{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,13]],"date-time":"2025-10-13T19:11:12Z","timestamp":1760382672906,"version":"build-2065373602"},"reference-count":18,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2016,1,15]],"date-time":"2016-01-15T00:00:00Z","timestamp":1452816000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>A structure of micro-electro-mechanical system (MEMS) linear phased array based on \u201cmulti-cell\u201d element is designed to increase radiation sound pressure of transducer working in bending vibration mode at high frequency. In order to more accurately predict the resonant frequency of an element, the theoretical analysis of the dynamic equation of a fixed rectangular composite plate and finite element method simulation are adopted. The effects of the parameters both in the lateral and elevation direction on the three-dimensional beam directivity characteristics are comprehensively analyzed. The key parameters in the analysis include the \u201ccell\u201d number of element, \u201ccell\u201d size, \u201cinter-cell\u201d spacing and the number of elements, element width. The simulation results show that optimizing the linear array parameters both in the lateral and elevation direction can greatly improve the three-dimensional beam focusing for MEMS linear phased array, which is obviously different from the traditional linear array.<\/jats:p>","DOI":"10.3390\/mi7010008","type":"journal-article","created":{"date-parts":[[2016,1,16]],"date-time":"2016-01-16T03:30:25Z","timestamp":1452915025000},"page":"8","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Design and Analysis of MEMS Linear Phased Array"],"prefix":"10.3390","volume":"7","author":[{"given":"Guoxiang","family":"Fan","sequence":"first","affiliation":[{"name":"State Key Laboratory of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junhong","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chenghao","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Acoustics, Chinese Academy of Sciences, Beijing 100190, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,1,15]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"455","DOI":"10.1109\/TUFFC.2005.1417268","article-title":"Piezoelectric micromachined ultrasonic transducers: Modeling the influence of structural parameters on device performance","volume":"52","author":"Akasheh","year":"2005","journal-title":"IEEE Trans. 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Ferroelectr. Freq. Control"},{"key":"ref_5","unstructured":"Lu, Y., Tang, H.Y., Fung, S., Boser, B.E., and Horsley, D. (2015, January 18\u201322). Short-range and high-resolution ultrasound imaging using an 8 MHz Aluminum Nitride PMUT array. Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Griggio, F., Demore, C.E., Kim, H., Gigliotti, J., Qiu, Y., Jackson, T.N., Choi, K., Tutwiler, R.L., Cochran, S., and Trolier-Mckinstry, S. (2012, January 7\u201310). Micromachined diaphragm transducers for miniaturised ultrasound arrays. Proceedings of the IEEE International Ultrasonics Symposium (IUS), Dresden, Germany.","DOI":"10.1109\/ULTSYM.2012.0503"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1142","DOI":"10.1109\/JMEMS.2014.2387154","article-title":"Modeling, fabrication, and characterization of piezoelectric micromachined ultrasonic transducer arrays based on cavity SOI wafers","volume":"24","author":"Lu","year":"2015","journal-title":"J. Microelectromech. Syst."},{"key":"ref_8","first-page":"11","article-title":"Die Biegungsschwingungen der vierseitig eingespannten rechteckigen Platte","volume":"8","author":"Iguchi","year":"1937","journal-title":"Arch. Appl. Mech."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"302","DOI":"10.1016\/S0924-4247(02)00037-7","article-title":"Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms","volume":"97\u201398","author":"Yamashita","year":"2002","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2484","DOI":"10.1109\/TUFFC.956","article-title":"Theory and operation of 2-D array piezoelectric micromachined ultrasound transducers","volume":"55","author":"Dausch","year":"2008","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_11","unstructured":"Steinberg, B.D. (1976). Principles of Aperture and Array System Design: Including Random and Adaptive Arrays, John Wiley & Sons."},{"key":"ref_12","first-page":"34","article-title":"Linear array technology in NDE applications","volume":"38","author":"Lemon","year":"1980","journal-title":"Mater. Eval."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"320","DOI":"10.1109\/58.84270","article-title":"Beam steering with pulsed two-dimensional transducer arrays","volume":"38","author":"Turnbull","year":"1991","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_14","first-page":"737","article-title":"Influence of phased array element size on beam steering behavior","volume":"36","author":"Wooh","year":"1998","journal-title":"Uhrasonis"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"245","DOI":"10.1016\/S0165-2125(98)00039-0","article-title":"Optimum beam steering of linear phased arrays","volume":"29","author":"Wooh","year":"1999","journal-title":"Wave Motion"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1023\/A:1022645204774","article-title":"A simulation study of the beam steering characteristics for linear phased arrays","volume":"18","author":"Wooh","year":"1999","journal-title":"J. Nondestr. Eval."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1023\/A:1022618321612","article-title":"Experimental study of phased array beam steering characteristics","volume":"18","author":"Clay","year":"1999","journal-title":"J. Nondestr. Eval."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"3275","DOI":"10.1121\/1.424655","article-title":"Three-dimensional beam directivity of phase-steered ultrasound","volume":"105","author":"Wooh","year":"1999","journal-title":"J. Acoust. Soc. 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