{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,8]],"date-time":"2026-02-08T00:41:17Z","timestamp":1770511277746,"version":"3.49.0"},"reference-count":163,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2016,4,16]],"date-time":"2016-04-16T00:00:00Z","timestamp":1460764800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS\/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring\/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.<\/jats:p>","DOI":"10.3390\/mi7040069","type":"journal-article","created":{"date-parts":[[2016,4,18]],"date-time":"2016-04-18T10:37:17Z","timestamp":1460975837000},"page":"69","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":44,"title":["Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS\/NEMS Actuators"],"prefix":"10.3390","volume":"7","author":[{"given":"Han","family":"Du","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fook","family":"Chau","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guangya","family":"Zhou","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,4,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"832","DOI":"10.1109\/TMTT.2005.863060","article-title":"Photonic signal processing of microwave signals","volume":"54","author":"Minasian","year":"2006","journal-title":"IEEE Trans. Microw. Theory"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"571","DOI":"10.1109\/JLT.2012.2222348","article-title":"Microwave photonic signal processing","volume":"31","author":"Capmany","year":"2013","journal-title":"J. Lightwave Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1161","DOI":"10.1109\/JPROC.2009.2021052","article-title":"Silicon photonics cmos going optical","volume":"97","author":"Tsybeskov","year":"2009","journal-title":"Proc. IEEE"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1038\/nphoton.2012.66","article-title":"Myths and rumours of silicon photonics","volume":"6","author":"Pinguet","year":"2012","journal-title":"Nat. Photonics"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1678","DOI":"10.1109\/JSTQE.2006.883151","article-title":"The past, present, and future of silicon photonics","volume":"12","author":"Soref","year":"2006","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"492","DOI":"10.1038\/nphoton.2010.172","article-title":"Towards fabless silicon photonics","volume":"4","author":"Hochberg","year":"2010","journal-title":"Nat. Photonics"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"319","DOI":"10.1038\/nphoton.2007.89","article-title":"Microwave photonics combines two worlds","volume":"1","author":"Capmany","year":"2007","journal-title":"Nat. Photonics"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"669","DOI":"10.1109\/JSTQE.2006.876315","article-title":"Photonics for switching and routing","volume":"12","author":"Neilson","year":"2006","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"4600","DOI":"10.1109\/JLT.2006.885782","article-title":"Silicon photonics","volume":"24","author":"Jalali","year":"2006","journal-title":"J. Lightwave Technol."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"518","DOI":"10.1038\/nphoton.2010.179","article-title":"Silicon optical modulators","volume":"4","author":"Reed","year":"2010","journal-title":"Nat. Photonics"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"7557","DOI":"10.1364\/OE.15.007557","article-title":"Thermo-optic tuning and switching in soi waveguide Fabry-P\u00e9rot microcavities","volume":"15","author":"Pruessner","year":"2007","journal-title":"Opt. Express"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"407","DOI":"10.1038\/nphoton.2007.93","article-title":"Electro-optically tunable microring resonators in lithium niobate","volume":"1","author":"Guarino","year":"2007","journal-title":"Nat. Photonics"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"2777","DOI":"10.1364\/OL.32.002777","article-title":"Electro-optically tunable microring resonators on lithium niobate","volume":"32","author":"Wang","year":"2007","journal-title":"Opt. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"3176","DOI":"10.1063\/1.1574402","article-title":"Electro-optic control of the superprism effect in photonic crystals","volume":"82","author":"Scrymgeour","year":"2003","journal-title":"Appl. Phys. Lett."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"18","DOI":"10.3390\/mi7020018","article-title":"Devices based on co-integrated MEMES actuators and optical waveguide: A review","volume":"7","author":"Chollet","year":"2016","journal-title":"Micromachines"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"6971","DOI":"10.1021\/nl503236k","article-title":"Demonstration of strong near-field radiative heat transfer between integrated nanostructures","volume":"14","author":"Guha","year":"2014","journal-title":"Nano Lett."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1002\/1522-2683(200101)22:2<187::AID-ELPS187>3.0.CO;2-0","article-title":"Nanofabrication: Conventional and nonconventional methods","volume":"22","author":"Chen","year":"2001","journal-title":"Electrophoresis"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"741","DOI":"10.1007\/BF00745572","article-title":"Microelectronic and medical applications of an ion-beam milling system","volume":"18","author":"Kowalski","year":"1983","journal-title":"J. Mater. Sci."