{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,25]],"date-time":"2026-03-25T16:16:43Z","timestamp":1774455403352,"version":"3.50.1"},"reference-count":36,"publisher":"MDPI AG","issue":"24","license":[{"start":{"date-parts":[[2022,12,7]],"date-time":"2022-12-07T00:00:00Z","timestamp":1670371200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["2020YFC0122102"],"award-info":[{"award-number":["2020YFC0122102"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["51875535"],"award-info":[{"award-number":["51875535"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["52275578"],"award-info":[{"award-number":["52275578"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["61927807"],"award-info":[{"award-number":["61927807"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["20210302123027"],"award-info":[{"award-number":["20210302123027"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["20210302124203"],"award-info":[{"award-number":["20210302124203"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National key research and development program","doi-asserted-by":"publisher","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2020YFC0122102"],"award-info":[{"award-number":["2020YFC0122102"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51875535"],"award-info":[{"award-number":["51875535"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52275578"],"award-info":[{"award-number":["52275578"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61927807"],"award-info":[{"award-number":["61927807"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["20210302123027"],"award-info":[{"award-number":["20210302123027"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["20210302124203"],"award-info":[{"award-number":["20210302124203"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Fundamental Research Program of Shanxi Province","award":["2020YFC0122102"],"award-info":[{"award-number":["2020YFC0122102"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["51875535"],"award-info":[{"award-number":["51875535"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["52275578"],"award-info":[{"award-number":["52275578"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["61927807"],"award-info":[{"award-number":["61927807"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["20210302123027"],"award-info":[{"award-number":["20210302123027"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["20210302124203"],"award-info":[{"award-number":["20210302124203"]}]},{"name":"Fundamental Research Program of Shanxi Province","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["2020YFC0122102"],"award-info":[{"award-number":["2020YFC0122102"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["51875535"],"award-info":[{"award-number":["51875535"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["52275578"],"award-info":[{"award-number":["52275578"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["61927807"],"award-info":[{"award-number":["61927807"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["20210302123027"],"award-info":[{"award-number":["20210302123027"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["20210302124203"],"award-info":[{"award-number":["20210302124203"]}]},{"name":"Shanxi \u201c1331 Project\u201d Key Subject Construction","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Remote Sensing"],"abstract":"<jats:p>Marine acoustic sensors can detect underwater acoustic information. The cilium micro-electro-mechanical system (MEMS) vector hydrophone (CVH) is the core component of the ocean noise measurement system. The performance of the CVH, especially its self-noise, has received widespread attention. In this paper, we propose a solution to improve the performance of the CVH using an array to detect environmental noise in a complex deep-water environment. We analyzed the self-noise source of the CVH and the noise suppression principle of the four-unit MEMS vector hydrophone (FUVH). In addition, we designed the pre-circuit of the FUVH, completed the cross-beam structure by the MEMS processing, and packaged a FUVH. Then, we tested the performance of a packaged FUVH. Finally, the experimental results show that the FUVH reduces the self-noise voltage power spectrum by 6 dB compared to the CVH structure. The FUVH achieves better linearity at low frequencies without reducing the bandwidth and sensitivity. In addition, it minimizes the equivalent self-noise levels by 5.18 and 5.14 dB in the X and Y channels, respectively.