{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,12]],"date-time":"2026-03-12T15:32:20Z","timestamp":1773329540911,"version":"3.50.1"},"reference-count":19,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2016,3,30]],"date-time":"2016-03-30T00:00:00Z","timestamp":1459296000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001691","name":"JSPS","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001691","id-type":"DOI","asserted-by":"publisher"}]},{"name":"\u03bcSIC"},{"DOI":"10.13039\/501100009033","name":"COI","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100009033","id-type":"DOI","asserted-by":"publisher"}]},{"name":"G-Safety"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (SOI) wafer and a glass wafer. A mirror plate and a counter electrode are fabricated by a top silicon layer of the SOI wafer and on the glass wafer, respectively. The piezoresistor is fabricated by ion implantation on a supporting beam of the mirror plate. The stress variation of the beam, which is detected by the piezoresistor, correspond the focal length of the varifocal mirror. The focus length varies from \u221241 to 35 mm at the resonant frequency of 9.5 kHz. The focal length of the varifocal mirror is monitored by the piezoresistor in real time.<\/jats:p>","DOI":"10.3390\/mi7040057","type":"journal-article","created":{"date-parts":[[2016,3,30]],"date-time":"2016-03-30T16:47:27Z","timestamp":1459356447000},"page":"57","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":15,"title":["Resonant Varifocal Micromirror with Piezoresistive Focus Sensor"],"prefix":"10.3390","volume":"7","author":[{"given":"Kenta","family":"Nakazawa","sequence":"first","affiliation":[{"name":"Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Takashi","family":"Sasaki","sequence":"additional","affiliation":[{"name":"Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hiromasa","family":"Furuta","sequence":"additional","affiliation":[{"name":"Research &amp; Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiro","family":"Kamiya","sequence":"additional","affiliation":[{"name":"Research &amp; Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hideki","family":"Sasaki","sequence":"additional","affiliation":[{"name":"Research &amp; Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Toshikazu","family":"Kamiya","sequence":"additional","affiliation":[{"name":"Research &amp; Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kazuhiro","family":"Hane","sequence":"additional","affiliation":[{"name":"Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,3,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"243","DOI":"10.1109\/JMEMS.2003.809961","article-title":"A MEMS Electromagnetic Otpical Scanner for a Commercial Confocal Laser Scanning Microscope","volume":"12","author":"Miyajima","year":"2003","journal-title":"J. Microelectromech. Syst."},{"key":"ref_2","unstructured":"Ye, Z. (2010). Imaging Optical System for Multi-Focus Camera. (7,690,411 B2), U.S. Patent."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"528","DOI":"10.1109\/JSTQE.2004.828484","article-title":"3-D MOEMS Mirror for Laser Beam Pointing and Focus Control","volume":"10","author":"Shao","year":"2004","journal-title":"IEEE J. Sel. Topcs Quantum Electron."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1109\/JMEMS.2012.2215010","article-title":"SU-8 2002 Surface Micromachined Deformable Membrane Mirrors","volume":"22","author":"Lukes","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"285","DOI":"10.1109\/JMEMS.2012.2220337","article-title":"Design, Simulation, and Characterization of a Bimorph Varifocal Micromirror and Its Application in an Optical Imaging System","volume":"22","author":"Li","year":"2013","journal-title":"J. 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