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"14","DOI":"10.1088\/0960-1317\/6\/1\/002","article-title":"A survey on the reactive ion etching of silicon in microtechnology","volume":"6","author":"Jansen","year":"1996","journal-title":"J. Micromech. Microeng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"3272","DOI":"10.1063\/1.332437","article-title":"Damage induced in Si by ion milling or reactive ion etching","volume":"54","author":"Pang","year":"1983","journal-title":"J. Appl. Phys."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"673","DOI":"10.1016\/j.mejo.2005.04.039","article-title":"Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures","volume":"36","author":"Marty","year":"2005","journal-title":"Microelectron. J."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"349","DOI":"10.1016\/S0167-9317(03)00089-3","article-title":"Challenges, developments and applications of silicon deep reactive ion etching","volume":"67\u201368","author":"Laermer","year":"2003","journal-title":"Microelectron. Eng."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"57","DOI":"10.1016\/S0079-6425(01)00009-3","article-title":"Chemical vapour deposition of coatings","volume":"48","author":"Choy","year":"2003","journal-title":"Prog. Mater. Sci."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.tsf.2006.03.033","article-title":"Ionized physical vapor deposition (IPVD): A review of technology and applications","volume":"513","author":"Helmersson","year":"2006","journal-title":"Thin Solid Films"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s10853-005-5682-5","article-title":"Nano and macro-structured component fabrication by electron beam-physical vapor deposition (EB-PVD)","volume":"40","author":"Singh","year":"2005","journal-title":"J. Mater. Sci."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"449","DOI":"10.1116\/1.587142","article-title":"Metal ion deposition from ionized mangetron sputtering discharge","volume":"12","author":"Rossnagel","year":"1994","journal-title":"J. Vacuum Sci. Technol. B Microelectron. Nanometer Struct."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"226","DOI":"10.1109\/84.623111","article-title":"Dry release for surface micromachining with hf vapor-phase etching","volume":"6","author":"Lee","year":"1997","journal-title":"J. Microelectromech. Syst."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1402","DOI":"10.1109\/50.887192","article-title":"Design and fabrication of silicon photonic crystal optical waveguides","volume":"18","author":"Loncar","year":"2000","journal-title":"J. Lightwave Technol."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"221105","DOI":"10.1063\/1.2138367","article-title":"80-micron interaction length silicon photonic crystal waveguide modulator","volume":"87","author":"Jiang","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"101110","DOI":"10.1063\/1.2892677","article-title":"Submicron silicon waveguide optical switch driven by microelectromechanical actuator","volume":"92","author":"Bulgan","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"328","DOI":"10.1016\/0924-4247(90)85065-C","article-title":"Electrostatic-comb drive of lateral polysilicon resonators","volume":"21","author":"Tang","year":"1990","journal-title":"Sens. Actuators A Phys."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1016\/0250-6874(89)87098-2","article-title":"Laterally driven polysilicon resonant microstructures","volume":"20","author":"Tang","year":"1989","journal-title":"Sens. Actuators"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"320","DOI":"10.1088\/0960-1317\/6\/3\/004","article-title":"Comb-drive actuators for large displacements","volume":"6","author":"Legtenberg","year":"1996","journal-title":"J. Micromech. Microeng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"377","DOI":"10.1038\/nnano.2009.92","article-title":"Broadband all-photonic transduction of nanocantilevers","volume":"4","author":"Li","year":"2009","journal-title":"Nat. Nanotechnol."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"065014","DOI":"10.1088\/0960-1317\/21\/6\/065014","article-title":"Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism","volume":"21","author":"Yu","year":"2011","journal-title":"J. Micromech. Microeng."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"358","DOI":"10.1109\/LPT.2005.861957","article-title":"MEMS-actuated photonic crystal switches","volume":"18","author":"Lee","year":"2006","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"190","DOI":"10.1109\/JMEMS.2011.2171325","article-title":"Low-voltage widely tunable photonic crystal channel drop filter in soi wafer","volume":"21","author":"Mudachathi","year":"2012","journal-title":"J. Microelectromech Syst."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"464","DOI":"10.1038\/nphoton.2009.116","article-title":"Tunable bipolar optical interactions between guided lightwaves","volume":"3","author":"Li","year":"2009","journal-title":"Nat. Photonics"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"675","DOI":"10.1109\/LPT.2013.2248354","article-title":"Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism","volume":"25","author":"Abe","year":"2013","journal-title":"IEEE Photonic Tech L"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"23658","DOI":"10.1364\/OE.19.023658","article-title":"Ultra-small silicon waveguide coupler switch using gap-variable mechanism","volume":"19","author":"Akihama","year":"2011","journal-title":"Opt. Express"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"1553","DOI":"10.1109\/LPT.2014.2329033","article-title":"Time response of a microelectromechanical silicon photonic waveguide coupler switch","volume":"26","author":"Abe","year":"2014","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"e16","DOI":"10.1038\/lsa.2012.16","article-title":"Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers","volume":"1","author":"Akihama","year":"2012","journal-title":"Light Sci. Appl."