{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,31]],"date-time":"2025-10-31T07:37:06Z","timestamp":1761896226761,"version":"build-2065373602"},"reference-count":14,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2016,1,4]],"date-time":"2016-01-04T00:00:00Z","timestamp":1451865600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam\u2019s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.<\/jats:p>","DOI":"10.3390\/mi7010002","type":"journal-article","created":{"date-parts":[[2016,1,5]],"date-time":"2016-01-05T02:29:07Z","timestamp":1451960947000},"page":"2","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Design and Performance of a Focus-Detection System for Use in Laser Micromachining"],"prefix":"10.3390","volume":"7","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1331-0636","authenticated-orcid":false,"given":"Binh","family":"Cao","sequence":"first","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"},{"name":"Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Munju","family":"Bae","sequence":"additional","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hyonkee","family":"Sohn","sequence":"additional","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiyeon","family":"Choi","sequence":"additional","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"},{"name":"Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Youngduk","family":"Kim","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jeng-o","family":"Kim","sequence":"additional","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiwhan","family":"Noh","sequence":"additional","affiliation":[{"name":"Department of Laser and Electron Beam Application, Korea Institute of Machinery &amp; Materials (KIMM), Daejeon 34103, Korea"},{"name":"Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,1,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1007\/s00340-003-1246-z","article-title":"A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining","volume":"77","author":"Joglekar","year":"2003","journal-title":"Appl. Phys. B"},{"doi-asserted-by":"crossref","unstructured":"Steen, W.M., and Mazumder, J. (2010). Laser Material Processing, Springer. Chapter 2.","key":"ref_2","DOI":"10.1007\/978-1-84996-062-5"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1364\/OL.33.000049","article-title":"Focusing of partially coherent Bessel-Gaussian beams through a high-numerical-aperture objective","volume":"33","author":"Zhang","year":"2008","journal-title":"Opt. Lett."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1627","DOI":"10.1364\/OL.28.001627","article-title":"Can spatial coherence effects produce a local minimum of intensity at focus?","volume":"28","author":"Gbur","year":"2003","journal-title":"Opt. Lett."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"2194","DOI":"10.1364\/OL.32.002194","article-title":"Tight focusing of spatially variant vector optical fields with elliptical symmetry of linear polarization","volume":"32","author":"Lerman","year":"2007","journal-title":"Opt. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"324","DOI":"10.1364\/OE.10.000324","article-title":"Focus shaping using cylindrical vector beams","volume":"10","author":"Zhan","year":"2002","journal-title":"Opt Express"},{"doi-asserted-by":"crossref","unstructured":"Luo, J., Liang, Y., and Yang, G. (2011). Dynamic scan detection of focal spot on nonplanar surfaces: Theoretical analysis and realization. Opt. Eng., 50.","key":"ref_7","DOI":"10.1117\/1.3597327"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"409","DOI":"10.1117\/12.317917","article-title":"Laser direct writing system and its lithography properties","volume":"3550","author":"Yang","year":"1998","journal-title":"Proc. SPIE"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1031","DOI":"10.1088\/1742-6596\/48\/1\/192","article-title":"Design of high precise focusing system in laser direct writer","volume":"48","author":"Liang","year":"2006","journal-title":"J. Phys. Conf. Ser."},{"doi-asserted-by":"crossref","unstructured":"Hsu, W.Y., Lee, C.S., Chen, P.J., Chen, N.T., Chen, F.Z., Yu, Z.R., Kuo, C.H., and Hwang, C.H. (2009). Development of the fast astigmatic auto-focus microscope system. Meas. Sci. Technol., 20.","key":"ref_10","DOI":"10.1088\/0957-0233\/20\/4\/045902"},{"doi-asserted-by":"crossref","unstructured":"Luo, J., Liang, Y., and Yang, G. (2012). Realization of autofocusing system for laser direct writing on non-planar surfaces. Rev. Sci. Instrum., 83.","key":"ref_11","DOI":"10.1063\/1.4709407"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"871","DOI":"10.1117\/12.628138","article-title":"Optical autofocus for high resolution laser photoplotting","volume":"5840","author":"Alonso","year":"2005","journal-title":"Proc. SPIE"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"582","DOI":"10.1117\/12.480323","article-title":"New autofocusing system for laser micromachining","volume":"4976","author":"Nantel","year":"2003","journal-title":"Proc. SPIE"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"807","DOI":"10.1016\/j.phpro.2012.10.104","article-title":"Precise online auto-focus system in high speed laser micromachining applications","volume":"39","author":"Antt","year":"2012","journal-title":"Phys. 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