{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:27:33Z","timestamp":1760243253685,"version":"build-2065373602"},"reference-count":15,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2014,12,31]],"date-time":"2014-12-31T00:00:00Z","timestamp":1419984000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61275166, 91123036, 51225504, 61127008, 61178058"],"award-info":[{"award-number":["61275166, 91123036, 51225504, 61127008, 61178058"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"the National High Technology Research and Development Program(\u201c863\u201dProgram) of China","award":["2013AA041109"],"award-info":[{"award-number":["2013AA041109"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on  silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 \u03bcm) with different coupling styles, concentric, straight, and butterfly, are prepared by the  micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields.<\/jats:p>","DOI":"10.3390\/mi6010151","type":"journal-article","created":{"date-parts":[[2014,12,31]],"date-time":"2014-12-31T08:49:33Z","timestamp":1420015773000},"page":"151-159","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":9,"title":["Optimisation Design of Coupling Region Based on SOI  Micro-Ring Resonator"],"prefix":"10.3390","volume":"6","author":[{"given":"Shubin","family":"Yan","sequence":"first","affiliation":[{"name":"Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Minghui","family":"Li","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Luo","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kezhen","family":"Ma","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chenyang","family":"Xue","sequence":"additional","affiliation":[{"name":"Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2014,12,31]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2509","DOI":"10.1016\/j.optcom.2008.01.003","article-title":"Silica waveguide ring resonators with multi-turn structure","volume":"281","author":"Ma","year":"2008","journal-title":"Opt. 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