{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,15]],"date-time":"2026-01-15T03:04:33Z","timestamp":1768446273674,"version":"3.49.0"},"reference-count":29,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2015,1,29]],"date-time":"2015-01-29T00:00:00Z","timestamp":1422489600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This study presents a double-side diaphragm peristaltic pump for efficient medium transport without the unwanted backflow and the lagging effect of a diaphragm. A theoretical model was derived to predict the important parameter of the micropump, i.e., the motion of the valves at large deformations, for a variety of air pressures. Accordingly, we proposed an easy and robust design to fabricate a Polydimethylsiloxane (PDMS)-based micropump. The theoretical model agrees with a numerical model and experimental data for the deformations of the PDMS membrane. Furthermore, variations of the generated flow rate, including pneumatic frequencies, actuated air pressures, and operation modes were evaluated experimentally for the proposed micropumps. In future, the theoretical equation could provide the optimal parameters for the scientists working on the fabrication of the diaphragm peristaltic pump for applications of cell-culture.<\/jats:p>","DOI":"10.3390\/mi6020216","type":"journal-article","created":{"date-parts":[[2015,1,29]],"date-time":"2015-01-29T10:10:02Z","timestamp":1422526202000},"page":"216-229","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":28,"title":["Deformation Analysis of a Pneumatically-Activated Polydimethylsiloxane (PDMS) Membrane and Potential Micro-Pump Applications"],"prefix":"10.3390","volume":"6","author":[{"given":"Chi-Han","family":"Chiou","sequence":"first","affiliation":[{"name":"ITRI South Campus, Industrial Technology Research Institute, Tainan City 70955, Taiwan"}]},{"given":"Tai-Yen","family":"Yeh","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Automation Engineering, I-Shou University, Kaohsiung City 84001, Taiwan"}]},{"given":"Jr-Lung","family":"Lin","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Automation Engineering, I-Shou University, Kaohsiung City 84001, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2015,1,29]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"R35","DOI":"10.1088\/0960-1317\/14\/6\/R01","article-title":"A review of micropumps","volume":"14","author":"Laser","year":"2004","journal-title":"J. Micromech. Microeng."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2451","DOI":"10.1021\/ac0255330","article-title":"An integrated microfabricated cell sorter","volume":"74","author":"Fu","year":"2002","journal-title":"Anal. Chem."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1109","DOI":"10.1038\/15095","article-title":"A microfabricated fluorescence-activated cell sorter","volume":"17","author":"Fu","year":"1999","journal-title":"Nat. Biotechnol."},{"key":"ref_4","unstructured":"Maillefer, D., Gamper, S., Frehner, B., and Balmer, P. (2001, January 25). A high-performance silicon micropump for disposable drug delivery systems. Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"435","DOI":"10.1038\/nbt951","article-title":"A nanoliter-scale nucleic acid processor with parallel architecture","volume":"22","author":"Hong","year":"2004","journal-title":"Nat. Biotechnol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1531","DOI":"10.1002\/1522-2683(200205)23:10<1531::AID-ELPS1531>3.0.CO;2-D","article-title":"A nanoliter rotary device for polymerase chain reaction","volume":"23","author":"Liu","year":"2002","journal-title":"Electrophoresis"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"186","DOI":"10.1088\/0960-1317\/7\/3\/028","article-title":"Design and simulation of an electrostatic micropump for drug-delivery applications","volume":"7","author":"Bourouina","year":"1997","journal-title":"J. Micromech. Microeng."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"335","DOI":"10.1109\/84.788638","article-title":"Analytical modeling of electrostatic membrane actuator for micro pumps","volume":"8","author":"Saif","year":"1999","journal-title":"J. Microelectromech. Syst."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1088\/0960-1317\/7\/3\/027","article-title":"Analytical static modeling and optimization of electrostatic micropumps","volume":"7","author":"Francais","year":"1997","journal-title":"J. Micromech. Microeng."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"200","DOI":"10.1016\/S0924-4247(99)00384-2","article-title":"Design, optimization and simulation on microelectromagnetic pump","volume":"83","author":"Gong","year":"2000","journal-title":"Sens. Actuators A"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"181","DOI":"10.1109\/84.846698","article-title":"Design, fabrication, and testing of a bistable electromagnetically actuated microvalve","volume":"9","author":"Capanu","year":"2000","journal-title":"J. Microelectromech. Syst."