<\/jats:p>","DOI":"10.3390\/rs14246186","type":"journal-article","created":{"date-parts":[[2022,12,7]],"date-time":"2022-12-07T04:00:37Z","timestamp":1670385637000},"page":"6186","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Research on Self-Noise Suppression of Marine Acoustic Sensor Arrays"],"prefix":"10.3390","volume":"14","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5673-452X","authenticated-orcid":false,"given":"Haoyu","family":"Tan","sequence":"first","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2551-5388","authenticated-orcid":false,"given":"Guochang","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Haoxuan","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guojun","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6572-2045","authenticated-orcid":false,"given":"Jiangong","family":"Cui","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuhua","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9897-1718","authenticated-orcid":false,"given":"Changde","family":"He","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Licheng","family":"Jia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Renxin","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,12,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Melnichenko, O., Hacker, P., and M\u00fcller, V. (2021). Observations of Mesoscale Eddies in Satellite SSS and Inferred Eddy Salt Transport. Remote Sens., 13.","DOI":"10.3390\/rs13020315"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Wang, R., Qiao, Q., Yang, S., Kong, X., Liu, G., Chen, X., Yang, H., Song, D., Jia, L., and Cui, J. (2022). High-Sensitivity MEMS Shear Probe for Autonomous Profiling Observation of Marine Turbulence. Remote Sens., 14.","DOI":"10.3390\/rs14195004"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Zhu, S., Zhang, G., Wu, D., Liang, X., Zhang, Y., Lv, T., Liu, Y., Chen, P., and Zhang, W. (2022). Research on Direction of Arrival Estimation Based on Self-Contained MEMS Vector Hydrophone. Micromachines, 13.","DOI":"10.3390\/mi13020236"},{"key":"ref_4","first-page":"528","article-title":"An Intelligent Subsurface Buoy Design for Measuring Ocean Ambient Noise","volume":"1495","author":"Li","year":"2012","journal-title":"Adv. Ocean Acoust."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"112790","DOI":"10.1016\/j.sna.2021.112790","article-title":"Hydrophones, fundamental features, design considerations, and various structures: A review","volume":"329","author":"Saheban","year":"2021","journal-title":"Sens. Actuators A Phys."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"044501","DOI":"10.1063\/1.4927333","article-title":"\u201cLollipop-shaped\u201d high-sensitivity Microelectromechanical Systems vector hydrophone based on Parylene encapsulation","volume":"118","author":"Liu","year":"2015","journal-title":"J. Appl. Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"124502","DOI":"10.1063\/1.4962859","article-title":"Development of cup-shaped micro-electromechanical systems-based vector hydrophone","volume":"120","author":"Xu","year":"2016","journal-title":"J. Appl. Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"045015","DOI":"10.1088\/1361-6439\/aa5f31","article-title":"A \u2018fitness-wheel-shaped\u2019 MEMS vector hydrophone for 3D spatial acoustic orientation","volume":"27","author":"Wang","year":"2017","journal-title":"J. Micromech. Microeng."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"142","DOI":"10.1016\/j.sna.2018.05.005","article-title":"Design and implementation of two-component cilia cylinder MEMS vector hydrophone","volume":"277","author":"Xu","year":"2018","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"112575","DOI":"10.1016\/j.sna.2021.112575","article-title":"Design and realization of sculpture-shaped ciliary MEMS vector hydrophone","volume":"331","author":"Chen","year":"2021","journal-title":"Sens. Actuators A Phys."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41378-020-00227-w","article-title":"Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection","volume":"7","author":"Wang","year":"2021","journal-title":"Microsyst. Nanoeng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"607","DOI":"10.1016\/j.ymssp.2017.11.027","article-title":"Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency","volume":"104","author":"Zhang","year":"2018","journal-title":"Mech. Syst. Signal Process."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Song, J., He, C., Wang, R., Xue, C., and Zhang, W. (2018). A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation. Sensors, 18.","DOI":"10.3390\/s18113641"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"989","DOI":"10.1109\/JSEN.2015.2494617","article-title":"Design of the Monolithic Integrated Array MEMS Hydrophone","volume":"16","author":"Liu","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_15","first-page":"5","article-title":"Influence of array elements\u2019 consistency on SNR of hydrophone array","volume":"10","author":"Zhang","year":"2019","journal-title":"J. Meas. Sci. Instrum."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1051\/ijmqe\/2021002","article-title":"Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophone","volume":"12","author":"Zhang","year":"2021","journal-title":"Int. J. Metrol. Qual. Eng."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"460","DOI":"10.1007\/s11018-019-01645-7","article-title":"Use of a Combined Receiver as a Pressure Hydrophone for Increased Noise Suppression","volume":"62","author":"Petrov","year":"2019","journal-title":"Meas. Tech."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"240701","DOI":"10.7498\/aps.69.20201036","article-title":"Thermoacoustic imaging based on noise suppression of multi-channel amplifier and additive circuit","volume":"69","author":"Tang","year":"2020","journal-title":"Acta Phys. Sin."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"112493","DOI":"10.1016\/j.sna.2020.112493","article-title":"A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density","volume":"318","author":"Yang","year":"2021","journal-title":"Sens. Actuators A Phys."