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"583","DOI":"10.1007\/s00542-012-1661-3","article-title":"An analytical coupling coefficient for MEMS tunable silicon nanowire waveguide coupler devices","volume":"19","author":"Akihama","year":"2013","journal-title":"Microsyst. Technol."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"06GL15","DOI":"10.7567\/JJAP.52.06GL15","article-title":"A compact 1 x 3 silicon photonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler","volume":"52","author":"Munemasay","year":"2013","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"370","DOI":"10.1364\/OPTICA.2.000370","article-title":"Large-scale silicon photonic switches with movable directional couplers","volume":"2","author":"Han","year":"2015","journal-title":"Optica"},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"64","DOI":"10.1364\/OPTICA.3.000064","article-title":"Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers","volume":"3","author":"Seok","year":"2016","journal-title":"Optica"},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"779","DOI":"10.1109\/JPHOT.2012.2198880","article-title":"Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator","volume":"4","author":"Roels","year":"2012","journal-title":"IEEE Photonics J."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"7031","DOI":"10.1364\/OE.18.007031","article-title":"Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator","volume":"18","author":"Ikeda","year":"2010","journal-title":"Opt. Express"},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"221113","DOI":"10.1063\/1.4809733","article-title":"A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers","volume":"102","author":"Ikeda","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"1411","DOI":"10.1109\/LPT.2014.2326405","article-title":"A wide-tuning silicon ring-resonator composed of coupled freestanding waveguides","volume":"26","author":"Chu","year":"2014","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"22034","DOI":"10.1364\/OE.21.022034","article-title":"A tunable notch filter using microelectromechanical microring with gap-variable busline coupler","volume":"21","author":"Ikeda","year":"2013","journal-title":"Opt. Express"},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"839","DOI":"10.1038\/nature01939","article-title":"Optical microcavities","volume":"424","author":"Vahala","year":"2003","journal-title":"Nature"},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"2019","DOI":"10.1007\/s00542-014-2283-8","article-title":"A silicon microring resonator with a nanolatch mechanism","volume":"21","author":"Abe","year":"2015","journal-title":"Microsyst. Technol."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"06GL19","DOI":"10.7567\/JJAP.52.06GL19","article-title":"Fabrication of silicon microdisk resonators with movable waveguides for control of power coupling ratio","volume":"52","author":"Kanamori","year":"2013","journal-title":"Japn. J. Appl. Phys."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"2236","DOI":"10.1109\/LPT.2013.2285130","article-title":"Transmission-width-tunable silicon-photonic microelectromechanical ring resonator","volume":"25","author":"Ordu","year":"2013","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"14421","DOI":"10.1364\/OE.16.014421","article-title":"A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator","volume":"16","author":"Takahashi","year":"2008","journal-title":"Opt. Express"},{"key":"ref_57","doi-asserted-by":"crossref","first-page":"1034","DOI":"10.1109\/LPT.2005.845772","article-title":"MEMS-actuated microdisk resonators with variable power coupling ratios","volume":"17","author":"Lee","year":"2005","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_58","doi-asserted-by":"crossref","first-page":"202","DOI":"10.1109\/JSTQE.2007.893743","article-title":"Silicon microtoroidal resonators with integrated MEMS tunable coupler","volume":"13","author":"Yao","year":"2007","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"4703","DOI":"10.1364\/OE.14.004703","article-title":"Tunable coupling regimes of silicon microdisk resonators using MEMS actuators","volume":"14","author":"Lee","year":"2006","journal-title":"Opt. Express"},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"2444","DOI":"10.1364\/OL.31.002444","article-title":"Variable bandwidth of dynamic add-drop filters based on coupling-controlled microdisk resonators","volume":"31","author":"Lee","year":"2006","journal-title":"Opt. Lett."},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"1508","DOI":"10.1109\/LPT.2007.903872","article-title":"Experimental demonstration of dynamic bandwidth allocation using a MEMS-actuated bandwidth-tunable microdisk resonator filter","volume":"19","author":"Zhang","year":"2007","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_62","doi-asserted-by":"crossref","first-page":"9020","DOI":"10.1364\/OE.19.009020","article-title":"Electrostatic actuation of silicon optomechanical resonators","volume":"19","author":"Sridaran","year":"2011","journal-title":"Opt. Express"},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"275","DOI":"10.1080\/108939597200142","article-title":"Silicon micromachined thermal sensors and actuators","volume":"1","author":"Tien","year":"1997","journal-title":"Microscale Thermophys. Eng."