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"849","DOI":"10.1016\/j.sna.2006.09.012","article-title":"Fabrication and drive test of pneumatic PDMS micro pump","volume":"135","author":"Jeong","year":"2007","journal-title":"Sens. Actuators A"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"113","DOI":"10.1126\/science.288.5463.113","article-title":"Monolithic microfabricated valves and pumps by multilayer soft lithography","volume":"288","author":"Unger","year":"2000","journal-title":"Science"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"580","DOI":"10.1126\/science.1076996","article-title":"Microfluidic large-scale integration","volume":"298","author":"Thorsen","year":"2002","journal-title":"Science"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"323","DOI":"10.1023\/A:1012412916446","article-title":"A microfabricated rotary pump","volume":"3","author":"Chou","year":"2001","journal-title":"Biomed. Microdevice"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1016\/S0924-4247(99)00392-1","article-title":"Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm","volume":"83","author":"Jeong","year":"2000","journal-title":"Sens. Actuators A Phys."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"198","DOI":"10.1016\/0924-4247(90)85038-6","article-title":"Therpneumatic micropump based on microengineering techniques","volume":"21","author":"Elwenspoek","year":"1990","journal-title":"Sens. Actuators A Phys."},{"key":"ref_18","first-page":"203","article-title":"Piezoelectric micropump with three valves working peristaltically","volume":"21\u201323","author":"Spencer","year":"1990","journal-title":"Sens. Actuators A Phys."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"459","DOI":"10.1088\/0960-1317\/10\/3\/323","article-title":"Optimization of a circular piezoelectric bimorph for a micropump driver","volume":"10","author":"Morris","year":"2000","journal-title":"J. Micromech. Microeng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"S64","DOI":"10.1088\/0960-1317\/14\/9\/011","article-title":"Investigation for the operation of an integrated peristaltic micropump","volume":"14","author":"Husband","year":"2004","journal-title":"J. Micromech. Microeng."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"220","DOI":"10.1088\/0960-1317\/17\/2\/006","article-title":"Dynamic simulation of a peristaltic micropump considering coupled fluid flow and structural motion","volume":"1","author":"Lin","year":"2007","journal-title":"J. Micromech. Microeng."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"419","DOI":"10.1016\/j.bios.2004.11.004","article-title":"Automatic bio-sampling chips integrated with micropumps and microvalves for multiple disease detection","volume":"21","author":"Wang","year":"2005","journal-title":"Biosens. Bioelectron."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"545","DOI":"10.1007\/s10544-007-9062-6","article-title":"Membrane-activated microfluidic rotary devices for pumping and mixing","volume":"9","author":"Tseng","year":"2007","journal-title":"Biomed. Microdevices"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"341","DOI":"10.1088\/0960-1317\/16\/2\/019","article-title":"Pneumatically-driven peristaltic micropumps utilizing serpentine-shape channels","volume":"16","author":"Wang","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"395","DOI":"10.3390\/s110908395","article-title":"Development of an integrated microfluidic perfusion cell culture system for real-time microscopic observation of biological cells","volume":"11","author":"Lin","year":"2011","journal-title":"Sensors"},{"key":"ref_26","unstructured":"Timoshenko, S., and Woinosky-Krieger, S. (1959). Theory of Plates and Shells, McGraw-hill. [2nd ed.]."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"400","DOI":"10.1088\/0964-1726\/14\/2\/014","article-title":"Simulation of a piezoelectrically actuated valveless micropump","volume":"14","author":"Fan","year":"2005","journal-title":"Smart Mater. Struct."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1289","DOI":"10.1016\/j.mee.2008.02.004","article-title":"Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility","volume":"85","author":"Fuard","year":"2008","journal-title":"Microelectron. Eng."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"11","DOI":"10.1007\/s00542-003-0342-7","article-title":"Theoretical and experimental studies on the parylene diaphragms for microdevices","volume":"11","author":"Sim","year":"2005","journal-title":"Microsyst. Technol."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/6\/2\/216\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T20:42:09Z","timestamp":1760215329000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/6\/2\/216"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,1,29]]},"references-count":29,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2015,2]]}},"alternative-id":["mi6020216"],"URL":"https:\/\/doi.org\/10.3390\/mi6020216","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2015,1,29]]}}}