{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,1]],"date-time":"2026-05-01T08:53:09Z","timestamp":1777625589310,"version":"3.51.4"},"reference-count":39,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2016,10,17]],"date-time":"2016-10-17T00:00:00Z","timestamp":1476662400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical beams propagating in-plane with respect to the substrate. The actuator-mirror device is a fabrication on an SOI wafer with 80 \u03bcm etching depth, surface roughness of about 15 nm peak to valley and etching verticality that is better than 0.1 degree. The travel range of the actuators is extracted using an optical method based on optical cavity response and accounting for the diffraction effect. One design achieves a travel range of approximately 9.1 \u00b5m at a resonance frequency of approximately 26.1 kHz, while the second design achieves about 2 \u00b5m at 93.5 kHz. The two specific designs reported achieve peak velocities of about 1.48 and 1.18 m\/s, respectively, which is the highest product of the travel range and frequency for an in-plane microelectromechanical system (MEMS) motion under atmospheric pressure, to the best of the authors\u2019 knowledge. The first design possesses high spring linearity over its travel range with about 350 ppm change in the resonance frequency, while the second design achieves higher resonance frequency on the expense of linearity. The theoretical predications and the experimental results show good agreement.<\/jats:p>","DOI":"10.3390\/mi7100188","type":"journal-article","created":{"date-parts":[[2016,10,17]],"date-time":"2016-10-17T10:33:16Z","timestamp":1476700396000},"page":"188","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity"],"prefix":"10.3390","volume":"7","author":[{"given":"Yomna","family":"Eltagoury","sequence":"first","affiliation":[{"name":"Faculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, Egypt"},{"name":"Si-Ware Systems, 3 Khaled Ibn Al Walid, Qism El-Nozha, Cairo Governorate 11361, Egypt"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mostafa","family":"Soliman","sequence":"additional","affiliation":[{"name":"Department of Power Electronics, Electronics Research Institute, Dokki, Giza 12611, Egypt"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5385-4697","authenticated-orcid":false,"given":"Yasser","family":"Sabry","sequence":"additional","affiliation":[{"name":"Faculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, Egypt"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mohammed","family":"Alotaibi","sequence":"additional","affiliation":[{"name":"National Center of nanotechnology research, King Abdulaziz City for Science and Technology, Riyadh 11442, Saudi Arabia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Diaa","family":"Khalil","sequence":"additional","affiliation":[{"name":"Faculty of Engineering, Ain-Shams University, 1 Elsarayat St. Abbassia, Cairo 11566, Egypt"},{"name":"Si-Ware Systems, 3 Khaled Ibn Al Walid, Qism El-Nozha, Cairo Governorate 11361, Egypt"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2016,10,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1002\/lpor.201400069","article-title":"Monolithic silicon micromachined free-space optical interferometers on chip","volume":"9","author":"Sabry","year":"2015","journal-title":"Laser Photonics Rev."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"13906","DOI":"10.1364\/OE.21.013906","article-title":"Integrated wide-angle scanner based on translating a curved mirror of a cylindrical shape","volume":"21","author":"Sabry","year":"2013","journal-title":"Opt. 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