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"103","DOI":"10.1364\/OL.40.000103","article-title":"Controlling thermo-optic response in microresonators using bimaterial cantilevers","volume":"40","author":"Guha","year":"2015","journal-title":"Opt. Lett."},{"key":"ref_65","doi-asserted-by":"crossref","first-page":"2059","DOI":"10.1103\/PhysRevLett.58.2059","article-title":"Inhibited spontaneous emission in solid-state physics and electronics","volume":"58","author":"Yablonovitch","year":"1987","journal-title":"Phys. Rev. Lett."},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"2486","DOI":"10.1103\/PhysRevLett.58.2486","article-title":"Strong localization of photons in certain disordered dielectric superlattices","volume":"58","author":"John","year":"1987","journal-title":"Phys. Rev. Lett."},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"1525","DOI":"10.1364\/OL.28.001525","article-title":"Efficient photonic crystal directional couplers","volume":"28","author":"Thorhauge","year":"2003","journal-title":"Opt. Lett."},{"key":"ref_68","doi-asserted-by":"crossref","first-page":"944","DOI":"10.1038\/nature02063","article-title":"High-q photonic nanocavity in a two-dimensional photonic crystal","volume":"425","author":"Akahane","year":"2003","journal-title":"Nature"},{"key":"ref_69","doi-asserted-by":"crossref","first-page":"207","DOI":"10.1038\/nmat1320","article-title":"Ultra-high-q photonic double-heterostructure nanocavity","volume":"4","author":"Song","year":"2005","journal-title":"Nat. Mater."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"11095","DOI":"10.1364\/OE.16.011095","article-title":"Ultrahigh-Q nanocavity with 1D photonic gap","volume":"16","author":"Notomi","year":"2008","journal-title":"Opt. Express"},{"key":"ref_71","doi-asserted-by":"crossref","first-page":"171911","DOI":"10.1063\/1.3254247","article-title":"An ultrasmall wavelength-selective channel drop switch using a nanomechanical photonic crystal nanocavity","volume":"95","author":"Kanamori","year":"2009","journal-title":"Appl. Phys. Lett."},{"key":"ref_72","doi-asserted-by":"crossref","first-page":"896","DOI":"10.1038\/nature05586","article-title":"Quantum nature of a strongly coupled single quantum dot-cavity system","volume":"445","author":"Hennessy","year":"2007","journal-title":"Nature"},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"012313","DOI":"10.1103\/PhysRevA.76.012313","article-title":"Coherent control of photon transmission: Slowing light in a coupled resonator waveguide doped with\u03bbatoms","volume":"76","author":"Zhou","year":"2007","journal-title":"Phys. Rev. A"},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"083901","DOI":"10.1103\/PhysRevLett.92.083901","article-title":"Stopping light all optically","volume":"92","author":"Yanik","year":"2004","journal-title":"Phys. Rev. Lett."},{"key":"ref_75","doi-asserted-by":"crossref","first-page":"1306","DOI":"10.1109\/JQE.2004.831638","article-title":"Tunable photonic crystal coupled-cavity laser","volume":"40","author":"Mahnkopf","year":"2004","journal-title":"IEEE J. Quantum Elect."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"5574","DOI":"10.1364\/AO.41.005574","article-title":"Tunable photonic crystal microcavities","volume":"41","author":"Pustai","year":"2002","journal-title":"Appl. Optics"},{"key":"ref_77","doi-asserted-by":"crossref","first-page":"3140","DOI":"10.1364\/OE.15.003140","article-title":"Compact electro-optic modulator on silicon-on-insulator substrates using cavities with ultra-small modal volumes","volume":"15","author":"Schmidt","year":"2007","journal-title":"Opt. Express"},{"key":"ref_78","doi-asserted-by":"crossref","first-page":"2010","DOI":"10.1364\/OL.37.002010","article-title":"Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage","volume":"37","author":"Abdulla","year":"2012","journal-title":"Opt. Lett."},{"key":"ref_79","doi-asserted-by":"crossref","unstructured":"Abdulla, S.M.C., Kauppinen, L.J., Dijkstra, M., Berenschot, E., de Boer, M.J., de Ridder, R.M., and Krijnen, G.J.M. (2011, January 23\u201327). Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide. Proceedings of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, Mexico.","DOI":"10.1109\/MEMSYS.2011.5734349"},{"key":"ref_80","doi-asserted-by":"crossref","first-page":"1190","DOI":"10.1109\/LPT.2005.846951","article-title":"Integrated wavelength-selective optical MEMS switching using ring resonator filters","volume":"17","author":"Nielson","year":"2005","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_81","doi-asserted-by":"crossref","first-page":"15864","DOI":"10.1364\/OE.19.015864","article-title":"Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever","volume":"19","author":"Abdulla","year":"2011","journal-title":"Opt. Express"},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"22232","DOI":"10.1364\/OE.18.022232","article-title":"An in-plane nano-mechanics approach to achieve reversible resonance control of photonic crystal nanocavities","volume":"18","author":"Chew","year":"2010","journal-title":"Opt. Express"},{"key":"ref_83","doi-asserted-by":"crossref","first-page":"059503","DOI":"10.1117\/1.3582145","article-title":"Enhanced resonance tuning of photonic crystal nanocavities by integration of optimized near-field multitip nanoprobes","volume":"5","author":"Chew","year":"2011","journal-title":"J. Nanophotonics"},{"key":"ref_84","doi-asserted-by":"crossref","first-page":"061101","DOI":"10.1063\/1.4864257","article-title":"Broadband nanoelectromechanical phase shifting of light on a chip","volume":"104","author":"Poot","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_85","doi-asserted-by":"crossref","first-page":"657","DOI":"10.1109\/JMEMS.2010.2043216","article-title":"Nanomechanical proximity perturbation for switching in silicon-based directional couplers for high-density photonic integrated circuits","volume":"19","author":"Chatterjee","year":"2010","journal-title":"J. Microelectromech. Syst."