Test Method for Measuring Resistivity of Silicon Wafers with an In-Line-Four-Point Probe, ASTM International."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"333","DOI":"10.1016\/0026-2714(78)90573-5","article-title":"Thermal conductivity variation of silicon with temperature","volume":"18","author":"Prakash","year":"1978","journal-title":"Microelectron. Reliab."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1186\/1556-276X-7-427","article-title":"Evaluation of mesoporous silicon thermal conductivity by electrothermal finite element simulation","volume":"7","author":"Siegert","year":"2012","journal-title":"Nanoscale Res. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"513","DOI":"10.1109\/JMEMS.2003.815835","article-title":"Electrothermal properties and modeling of polysilicon microthermal actuators","volume":"12","author":"Geisberger","year":"2003","journal-title":"IEEE J. Microelectromech. Syst."},{"key":"ref_14","unstructured":"Kole, A., Jeongsik, S., Lee, W.H., Popa, D., Agonafer, D., and Stephanou, H. (November, January 30). Polymer tube embedded in-plane micropump for low flow rate. Proceedings of IEEE the 24th Digital Avionics Systems Conference, Washington, DC, USA."},{"key":"ref_15","unstructured":"Kole, A., Sin, J., Lee, W.H., Popa, D., Agonafer, D., and Stephanou, H. (June, January 30). Design of polymer tube embedded in-plane micropump. Proceedings of the Tenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronics Systems, San Diego, CA, USA."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"329","DOI":"10.1109\/TCAPT.2010.2040737","article-title":"Electro-thermal analysis of in-plane micropump","volume":"33","author":"Karajgikar","year":"2010","journal-title":"IEEE Trans. Compon. Packag. Thecnol."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1088\/0960-1317\/14\/1\/307","article-title":"Force, deflection and power measurements of toggled microthermal actuators","volume":"14","author":"Lai","year":"2004","journal-title":"J. Micromech. Microeng."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Guo, C., Tatar, E., and Fedder, G.K. (2013, January 20\u201324). Large-Displacement Parametric Resonance Using a Shaped Comb Drive. Proceedings of IEEE 26th International Conference on Micro Electro Mechanical Systems, Taipei, Taiwan.","DOI":"10.1109\/MEMSYS.2013.6474205"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"58","DOI":"10.1016\/j.finel.2011.08.021","article-title":"Design considerations of a large-displacement multistable micro actuator with serially connected bistable elements","volume":"49","author":"Gerson","year":"2012","journal-title":"Finite Elem. Anal. Des."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1707","DOI":"10.1007\/s00542-013-1857-1","article-title":"Characteristic studies of the piezoelectrically actuated micropump with check valve","volume":"19","author":"Cheng","year":"2013","journal-title":"Microsyst. Technol."},{"key":"ref_21","unstructured":"Rao, S.M.N., Mhatre, A., Popa, D., Chiao, J.-C., Ativanichayaphong, T., Sin, J., and Stephanou, H. (2005, January 21\u201322). MEMS based implantable drug delivery system. Proceedings of VII International Conference on Micro Electro Mechanical Systems, El Paso, TX, USA."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Kim, J., Nguyen, T.V.X., Yokota, S., and Edamura, K. (2010, January 6\u20138). MEMS-based tube-type micropump by using electro-conjugated fluid (ECF). Proceedings of IEEE XIX International Conference on Electrical Machines, Rome, Italy.","DOI":"10.1109\/ICELMACH.2010.5608079"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"78","DOI":"10.1016\/j.snb.2003.09.038","article-title":"Parylene micromolding, a rapid and low-cost fabrication method for parylene microchannel","volume":"102","author":"Noh","year":"2004","journal-title":"Sens. Actuators B Chem."},{"key":"ref_24","unstructured":"Sinclair, M.J. (2000, January 23\u201326). A High Force Low Area MEMS Thermal Actuator. Proceedings of IEEE the Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, Las Vegas, NV, USA."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"64","DOI":"10.1088\/0960-1317\/9\/1\/308","article-title":"Analysis and design of polysilicon thermal flexure actuator","volume":"9","author":"Huang","year":"1999","journal-title":"J. Micromech. Microeng."},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Varona, J., Tecpoyotl-Torres, M., and Hamoui, A.A. (2007, January 25\u201328). Modeling of MEMS Thermal Actuation with External Heat Source. Proceedings of IEEE Electronics, Robotics and Automotive Mechanics Conference, Morelos, Mexico.","DOI":"10.1109\/CERMA.2007.4367751"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"28","DOI":"10.1016\/j.flowmeasinst.2012.06.003","article-title":"Flow characteristics of the diffuser\/nozzle micropump\u2014A state space approach","volume":"28","author":"Chandika","year":"2012","journal-title":"Flow Meas. Instrum."},{"key":"ref_28","unstructured":"Yosefi, G. (2013). Design a Novel Structure of Bio MEMS Micro Sensor and Micro Pump for Diagnosis Blood Glucose Level and Suitable Insulin Injection. [Ph.D. Thesis, Islamic Azad University]."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/5\/4\/1323\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T21:10:27Z","timestamp":1760217027000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/5\/4\/1323"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2014,12,4]]},"references-count":28,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2014,12]]}},"alternative-id":["mi5041323"],"URL":"https:\/\/doi.org\/10.3390\/mi5041323","relation":{},"ISSN":["2072-666X"],"issn-type":[{"type":"electronic","value":"2072-666X"}],"subject":[],"published":{"date-parts":[[2014,12,4]]}}}