{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,9]],"date-time":"2026-09-09T03:58:55Z","timestamp":1788926335052,"version":"build-2803163510"},"reference-count":43,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2016,9,14]],"date-time":"2016-09-14T00:00:00Z","timestamp":1473811200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor (Q) are 13.2 Hz and 47, respectively. The calibration response of a \u00b10.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V\/g and a noise floor of 30 ng\/\u221aHz (at 1 Hz, and 1 atm). The bias stability for a period of 10 h is 30 \u03bcg. The device has endured a shock up to \u00b12.6 g, and the full scale output appears to be approximately \u00b11.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements.<\/jats:p>","DOI":"10.3390\/mi7090167","type":"journal-article","created":{"date-parts":[[2016,9,14]],"date-time":"2016-09-14T10:45:00Z","timestamp":1473849900000},"page":"167","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":35,"title":["Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications"],"prefix":"10.3390","volume":"7","author":[{"given":"Zhu","family":"Li","sequence":"first","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wen","family":"Wu","sequence":"additional","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Pan","family":"Zheng","sequence":"additional","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jin","family":"Liu","sequence":"additional","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5774-0059","authenticated-orcid":false,"given":"Ji","family":"Fan","sequence":"additional","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"},{"name":"Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1014-9784","authenticated-orcid":false,"given":"Liang","family":"Tu","sequence":"additional","affiliation":[{"name":"MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China"},{"name":"Institute of Geophysics, Huazhong University of Science and Technology, Wuhan 430074, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2016,9,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1747","DOI":"10.1109\/5.704280","article-title":"Application of MEMS technology in automotive sensors and actuators","volume":"86","author":"Eddy","year":"1998","journal-title":"Proc. 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