},{"key":"ref_86","doi-asserted-by":"crossref","first-page":"261102","DOI":"10.1063\/1.4731210","article-title":"Nanophotonic detection of side-coupled nanomechanical cantilevers","volume":"100","author":"Sauer","year":"2012","journal-title":"Appl. Phys. Lett."},{"key":"ref_87","doi-asserted-by":"crossref","first-page":"055202","DOI":"10.1088\/0957-4484\/25\/5\/055202","article-title":"Optical racetrack resonator transduction of nanomechanical cantilevers","volume":"25","author":"Sauer","year":"2014","journal-title":"Nanotechnology"},{"key":"ref_88","doi-asserted-by":"crossref","first-page":"534","DOI":"10.1021\/nl2031585","article-title":"Motion transduction in nanoelectromechanical systems (NEMS) arrays using near-field optomechanical coupling","volume":"12","author":"Basarir","year":"2012","journal-title":"Nano Lett."},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"8367","DOI":"10.1364\/OE.18.008367","article-title":"Coupled mode theory analysis of mode-splitting in coupled cavity system","volume":"18","author":"Li","year":"2010","journal-title":"Opt. Express"},{"key":"ref_90","doi-asserted-by":"crossref","first-page":"8705","DOI":"10.1364\/OE.18.008705","article-title":"Programmable photonic crystal nanobeam cavities","volume":"18","author":"Frank","year":"2010","journal-title":"Opt. Express"},{"key":"ref_91","doi-asserted-by":"crossref","first-page":"19255","DOI":"10.1364\/OE.20.019255","article-title":"Electromechanical tuning of vertically-coupled photonic crystal nanobeams","volume":"20","author":"Midolo","year":"2012","journal-title":"Opt. Express"},{"key":"ref_92","doi-asserted-by":"crossref","first-page":"2517","DOI":"10.1364\/OL.35.002517","article-title":"Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities","volume":"35","author":"Chew","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_93","doi-asserted-by":"crossref","first-page":"1310","DOI":"10.1109\/LPT.2011.2160451","article-title":"Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities","volume":"23","author":"Chew","year":"2011","journal-title":"IEEE Photonic Tech. Lett."},{"key":"ref_94","doi-asserted-by":"crossref","first-page":"081101","DOI":"10.1063\/1.4793580","article-title":"Measurement of coupled cavities' optomechanical coupling coefficient using a nanoelectromechanical actuator","volume":"102","author":"Tian","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_95","doi-asserted-by":"crossref","first-page":"051123","DOI":"10.1063\/1.3298642","article-title":"Demonstration of an air-slot mode-gap confined photonic crystal slab nanocavity with ultrasmall mode volumes","volume":"96","author":"Gao","year":"2010","journal-title":"Appl. Phys. Lett."},{"key":"ref_96","doi-asserted-by":"crossref","first-page":"13809","DOI":"10.1364\/OE.16.013809","article-title":"Design of a high-q air-slot cavity based on a width-modulated line-defect in a photonic crystal slab","volume":"16","author":"Yamamoto","year":"2008","journal-title":"Opt. Express"},{"key":"ref_97","doi-asserted-by":"crossref","first-page":"24905","DOI":"10.1364\/OE.19.024905","article-title":"A chip-scale integrated cavity-electro-optomechanics platform","volume":"19","author":"Winger","year":"2011","journal-title":"Opt. Express"},{"key":"ref_98","doi-asserted-by":"crossref","first-page":"3196","DOI":"10.1364\/OE.23.003196","article-title":"Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity","volume":"23","author":"Pitanti","year":"2015","journal-title":"Opt. Express"},{"key":"ref_99","doi-asserted-by":"crossref","first-page":"27697","DOI":"10.1364\/OE.20.027697","article-title":"Tuning of split-ladder cavity by its intrinsic nano-deformation","volume":"20","author":"Tian","year":"2012","journal-title":"Opt. Express"},{"key":"ref_100","doi-asserted-by":"crossref","first-page":"19338","DOI":"10.1364\/OE.23.019338","article-title":"Tuning the quality factor of split nanobeam cavity by nanoelectromechanical systems","volume":"23","author":"Shi","year":"2015","journal-title":"Opt. Express"},{"key":"ref_101","doi-asserted-by":"crossref","first-page":"3504","DOI":"10.1364\/OL.40.003504","article-title":"Design of mechanically-tunable photonic crystal split-beam nanocavity","volume":"40","author":"Lin","year":"2015","journal-title":"Opt. Lett."},{"key":"ref_102","doi-asserted-by":"crossref","first-page":"153107","DOI":"10.1063\/1.4934187","article-title":"Out-of-plane nano-electro-mechanical tuning of the fano resonance in photonic crystal split-beam nanocavity","volume":"107","author":"Lin","year":"2015","journal-title":"Appl. Phys. Lett."