{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,19]],"date-time":"2026-06-19T14:44:08Z","timestamp":1781880248405,"version":"3.54.5"},"reference-count":14,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T00:00:00Z","timestamp":1471996800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the sensitivity and reduce the cross-talk between the driving electrodes and sensing electrodes. The relationship between the sensitivity of the sensor and the main design parameters is analyzed both theoretically and numerically. The sensing and driving electrodes are optimized to get both high sensing capacitance and low cross-talk. This sensor is fabricated using a micromachining process based on a silicon-on-insulator (SOI) wafer. An open-loop measurement system and a closed-loop self-oscillation system is employed to measure the characteristics of the sensor. The experiment result shows that the sensor has a pressure sensitivity of about 29 Hz\/kPa, a nonlinearity of 0.02%FS, a hysteresis error of 0.05%FS, and a repeatability error of 0.01%FS. The temperature coefficient is less than 2 Hz\/\u00b0C in the range of \u221240 to 80 \u00b0C and the short-term stability of the sensor is better than 0.005%FS.<\/jats:p>","DOI":"10.3390\/mi7090148","type":"journal-article","created":{"date-parts":[[2016,8,24]],"date-time":"2016-08-24T09:59:47Z","timestamp":1472032787000},"page":"148","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":20,"title":["Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor"],"prefix":"10.3390","volume":"7","author":[{"given":"Xiaodong","family":"Sun","sequence":"first","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Weizheng","family":"Yuan","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dayong","family":"Qiao","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ming","family":"Sun","sequence":"additional","affiliation":[{"name":"LeadMEMS Sci&Tech, Xi\u2019an 710075, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sen","family":"Ren","sequence":"additional","affiliation":[{"name":"Key Laboratory of Micro\/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2016,8,24]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"104","DOI":"10.1016\/j.proche.2009.07.026","article-title":"Advances in silicon resonant pressure transducers","volume":"1","author":"Kinnell","year":"2009","journal-title":"Procedia Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"530","DOI":"10.1088\/0964-1726\/6\/5\/004","article-title":"Micromachined pressure sensors: Review and recent developments","volume":"6","author":"Eaton","year":"1997","journal-title":"Smart Mater. 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Technol., 1\u20137."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/9\/148\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T19:29:07Z","timestamp":1760210947000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/7\/9\/148"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,8,24]]},"references-count":14,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2016,9]]}},"alternative-id":["mi7090148"],"URL":"https:\/\/doi.org\/10.3390\/mi7090148","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,8,24]]}}}