},{"key":"ref_20","unstructured":"Chen, S., Xue, C., Zhang, W., Xiong, J., Zhang, B., and Hu, J. (2008, January 6\u20139). A new type of MEMS two axis accelerometer based on Silicon. Proceedings of the 2008 3rd IEEE International Conference on Nano\/Micro Engineered and Molecular Systems, Sanya, China."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"413","DOI":"10.1109\/TUFFC.2019.2943955","article-title":"A Method and an Experimental Setup for Measuring the Self-Noise of Piezoelectric Hydrophones","volume":"67","author":"Krishnakumar","year":"2020","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"903","DOI":"10.1109\/16.210197","article-title":"Mechanical-thermal Noise in Micromachined Acoustic and Vibration Sensors","volume":"40","author":"Gabrielson","year":"1993","journal-title":"IEEE Trans. Electron. Devices"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"405","DOI":"10.1115\/1.2874471","article-title":"Fundamental Noise Limits for Miniature Acoustic and Vibration Sensors","volume":"117","author":"Gabrielson","year":"1995","journal-title":"J. Vib. Acoust."},{"key":"ref_24","first-page":"4","article-title":"Self-noise analysis of the MEMS hydrophone","volume":"35","author":"Fang","year":"2014","journal-title":"J. Harbin Eng. Univ."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"2338","DOI":"10.1109\/JSEN.2017.2671442","article-title":"Thermal-Mechanical Noise in Resonant Thin-Film Magnetoelectric Sensors","volume":"17","author":"Durdaut","year":"2017","journal-title":"IEEE Sens. J."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1015","DOI":"10.1016\/j.ymssp.2005.08.013","article-title":"Structural dynamics of microsystems\u2014Current state of research and future directions","volume":"20","author":"Lin","year":"2006","journal-title":"Mech. Syst. Signal Process."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"024501","DOI":"10.1115\/1.4000766","article-title":"Added-Mass Effect in Modeling of Cilia-Based Devices for Microfluidic Systems","volume":"132","author":"Kongthon","year":"2010","journal-title":"J. Vib. Acoust."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"07LT02","DOI":"10.1088\/0022-3727\/49\/7\/07LT02","article-title":"Wide-frequency-bandwidth whisker-inspired MEMS vector hydrophone encapsulated with parylene","volume":"49","author":"Wang","year":"2016","journal-title":"J. Phys. D Appl. Phys."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"2835","DOI":"10.1109\/TSP.2006.874781","article-title":"Detection of an unknown rank-one component in white noise","volume":"54","author":"Besson","year":"2006","journal-title":"IEEE Trans. Signal Process."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"815","DOI":"10.1016\/j.mejo.2011.01.002","article-title":"Improvement of the MEMS bionic vector hydrophone","volume":"42","author":"Zhang","year":"2011","journal-title":"Microelectron. J."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"024125","DOI":"10.3788\/HPLPB20152702.24125","article-title":"Analysis for microstructure of MEMS bionic vector hydrophone","volume":"27","author":"Guo","year":"2015","journal-title":"High Power Laser Part. Beams"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"17678","DOI":"10.1109\/JSEN.2021.3083582","article-title":"The Influence of Ambient Temperature on the Sensitivity of MEMS Vector Hydrophone","volume":"21","author":"Liang","year":"2021","journal-title":"IEEE Sens. J."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"1021","DOI":"10.1016\/j.mejo.2007.09.008","article-title":"Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone","volume":"38","author":"Xue","year":"2007","journal-title":"Microelectron. J."},{"key":"ref_34","doi-asserted-by":"crossref","unstructured":"Liu, G., Cao, W., Zhang, G., Wang, Z., Tan, H., Miao, J., Li, Z., Zhang, W., and Wang, R. (2021). Design and Simulation of Flexible Underwater Acoustic Sensor Based on 3D Buckling Structure. Micromachines, 12.","DOI":"10.3390\/mi12121536"},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Zhang, G., Zhang, L., Ji, S., Yang, X., Wang, R., Zhang, W., and Yang, S. (2021). Design and Implementation of a Composite Hydrophone of Sound Pressure and Sound Pressure Gradient. Micromachines, 12.","DOI":"10.3390\/mi12080939"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"370","DOI":"10.1007\/s11804-017-1428-4","article-title":"Method for measuring self-noise of vector hydrophones","volume":"16","author":"Li","year":"2017","journal-title":"J. Mar. Sci. Appl."}],"container-title":["Remote Sensing"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-4292\/14\/24\/6186\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:35:29Z","timestamp":1760146529000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-4292\/14\/24\/6186"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,12,7]]},"references-count":36,"journal-issue":{"issue":"24","published-online":{"date-parts":[[2022,12]]}},"alternative-id":["rs14246186"],"URL":"https:\/\/doi.org\/10.3390\/rs14246186","relation":{},"ISSN":["2072-4292"],"issn-type":[{"value":"2072-4292","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,12,7]]}}}