},{"key":"ref_103","doi-asserted-by":"crossref","first-page":"34","DOI":"10.1117\/12.141225","article-title":"Integration of deformable mirror devices with optical fibers and waveguides","volume":"1793","author":"Boysel","year":"1993","journal-title":"Proc. SPIE"},{"key":"ref_104","doi-asserted-by":"crossref","first-page":"54","DOI":"10.1117\/12.236141","article-title":"Integrated optic devices using micromachined metal membrane","volume":"2686","author":"Magel","year":"1996","journal-title":"Proc. SPIE"},{"key":"ref_105","doi-asserted-by":"crossref","first-page":"4320","DOI":"10.1364\/AO.50.004320","article-title":"Mechanically tunable optical filters with a microring resonator","volume":"50","author":"Hah","year":"2011","journal-title":"Appl. Optics"},{"key":"ref_106","doi-asserted-by":"crossref","first-page":"83","DOI":"10.1038\/nphoton.2009.282","article-title":"Plasmonics beyond the diffraction limit","volume":"4","author":"Gramotnev","year":"2010","journal-title":"Nat. Photonics"},{"key":"ref_107","doi-asserted-by":"crossref","first-page":"709","DOI":"10.1038\/nphoton.2012.266","article-title":"Plasmonics for future biosensors","volume":"6","author":"Brolo","year":"2012","journal-title":"Nat. Photonics"},{"key":"ref_108","doi-asserted-by":"crossref","first-page":"442","DOI":"10.1038\/nmat2162","article-title":"Biosensing with plasmonic nanosensors","volume":"7","author":"Anker","year":"2008","journal-title":"Nat. Mater."},{"key":"ref_109","doi-asserted-by":"crossref","first-page":"1047","DOI":"10.1038\/nnano.2014.250","article-title":"Detection of cancer biomarkers in serum using a hybrid mechanical and optoplasmonic nanosensor","volume":"9","author":"Kosaka","year":"2014","journal-title":"Nat. Nanotechnol."},{"key":"ref_110","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1126\/science.1114849","article-title":"Plasmonics: Merging photonics and electronics at nanoscale dimensions","volume":"311","author":"Ozbay","year":"2006","journal-title":"Science"},{"key":"ref_111","doi-asserted-by":"crossref","first-page":"051111","DOI":"10.1063\/1.3078235","article-title":"Wavelength selection by dielectric-loaded plasmonic components","volume":"94","author":"Holmgaard","year":"2009","journal-title":"Appl. Phys. Lett."},{"key":"ref_112","doi-asserted-by":"crossref","first-page":"229","DOI":"10.1038\/nphoton.2014.9","article-title":"High-speed plasmonic phase modulators","volume":"8","author":"Melikyan","year":"2014","journal-title":"Nat. Photonics"},{"key":"ref_113","doi-asserted-by":"crossref","first-page":"4851","DOI":"10.1021\/nl1024529","article-title":"Efficient coupling between dielectric-loaded plasmonic and silicon photonic waveguides","volume":"10","author":"Briggs","year":"2010","journal-title":"Nano Lett."},{"key":"ref_114","doi-asserted-by":"crossref","first-page":"147","DOI":"10.1146\/annurev.physchem.040808.090352","article-title":"Nanofabrication of plasmonic structures","volume":"60","author":"Henzie","year":"2009","journal-title":"Annu. Rev. Phys. Chem."},{"key":"ref_115","doi-asserted-by":"crossref","first-page":"267","DOI":"10.1038\/nphoton.2015.40","article-title":"Compact nanomechanical plasmonic phase modulators","volume":"9","author":"Dennis","year":"2015","journal-title":"Nat. Photonics"},{"key":"ref_116","doi-asserted-by":"crossref","first-page":"261114","DOI":"10.1063\/1.2149971","article-title":"Two-dimensionally localized modes of a nanoscale gap plasmon waveguide","volume":"87","author":"Pile","year":"2005","journal-title":"Appl. Phys. Lett."},{"key":"ref_117","doi-asserted-by":"crossref","first-page":"99","DOI":"10.1007\/s00340-008-3206-0","article-title":"Directional coupler using gap plasmon waveguides","volume":"93","author":"Gramotnev","year":"2008","journal-title":"Appl. Phys. B"},{"key":"ref_118","doi-asserted-by":"crossref","first-page":"5500","DOI":"10.1364\/OE.23.005500","article-title":"Double bi-material cantilever structures for complex surface plasmon modulation","volume":"23","author":"Song","year":"2015","journal-title":"Opt. Express"},{"key":"ref_119","doi-asserted-by":"crossref","first-page":"11404","DOI":"10.1364\/OE.23.011404","article-title":"Design and modeling of an ultra-compact 2x2 nanomechanical plasmonic switch","volume":"23","author":"Aksyuk","year":"2015","journal-title":"Opt. Express"},{"key":"ref_120","doi-asserted-by":"crossref","first-page":"20115","DOI":"10.1364\/OE.18.020115","article-title":"Transmission of surface plasmon polaritons through a nanowire array: Mechano-optical modulation and motion sensing","volume":"18","author":"Fedyanin","year":"2010","journal-title":"Opt. Express"},{"key":"ref_121","doi-asserted-by":"crossref","first-page":"261113","DOI":"10.1063\/1.3533912","article-title":"Cavity-involved plasmonic metamaterial for optical polarization conversion","volume":"97","author":"Li","year":"2010","journal-title":"Appl. Phys. Lett."},{"key":"ref_122","doi-asserted-by":"crossref","first-page":"251104","DOI":"10.1063\/1.3442904","article-title":"High performance optical absorber based on a plasmonic metamaterial","volume":"96","author":"Hao","year":"2010","journal-title":"Appl. Phys. Lett."},{"key":"ref_123","doi-asserted-by":"crossref","first-page":"252","DOI":"10.1038\/nnano.2013.25","article-title":"An electromechanically reconfigurable plasmonic metamaterial operating in the near-infrared","volume":"8","author":"Ou","year":"2013","journal-title":"Nat. Nanotechnol."