{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,17]],"date-time":"2026-01-17T00:59:32Z","timestamp":1768611572080,"version":"3.49.0"},"reference-count":26,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2016,1,21]],"date-time":"2016-01-21T00:00:00Z","timestamp":1453334400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits. The electroacoustic coupling coefficient dispersion curves of the first four Love modes are calculated for four dispersive coupling configurations based on a c-axis tilted ZnO layer on wz-BN substrate. The gravimetric sensitivity of four Love modes travelling at a common velocity of 9318 m\/s along different layer thicknesses, and of three Love modes travelling at different velocity along a fixed ZnO layer thickness, are calculated in order to design enhanced-performance sensors. The phase velocity shift and attenuation due to the presence of a viscous liquid contacting the device surface are calculated for different thicknesses of a c-axis inclined ZnO layer onto BN half-space.<\/jats:p>","DOI":"10.3390\/mi7010015","type":"journal-article","created":{"date-parts":[[2016,1,22]],"date-time":"2016-01-22T11:36:13Z","timestamp":1453462573000},"page":"15","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Love-Mode MEMS Devices for Sensing Applications in Liquids"],"prefix":"10.3390","volume":"7","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8363-2972","authenticated-orcid":false,"given":"Cinzia","family":"Caliendo","sequence":"first","affiliation":[{"name":"Istituto di Acustica e Sensoristica \u201cO.M. Corbino\u201d, IDASC, Consiglio Nazionale delle Ricerche, CNR, Via del Fosso del Cavaliere 100, 00133 Rome, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Smail","family":"Sait","sequence":"additional","affiliation":[{"name":"Laboratory of Physics of Materials, Team \u201cWaves and Acoustic\u201d, University of Sciences and Technology, Houari Boumedienne, B.P. 32 El Allia, Bab-Ezzouar, 16111 Algiers, Algeria"},{"name":"Facult\u00e9 des Sciences, Universit\u00e9 M. Mammeri, BP 17 R.P., 15000 Tizi-Ouzou, Algeria"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fouad","family":"Boubenider","sequence":"additional","affiliation":[{"name":"Laboratory of Physics of Materials, Team \u201cWaves and Acoustic\u201d, University of Sciences and Technology, Houari Boumedienne, B.P. 32 El Allia, Bab-Ezzouar, 16111 Algiers, Algeria"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,1,21]]},"reference":[{"key":"ref_1","unstructured":"Caliendo, C., DAmico, A., Verardi, P., and Verona, E. (1990, January 4\u20137). K+ detection using shear horizontal acoustic modes. Proceedings of the IEEE Ultrasonics Symposium, Honolulu, HI, USA."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"657","DOI":"10.1109\/58.156185","article-title":"A novel Love-plate acoustic sensor utilizing polymer overlayers","volume":"39","author":"Gizeli","year":"1992","journal-title":"IEEE Trans. Ultrason. 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