{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,23]],"date-time":"2026-03-23T17:23:59Z","timestamp":1774286639749,"version":"3.50.1"},"reference-count":16,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2015,9,1]],"date-time":"2015-09-01T00:00:00Z","timestamp":1441065600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"Chinese National Science Foundation","doi-asserted-by":"publisher","award":["61274001"],"award-info":[{"award-number":["61274001"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"Chinese National Science Foundation","doi-asserted-by":"publisher","award":["61234007"],"award-info":[{"award-number":["61234007"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Nurturing and Development Special Projects of Beijing Science and Technology Innovation Base\u2019s financial","award":["Z131103002813070"],"award-info":[{"award-number":["Z131103002813070"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and another with a top electrode were measured by PFM to characterize the piezoelectric property effectively. To obtain the numerical solution, an equivalent model of the PFM measurement system was established based on theoretical analysis. The simulation results for two samples revealed the effective measurement value d33-test should be smaller than the intrinsic value d33 due to the clamping effect of the substrate and non-ideal electric field distribution. Their influences to the measurement results were studied systematically. By comparing the experimental results with the simulation results, an experimental model linking the actual piezoelectric coefficient d33 with the measurement results d33-test was given under this testing configuration. A novel and effective approach was presented to eliminate the influences of substrate clamping and non-ideal electric field distribution and extract the actual value d33 of AlN thin films.<\/jats:p>","DOI":"10.3390\/mi6091236","type":"journal-article","created":{"date-parts":[[2015,9,1]],"date-time":"2015-09-01T10:55:58Z","timestamp":1441104958000},"page":"1236-1248","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":48,"title":["Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications"],"prefix":"10.3390","volume":"6","author":[{"given":"Meng","family":"Zhang","sequence":"first","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9086-6259","authenticated-orcid":false,"given":"Jian","family":"Yang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chaowei","family":"Si","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guowei","family":"Han","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongmei","family":"Zhao","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jin","family":"Ning","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2015,9,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Berlincourt, D., and Jaffe, H. (1958). Elastic and piezoelectric coefficients of single-crystal bari\u03bcm titanate. Phys. Rev., 143.","DOI":"10.1103\/PhysRev.111.143"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Jackson, N., Olszewski, O.Z., Keeney, L., Blake, A., and Mathewson, A. (2015, January 23\u201326). A capacitive based piezoelectric AlN film quality test structure. Proceedings of the 2015 International Conference on Microelectronic Test Structures (ICMTS), Tempe, AZ, USA.","DOI":"10.1109\/ICMTS.2015.7106139"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"140","DOI":"10.1109\/LMWC.2009.2013682","article-title":"Piezoelectric Coefficients of Thin Film Aluminum Nitride Characterizations Using Capacitance Measurements","volume":"19","author":"Plana","year":"2009","journal-title":"IEEE Microw. Wirel. Compon. Lett."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"253","DOI":"10.1016\/j.mseb.2010.05.026","article-title":"The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films","volume":"172","author":"Ababneh","year":"2010","journal-title":"Mater. Sci. Eng. B"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"6389","DOI":"10.1063\/1.1359162","article-title":"Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering","volume":"89","author":"Dubois","year":"2001","journal-title":"J. Appl. Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"053502","DOI":"10.1063\/1.2957081","article-title":"Simulation and laser vibrometry characterization of piezoelectric AIN thin films","volume":"104","author":"Hernando","year":"2008","journal-title":"J. Appl. Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"361","DOI":"10.1116\/1.1649343","article-title":"Thickness dependence of the properties of highly c-axis textured AlN thin films","volume":"22","author":"Martin","year":"2004","journal-title":"J. Vac. Sci. Technol. A"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2274","DOI":"10.1002\/pssc.200565123","article-title":"Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy","volume":"3","author":"Tonisch","year":"2006","journal-title":"Phys. Status Solidi C"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2435","DOI":"10.1007\/s10854-014-1885-3","article-title":"A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films","volume":"25","author":"Bi","year":"2014","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"580","DOI":"10.3938\/jkps.56.580","article-title":"Piezoelectric Coefficient Measurement of AIN Thin Films at the Nanometer Scale by Using Piezoresponse Force Microscopy","volume":"56","author":"Hyunchang","year":"2010","journal-title":"J. Korean Phys. Soc."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"192907","DOI":"10.1063\/1.1923173","article-title":"Study of orientation effect on nanoscale polarization in BaTiO3 thin films using piezoresponse force microscopy","volume":"86","author":"Kim","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1120","DOI":"10.1016\/j.diamond.2003.10.082","article-title":"Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering","volume":"13","author":"Mortet","year":"2004","journal-title":"Diam. Relat. Mater."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"98","DOI":"10.1007\/s12613-010-0117-y","article-title":"Influence of substrate metals on the crystal growth of AlN films","volume":"17","author":"Xiong","year":"2010","journal-title":"Int. J. Miner. Metall. Mater."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"292","DOI":"10.1109\/58.818773","article-title":"Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality","volume":"47","author":"Naik","year":"2000","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"15","DOI":"10.1109\/TUFFC.2006.1588386","article-title":"Influence of test capacitor features on piezoelectric and dielectric measurement of ferroelectric films","volume":"53","author":"Wang","year":"2006","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1935","DOI":"10.1063\/1.1147000","article-title":"Interferometric measurements of electric field-induced displacements in piezoelectric thin films","volume":"67","author":"Kholkin","year":"1996","journal-title":"Rev. Sci. Instrum."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/6\/9\/1236\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T20:47:51Z","timestamp":1760215671000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/6\/9\/1236"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,9,1]]},"references-count":16,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2015,9]]}},"alternative-id":["mi6091236"],"URL":"https:\/\/doi.org\/10.3390\/mi6091236","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2015,9,1]]}}}