},{"key":"ref_124","doi-asserted-by":"crossref","first-page":"114009","DOI":"10.1088\/2040-8978\/14\/11\/114009","article-title":"Micromachined tunable metamaterials: A review","volume":"14","author":"Liu","year":"2012","journal-title":"J. Optics"},{"key":"ref_125","doi-asserted-by":"crossref","first-page":"917","DOI":"10.1038\/nmat3431","article-title":"From metamaterials to metadevices","volume":"11","author":"Zheludev","year":"2012","journal-title":"Nat. Mater."},{"key":"ref_126","doi-asserted-by":"crossref","first-page":"92","DOI":"10.1109\/JSTQE.2010.2047847","article-title":"Recent progress in electromagnetic metamaterial devices for terahertz applications","volume":"17","author":"Tao","year":"2011","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_127","doi-asserted-by":"crossref","first-page":"287","DOI":"10.1002\/lpor.201000012","article-title":"Active and tunable metamaterials","volume":"5","author":"Boardman","year":"2011","journal-title":"Laser Photonics Rev."},{"key":"ref_128","doi-asserted-by":"crossref","first-page":"510","DOI":"10.1038\/nnano.2009.186","article-title":"Tunable optical forces between nanophotonic waveguides","volume":"4","author":"Roels","year":"2009","journal-title":"Nat. Nanotechnol."},{"key":"ref_129","doi-asserted-by":"crossref","first-page":"18398","DOI":"10.1364\/OE.21.018398","article-title":"Energy-efficient utilization of bipolar optical forces in nano-optomechanical cavities","volume":"21","author":"Tian","year":"2013","journal-title":"Opt. Express"},{"key":"ref_130","doi-asserted-by":"crossref","first-page":"846","DOI":"10.1038\/ncomms1830","article-title":"All optical reconfiguration of optomechanical filters","volume":"3","author":"Deotare","year":"2012","journal-title":"Nat. Commun."},{"key":"ref_131","doi-asserted-by":"crossref","first-page":"478","DOI":"10.1038\/nphoton.2009.137","article-title":"Static and dynamic wavelength routing via the gradient optical force","volume":"3","author":"Rosenberg","year":"2009","journal-title":"Nat. Photonics"},{"key":"ref_132","doi-asserted-by":"crossref","first-page":"1172","DOI":"10.1126\/science.1156032","article-title":"Cavity optomechanics: Back-action at the mesoscale","volume":"321","author":"Kippenberg","year":"2008","journal-title":"Science"},{"key":"ref_133","doi-asserted-by":"crossref","first-page":"550","DOI":"10.1038\/nature08061","article-title":"A picogram- and nanometre-scale photonic-crystal optomechanical cavity","volume":"459","author":"Eichenfield","year":"2009","journal-title":"Nature"},{"key":"ref_134","doi-asserted-by":"crossref","first-page":"033901","DOI":"10.1103\/PhysRevLett.95.033901","article-title":"Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity","volume":"95","author":"Kippenberg","year":"2005","journal-title":"Phys. Rev. Lett."},{"key":"ref_135","doi-asserted-by":"crossref","first-page":"103601","DOI":"10.1103\/PhysRevLett.103.103601","article-title":"Mechanical oscillation and cooling actuated by the optical gradient force","volume":"103","author":"Lin","year":"2009","journal-title":"Phys. Rev. Lett."},{"key":"ref_136","doi-asserted-by":"crossref","first-page":"820","DOI":"10.1038\/nnano.2009.343","article-title":"Nanomechanical motion measured with an imprecision below that at the standard quantum limit","volume":"4","author":"Teufel","year":"2009","journal-title":"Nat. Nanotechnol."},{"key":"ref_137","doi-asserted-by":"crossref","first-page":"133602","DOI":"10.1103\/PhysRevLett.104.133602","article-title":"Backaction amplification and quantum limits in optomechanical measurements","volume":"104","author":"Verlot","year":"2010","journal-title":"Phys. Rev. Lett."},{"key":"ref_138","doi-asserted-by":"crossref","first-page":"909","DOI":"10.1038\/nphys1425","article-title":"Near-field cavity optomechanics with nanomechanical oscillators","volume":"5","author":"Anetsberger","year":"2009","journal-title":"Nat. Phys."},{"key":"ref_139","doi-asserted-by":"crossref","first-page":"3589","DOI":"10.1063\/1.1544077","article-title":"Room temperature gravitational wave bar detector with optomechanical readout","volume":"93","author":"Conti","year":"2003","journal-title":"J. Appl. Phys."},{"key":"ref_140","doi-asserted-by":"crossref","first-page":"2142","DOI":"10.1021\/nl200791r","article-title":"Reconfigurable photonic metamaterials","volume":"11","author":"Ou","year":"2011","journal-title":"Nano Lett."},{"key":"ref_141","doi-asserted-by":"crossref","first-page":"111905","DOI":"10.1063\/1.4913609","article-title":"Reconfiguring photonic metamaterials with currents and magnetic fields","volume":"106","author":"Valente","year":"2015","journal-title":"Appl. Phys. Lett."},{"key":"ref_142","doi-asserted-by":"crossref","first-page":"147401","DOI":"10.1103\/PhysRevLett.103.147401","article-title":"Reconfigurable terahertz metamaterials","volume":"103","author":"Tao","year":"2009","journal-title":"Phys. Rev. Lett."},{"key":"ref_143","doi-asserted-by":"crossref","first-page":"580","DOI":"10.1007\/s10762-010-9646-8","article-title":"MEMS based structurally tunable metamaterials at terahertz frequencies","volume":"32","author":"Tao","year":"2011","journal-title":"J. Infrared Millimeter Terahertz Waves"},{"key":"ref_144","doi-asserted-by":"crossref","first-page":"559","DOI":"10.1002\/adom.201300163","article-title":"Dynamic manipulation of infrared radiation with MEMS metamaterials","volume":"1","author":"Liu","year":"2013","journal-title":"Adv. Opt. Mater."},{"key":"ref_145","doi-asserted-by":"crossref","first-page":"3589","DOI":"10.1002\/adfm.201101087","article-title":"A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators","volume":"21","author":"Fu","year":"2011","journal-title":"Adv. Funct. Mater."