{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,20]],"date-time":"2025-12-20T22:09:00Z","timestamp":1766268540914,"version":"build-2065373602"},"reference-count":12,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2016,3,2]],"date-time":"2016-03-02T00:00:00Z","timestamp":1456876800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003329","name":"Ministerio de Econom\u00eda y Competitividad","doi-asserted-by":"publisher","award":["TEC 2012\u201032677"],"award-info":[{"award-number":["TEC 2012\u201032677"]}],"id":[{"id":"10.13039\/501100003329","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 \u03bcm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag\/Hz using a fully integrable electrical transduction.<\/jats:p>","DOI":"10.3390\/mi7030040","type":"journal-article","created":{"date-parts":[[2016,3,2]],"date-time":"2016-03-02T11:20:05Z","timestamp":1456917605000},"page":"40","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry"],"prefix":"10.3390","volume":"7","author":[{"given":"Gabriel","family":"Vidal-\u00c1lvarez","sequence":"first","affiliation":[{"name":"Department of Electronic Engineering, Universitat Aut\u00f2noma de Barcelona (UAB), Cerdanyola del Vall\u00e8s 08193, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eloi","family":"Marig\u00f3","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, Universitat Aut\u00f2noma de Barcelona (UAB), Cerdanyola del Vall\u00e8s 08193, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Francesc","family":"Torres","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, Universitat Aut\u00f2noma de Barcelona (UAB), Cerdanyola del Vall\u00e8s 08193, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"N\u00faria","family":"Barniol","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, Universitat Aut\u00f2noma de Barcelona (UAB), Cerdanyola del Vall\u00e8s 08193, Spain"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,3,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"301","DOI":"10.1038\/nnano.2012.42","article-title":"A nanomechanical mass sensor with yoctogram resolution","volume":"7","author":"Chaste","year":"2012","journal-title":"Nat. Nanotech."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1066","DOI":"10.1038\/nature05741","article-title":"Weighing of biomolecules, single cells and single nanoparticles in fluid","volume":"446","author":"Burg","year":"2007","journal-title":"Nature"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"2698","DOI":"10.1063\/1.1611625","article-title":"Suspended microchannel resonators for biomolecular detection","volume":"83","author":"Burg","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"2537","DOI":"10.1021\/nl101107u","article-title":"Toward attogram mass measurements in solution with suspended nanochannel resonators","volume":"10","author":"Lee","year":"2010","journal-title":"Nano Lett."},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Olcum, S., Cermak, N., Wasserman, S.C., Payer, K., Shen, W., Lee, J., and Manalis, S.R. (2014, January 26\u201330). Suspended nanochannel resonators at attogram precision. Proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco, CA, USA.","DOI":"10.1109\/MEMSYS.2014.6765587"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2058","DOI":"10.1021\/nl100193g","article-title":"Fabrication of a nanomechanical mass sensor containing a nanofluidic channel","volume":"10","author":"Barton","year":"2010","journal-title":"Nano Lett."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"645","DOI":"10.1039\/C0LC00447B","article-title":"Suspended microchannel resonators with piezoresistive sensors","volume":"11","author":"Lee","year":"2011","journal-title":"Lab Chip"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2598","DOI":"10.1039\/c1lc20011a","article-title":"An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid","volume":"11","author":"Agache","year":"2011","journal-title":"Lab Chip"},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Hadji, C., Berthet, C., Baleras, F., Cochet, M., Icard, B., and Agache, V. (2015, January 18\u201322). Hollow MEMS mass sensors for real-time particles weighing and sizing from a few 10 nm to the \u03bcm scale. Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal.","DOI":"10.1109\/MEMSYS.2015.7050916"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Zuniga, C., Rinaldi, M., and Piazza, G. (2010, January 1\u20134). High frequency Piezoelectric Resonant Nanochannel for bio-sensing applications in liquid environment. Proceedings of the 9th Annual IEEE Conference on Sensors (Sensors 2010), Kona, HI, USA.","DOI":"10.1109\/ICSENS.2010.5690848"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"146","DOI":"10.1109\/LED.2007.914085","article-title":"Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range","volume":"29","author":"Verd","year":"2008","journal-title":"IEEE Electron Device Lett."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"225","DOI":"10.1016\/j.ultramic.2003.12.013","article-title":"On the electromechanical modelling of a resonating nano-cantilever-based transducer","volume":"100","author":"Teva","year":"2004","journal-title":"Ultramicroscopy"}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/3\/40\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:20:02Z","timestamp":1760210402000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/3\/40"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,3,2]]},"references-count":12,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2016,3]]}},"alternative-id":["mi7030040"],"URL":"https:\/\/doi.org\/10.3390\/mi7030040","relation":{},"ISSN":["2072-666X"],"issn-type":[{"type":"electronic","value":"2072-666X"}],"subject":[],"published":{"date-parts":[[2016,3,2]]}}}