},{"key":"ref_146","doi-asserted-by":"crossref","first-page":"151902","DOI":"10.1063\/1.4759029","article-title":"Micromachined switchable metamaterial with dual resonance","volume":"101","author":"Zhang","year":"2012","journal-title":"Appl. Phys. Lett."},{"key":"ref_147","doi-asserted-by":"crossref","first-page":"4700306","DOI":"10.1109\/JSTQE.2013.2238217","article-title":"Resonance switchable metamaterials using MEMS fabrications","volume":"19","author":"Zhang","year":"2013","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_148","doi-asserted-by":"crossref","first-page":"1274","DOI":"10.1038\/ncomms2285","article-title":"Microelectromechanical maltese-cross metamaterial with tunable terahertz anisotropy","volume":"3","author":"Zhu","year":"2012","journal-title":"Nat. Commun."},{"key":"ref_149","doi-asserted-by":"crossref","first-page":"1792","DOI":"10.1002\/adma.201004341","article-title":"Switchable magnetic metamaterials using micromachining processes","volume":"23","author":"Zhu","year":"2011","journal-title":"Adv. Mater."},{"key":"ref_150","doi-asserted-by":"crossref","first-page":"161104","DOI":"10.1063\/1.4871999","article-title":"Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics","volume":"104","author":"Ho","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_151","doi-asserted-by":"crossref","first-page":"3126","DOI":"10.1364\/OL.38.003126","article-title":"Three-dimensional movable metamaterial using electric split-ring resonators","volume":"38","author":"Lin","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_152","doi-asserted-by":"crossref","first-page":"93","DOI":"10.1109\/JSTQE.2014.2361840","article-title":"Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism","volume":"21","author":"Lin","year":"2015","journal-title":"IEEE J. Sel. Top. Quant."},{"key":"ref_153","doi-asserted-by":"crossref","first-page":"251914","DOI":"10.1063\/1.4885839","article-title":"Tuning characteristics of mirrorlike t-shape terahertz metamaterial using out-of-plane actuated cantilevers","volume":"104","author":"Lin","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_154","doi-asserted-by":"crossref","first-page":"111908","DOI":"10.1063\/1.4798244","article-title":"Development of stress-induced curved actuators for a tunable thz filter based on double split-ring resonators","volume":"102","author":"Lin","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_155","doi-asserted-by":"crossref","first-page":"e171","DOI":"10.1038\/lsa.2014.52","article-title":"Tunable multiband terahertz metamaterials using a reconfigurable electric split-ring resonator array","volume":"3","author":"Ma","year":"2014","journal-title":"Light Sci. Appl."},{"key":"ref_156","doi-asserted-by":"crossref","first-page":"161912","DOI":"10.1063\/1.4803048","article-title":"Polarization-sensitive microelectromechanical systems based tunable terahertz metamaterials using three dimensional electric split-ring resonator arrays","volume":"102","author":"Ma","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"ref_157","doi-asserted-by":"crossref","first-page":"391","DOI":"10.1002\/adom.201500588","article-title":"Reconfigurable digital metamaterial for dynamic switching of terahertz anisotropy","volume":"4","author":"Pitchappa","year":"2016","journal-title":"Adv. Opt. Mater."},{"key":"ref_158","doi-asserted-by":"crossref","first-page":"571","DOI":"10.1364\/OPTICA.2.000571","article-title":"Microelectromechanically reconfigurable interpixelated metamaterial for independent tuning of multiple resonances at terahertz spectral region","volume":"2","author":"Pitchappa","year":"2015","journal-title":"Optica"},{"key":"ref_159","doi-asserted-by":"crossref","first-page":"11678","DOI":"10.1038\/srep11678","article-title":"Microelectromechanically tunable multiband metamaterial with preserved isotropy","volume":"5","author":"Pitchappa","year":"2015","journal-title":"Sci. Rep."},{"key":"ref_160","doi-asserted-by":"crossref","first-page":"201114","DOI":"10.1063\/1.4879284","article-title":"Micro-electro-mechanically switchable near infrared complementary metamaterial absorber","volume":"104","author":"Pitchappa","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_161","doi-asserted-by":"crossref","first-page":"151104","DOI":"10.1063\/1.4871517","article-title":"Micro-electro-mechanically tunable metamaterial with enhanced electro-optic performance","volume":"104","author":"Pitchappa","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"ref_162","doi-asserted-by":"crossref","first-page":"30","DOI":"10.1038\/nmat3168","article-title":"Magnetoelastic metamaterials","volume":"11","author":"Lapine","year":"2012","journal-title":"Nat. Mater."},{"key":"ref_163","doi-asserted-by":"crossref","first-page":"161117","DOI":"10.1063\/1.4873936","article-title":"Electromagnetic tuning of resonant transmission in magnetoelastic metamaterials","volume":"104","author":"Matsui","year":"2014","journal-title":"Appl. Phys. Lett."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/4\/69\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:22:22Z","timestamp":1760210542000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/4\/69"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,4,16]]},"references-count":163,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2016,4]]}},"alternative-id":["mi7040069"],"URL":"https:\/\/doi.org\/10.3390\/mi7040069","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,4,16]]}}}